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High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container Grant 10,207,349 - Mitsuoka , et al. Feb | 2019-02-19 |
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Separation and regeneration apparatus and substrate processing apparatus Grant 10,115,609 - Mitsuoka , et al. October 30, 2 | 2018-10-30 |
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Substrate Processing Apparatus App 20180254200 - Kawabuchi; Yosuke ;   et al. | 2018-09-06 |
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 10,046,370 - Goshi , et al. August 14, 2 | 2018-08-14 |
Method Of Cleaning Substrate Processing Apparatus And System Of Cleaning Substrate Processing Apparatus App 20180158699 - Kitayama; Shotaro ;   et al. | 2018-06-07 |
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Substrate processing method, substrate processing apparatus, and storage medium Grant 9,881,784 - Ohno , et al. January 30, 2 | 2018-01-30 |
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Rotary Valve And Quick Exhaust Valve For Railway Vehicle App 20170321814 - AOKI; Kazuhiro ;   et al. | 2017-11-09 |
Cross Hole Deburring Tool, Cross Hole Deburring Method, And Rotary Valve Machined By Using The Same App 20170282258 - OHNO; Hiroki | 2017-10-05 |
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium Grant 9,662,685 - Goshi , et al. May 30, 2 | 2017-05-30 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 9,583,330 - Ji , et al. February 28, 2 | 2017-02-28 |
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Rotary valve Grant D748,226 - Aoki , et al. January 26, 2 | 2016-01-26 |
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Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20140250714 - JI; Linan ;   et al. | 2014-09-11 |
Substrate processing method and substrate processing apparatus Grant 8,794,250 - Orii , et al. August 5, 2 | 2014-08-05 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus Grant 8,771,429 - Ji , et al. July 8, 2 | 2014-07-08 |
Liquid processing method, liquid processing apparatus and storage medium Grant 8,747,689 - Ohno , et al. June 10, 2 | 2014-06-10 |
High-pressure Container, Substrate Processing Apparatus, And Method For Manufacturing High-pressure Container App 20140145390 - Mitsuoka; Kazuyuki ;   et al. | 2014-05-29 |
Substrate Processing Method, Substrate Processing Apparatus And Storage Medium App 20140020721 - HAYASHI; Hidekazu ;   et al. | 2014-01-23 |
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Substrate Processing Method And Substrate Processing Apparatus App 20130145643 - ORII; Takehiko ;   et al. | 2013-06-13 |
Supercritical drying method and apparatus for semiconductor substrates Grant 8,372,212 - Sato , et al. February 12, 2 | 2013-02-12 |
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus App 20130019905 - JI; Linan ;   et al. | 2013-01-24 |
Substrate processing method and substrate processing apparatus Grant 8,337,659 - Orii , et al. December 25, 2 | 2012-12-25 |
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20120304485 - Hayashi; Hidekazu ;   et al. | 2012-12-06 |
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Liquid Processing Method, Liquid Processing Apparatus And Storage Medium App 20120187088 - Ohno; Hiroki ;   et al. | 2012-07-26 |
Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium Grant 8,197,606 - Watanabe , et al. June 12, 2 | 2012-06-12 |
Substrate cleaning method and computer readable storage medium Grant 8,147,617 - Sekiguchi , et al. April 3, 2 | 2012-04-03 |
Substrate processing method and substrate processing apparatus Grant 8,137,478 - Sekiguchi , et al. March 20, 2 | 2012-03-20 |
Substrate processing apparatus and substrate processing method Grant 8,056,257 - Ohno , et al. November 15, 2 | 2011-11-15 |
Noncontact IC label and method and apparatus for manufacturing the same Grant 8,042,742 - Kagaya , et al. October 25, 2 | 2011-10-25 |
Substrate Processing Method And Substrate Processing Apparatus App 20100307543 - SEKIGUCHI; Kenji ;   et al. | 2010-12-09 |
Substrate cleaning method, substrate cleaning equipment, computer program, and program recording medium Grant 7,837,804 - Ohno , et al. November 23, 2 | 2010-11-23 |
Substrate processing method and substrate processing apparatus Grant 7,806,989 - Sekiguchi , et al. October 5, 2 | 2010-10-05 |
Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method Grant 7,803,230 - Amai , et al. September 28, 2 | 2010-09-28 |
Substrate Cleaning Method, Substrate Cleaning Apparatus, Control Program, And Computer-readable Storage Medium App 20100206329 - WATANABE; Tsukasa ;   et al. | 2010-08-19 |
Ozone processing apparatus and ozone processing method Grant 7,767,006 - Tokuno , et al. August 3, 2 | 2010-08-03 |
Ion exchange equipment App 20090114583 - Yoneda; Tsuyoshi ;   et al. | 2009-05-07 |
Substrate Cleaning Method, Substrate Cleaning Equipment, Computer Program, and Program Recording Medium App 20080251101 - Ohno; Hiroki ;   et al. | 2008-10-16 |
Substrate processing apparatus and substrate processing method App 20080127508 - Ohno; Hiroki ;   et al. | 2008-06-05 |
Substrate Cleaning Method and Computer Readable Storage Medium App 20080041420 - Sekiguchi; Kenji ;   et al. | 2008-02-21 |
Noncontact Ic Label and Method and Apparatus for Manufacturing the Same App 20080042266 - Kagaya; Hitoshi ;   et al. | 2008-02-21 |
Substrate Processing Method and Substrate Processing Apparatus App 20070223342 - Orii; Takehiko ;   et al. | 2007-09-27 |
Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method App 20070175501 - Amai; Masaru ;   et al. | 2007-08-02 |
Substrate cleaning method and substrate cleaning apparatus App 20070125405 - Sekiguchi; Kenji ;   et al. | 2007-06-07 |
Ozone processing apparatus and ozone processing method App 20070107751 - Tokuno; Yoshichika ;   et al. | 2007-05-17 |
Beverage maker App 20070017382 - Takizawa; Hiroyuki ;   et al. | 2007-01-25 |
Beverage maker App 20070017378 - Takizawa; Hiroyuki ;   et al. | 2007-01-25 |
Beverage maker App 20070017380 - Takizawa; Hiroyuki ;   et al. | 2007-01-25 |
Substrate Processing method and substrate processing apparatus App 20070017555 - Sekiguchi; Kenji ;   et al. | 2007-01-25 |
Beverage maker App 20070017379 - Takizawa; Hiroyuki ;   et al. | 2007-01-25 |
Method of removing polymer and apparatus for doing the same Grant 7,064,079 - Sonoda , et al. June 20, 2 | 2006-06-20 |
Radio relay device App 20050136956 - Ohno, Hiroki | 2005-06-23 |
Processing apparatus and processing method Grant 6,895,979 - Kohama , et al. May 24, 2 | 2005-05-24 |
Film forming method and film forming apparatus App 20050026454 - Konishi, Nobuo ;   et al. | 2005-02-03 |
Film forming method by radiating a plasma on a surface of a low dielectric constant film Grant 6,800,546 - Konishi , et al. October 5, 2 | 2004-10-05 |
Cordless telephone App 20040097275 - Ohno, Hiroki ;   et al. | 2004-05-20 |
Electromagnetic radiation exposure protection mechanism App 20040094316 - Ohno, Hiroki ;   et al. | 2004-05-20 |
Method of removing polymer and apparatus for doing the same App 20040009669 - Sonoda, Hiroyuki ;   et al. | 2004-01-15 |
Processing apparatus and processing method App 20030127117 - Kohama, Kyouji ;   et al. | 2003-07-10 |
Processing apparatus and processing method Grant 6,536,452 - Kohama , et al. March 25, 2 | 2003-03-25 |
Film forming method and film forming apparatus App 20020177298 - Konishi, Nobuo ;   et al. | 2002-11-28 |
Washing liquid for post-polishing and polishing-cleaning method in semiconductor process Grant 5,830,280 - Sato , et al. November 3, 1 | 1998-11-03 |
Vibrator attaching structure Grant 5,801,466 - Odagiri , et al. September 1, 1 | 1998-09-01 |
Telephone system and bell sound detecting method thereof Grant 5,758,289 - Lipp , et al. May 26, 1 | 1998-05-26 |
Telephone system Grant 5,732,355 - Lipp , et al. March 24, 1 | 1998-03-24 |
Antenna device for radio transmission-reception apparatus Grant 5,650,790 - Fukuchi , et al. July 22, 1 | 1997-07-22 |