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SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus Grant 10,950,435 - Hamano , et al. March 16, 2 | 2021-03-16 |
SiC epitaxial wafer, method for manufacturing SiC epitaxial wafer, SiC device, and power conversion apparatus Grant 10,910,218 - Hamano , et al. February 2, 2 | 2021-02-02 |
Manufacturing method for silicon carbide epitaxial wafer and manufacturing method for silicon carbide semiconductor device Grant 10,858,758 - Ohno December 8, 2 | 2020-12-08 |
Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus Grant 10,711,372 - Ohno , et al. | 2020-07-14 |
Semiconductor wafer, semiconductor device, and method for producing semiconductor device Grant 10,707,075 - Hamano , et al. | 2020-07-07 |
Semiconductor Wafer, Semiconductor Device, And Method For Producing Semiconductor Device App 20200144053 - HAMANO; Kenichi ;   et al. | 2020-05-07 |
Manufacturing Method For Silicon Carbide Epitaxial Wafer And Manufacturing Method For Silicon Carbide Semiconductor Device App 20200017991 - OHNO; Akihito | 2020-01-16 |
Sic Epitaxial Wafer, Method For Manufacturing Sic Epitaxial Wafer, Sic Device, And Power Conversion Apparatus App 20200020528 - HAMANO; Kenichi ;   et al. | 2020-01-16 |
Silicon Carbide Epitaxial Wafer Manufacturing Method, Silicon Carbide Semiconductor Device Manufacturing Method And Silicon Carb App 20190284718 - OHNO; Akihito ;   et al. | 2019-09-19 |
Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus Grant 10,370,775 - Ohno , et al. | 2019-08-06 |
Method for manufacturing silicon carbide semiconductor device Grant 9,957,638 - Ohno , et al. May 1, 2 | 2018-05-01 |
Single-crystal 4H-SiC substrate Grant 9,903,048 - Ohno , et al. February 27, 2 | 2018-02-27 |
Substrate support and semiconductor manufacturing apparatus Grant 9,824,911 - Ohno , et al. November 21, 2 | 2017-11-21 |
Silicon Carbide Epitaxial Wafer Manufacturing Method, Silicon Carbide Semiconductor Device Manufacturing Method And Silicon Carbide Epitaxial Wafer Manufacturing Apparatus App 20170314160 - OHNO; Akihito ;   et al. | 2017-11-02 |
Method for manufacturing a single-crystal 4H--SiC substrate Grant 9,752,254 - Ohno , et al. September 5, 2 | 2017-09-05 |
Manufacturing Method And Apparatus For Manufacturing Silicon Carbide Epitaxial Wafer App 20170040166 - OHNO; Akihito ;   et al. | 2017-02-09 |
Manufacturing method and apparatus for manufacturing silicon carbide epitaxial wafer Grant 9,564,315 - Ohno , et al. February 7, 2 | 2017-02-07 |
Method of manufacturing semiconductor element Grant 9,478,418 - Era , et al. October 25, 2 | 2016-10-25 |
METHOD FOR MANUFACTURING A SINGLE-CRYSTAL 4H-SiC SUBSTRATE App 20160298262 - Ohno; Akihito ;   et al. | 2016-10-13 |
SINGLE-CRYSTAL 4H-SiC SUBSTRATE App 20160298264 - Ohno; Akihito ;   et al. | 2016-10-13 |
Single-crystal 4H-SiC substrate Grant 9,422,640 - Ohno , et al. August 23, 2 | 2016-08-23 |
Manufacturing method of high electron mobility transistor Grant 9,355,841 - Yamamoto , et al. May 31, 2 | 2016-05-31 |
Manufacturing Method Of High Electron Mobility Transistor App 20160071727 - YAMAMOTO; Takahiro ;   et al. | 2016-03-10 |
Method Of Manufacturing Semiconductor Element App 20150348780 - ERA; Atsushi ;   et al. | 2015-12-03 |
Method For Manufacturing Silicon Carbide Semiconductor Device App 20150267320 - OHNO; Akihito ;   et al. | 2015-09-24 |
SINGLE-CRYSTAL 4H-SiC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME App 20140295136 - Ohno; Akihito ;   et al. | 2014-10-02 |
Semiconductor laser Grant 8,731,018 - Shigihara , et al. May 20, 2 | 2014-05-20 |
Substrate Support And Semiconductor Manufacturing Apparatus App 20130327274 - Ohno; Akihito ;   et al. | 2013-12-12 |
Method Of Manufacturing Nitride Semiconductor Device App 20120322245 - OHNO; Akihito | 2012-12-20 |
Nitride semiconductor light-emitting device Grant 8,263,999 - Ohno , et al. September 11, 2 | 2012-09-11 |
Semiconductor Laser App 20120195337 - Shigihara; Kimio ;   et al. | 2012-08-02 |
Method For Manufacturing Semiconductor Device App 20110177679 - Ohno; Akihito ;   et al. | 2011-07-21 |
Method For Manufacturing Nitride Semiconductor Device App 20110177678 - Ohno; Akihito ;   et al. | 2011-07-21 |
Method for production of a nitride semiconductor laminated structure and an optical semiconductor device Grant 7,923,742 - Ohno , et al. April 12, 2 | 2011-04-12 |
Semiconductor Light-emitting Devices App 20100289056 - Ohno; Akihito ;   et al. | 2010-11-18 |
Method for manufacturing nitride semiconductor device Grant 7,825,012 - Ohno , et al. November 2, 2 | 2010-11-02 |
Method for manufacturing nitride semiconductor stacked structure and semiconductor light-emitting device Grant 7,763,486 - Ohno , et al. July 27, 2 | 2010-07-27 |
Method For Manufacturing Nitride Semiconductor Device App 20100075483 - Ohno; Akihito ;   et al. | 2010-03-25 |
Semiconductor device manufacturing method Grant 7,632,695 - Ohno , et al. December 15, 2 | 2009-12-15 |
Nitride Semiconductor Laminated Structure And Optical Semiconductor Device, And Methods For Producing The Same App 20090236589 - Ohno; Akihito ;   et al. | 2009-09-24 |
Nitride Semiconductor Stacked Structure And Semiconductor Optical Device, And Methods For Manufacturing The Same App 20090008659 - Ohno; Akihito ;   et al. | 2009-01-08 |
Nitride Semiconductor Light-emitting Device App 20080251804 - Ohno; Akihito ;   et al. | 2008-10-16 |
Semiconductor Light-emitting Devices App 20080073660 - Ohno; Akihito ;   et al. | 2008-03-27 |
Semiconductor Device Manufacturing Method App 20080070387 - Ohno; Akihito ;   et al. | 2008-03-20 |
Method of manufacturing semiconductor light emitting device Grant 7,172,429 - Tomita , et al. February 6, 2 | 2007-02-06 |
Semiconductor light emitting device and manufacturing method thereof App 20060166392 - Tomita; Nobuyuki ;   et al. | 2006-07-27 |
Semiconductor device and semiconductor device manufacturing method App 20060086948 - Ohno; Akihito ;   et al. | 2006-04-27 |