Patent | Date |
---|
Semiconductor device Grant 10,153,274 - Ohnishi Dec | 2018-12-11 |
Semiconductor Device App 20170236818 - OHNISHI; Sadayuki | 2017-08-17 |
Semiconductor device Grant 9,660,061 - Ohnishi May 23, 2 | 2017-05-23 |
Semiconductor Device App 20160240633 - OHNISHI; SADAYUKI | 2016-08-18 |
Method of fabricating a semiconductor device Grant 8,598,044 - Usami , et al. December 3, 2 | 2013-12-03 |
Method for manufacturing a semiconductor device having a multi-layered insulating structure of SiOCH layers and an SiO.sub.2 layer Grant 7,833,901 - Ohto , et al. November 16, 2 | 2010-11-16 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,582,970 - Ohnishi , et al. September 1, 2 | 2009-09-01 |
Manufacturing method of semiconductor device Grant 7,563,705 - Tonegawa , et al. July 21, 2 | 2009-07-21 |
Carbon Containing Silicon Oxide Film Having High Ashing Tolerance And Adhesion App 20080290522 - Ohnishi; Sadayuki ;   et al. | 2008-11-27 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,420,279 - Ohnishi , et al. September 2, 2 | 2008-09-02 |
Semiconductor device, and production method for manufacturing such semiconductor device App 20070045861 - Ohto; Koichi ;   et al. | 2007-03-01 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion App 20060255466 - Ohnishi; Sadayuki ;   et al. | 2006-11-16 |
Semiconductor device having two distinct sioch layers Grant 7,132,732 - Ohto , et al. November 7, 2 | 2006-11-07 |
Method of fabricating a semiconductor device App 20060216946 - Usami; Tatsuya ;   et al. | 2006-09-28 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion Grant 7,102,236 - Ohnishi , et al. September 5, 2 | 2006-09-05 |
Method of fabricating semiconductor device using plasma-enhanced CVD Grant 7,074,698 - Morita , et al. July 11, 2 | 2006-07-11 |
Manufacturing method of semiconductor device App 20060141778 - Tonegawa; Takashi ;   et al. | 2006-06-29 |
Carbon containing silicon oxide film having high ashing tolerance and adhesion App 20050006665 - Ohnishi, Sadayuki ;   et al. | 2005-01-13 |
Semiconductor device, and production method for manufacturing such semiconductor device App 20040183162 - Ohto, Koichi ;   et al. | 2004-09-23 |
Method of fabricating semiconductor device using Plasma-Enhanced CVD App 20040185668 - Morita, Noboru ;   et al. | 2004-09-23 |
Semiconductor device and manufacturing method thereof App 20040041269 - Ohnishi, Sadayuki | 2004-03-04 |
Manufacturing method of semiconductor device App 20030155657 - Tonegawa, Takashi ;   et al. | 2003-08-21 |
Method of producing semiconductor device with insulating film having at least silicon nitride film Grant 5,397,748 - Watanabe , et al. March 14, 1 | 1995-03-14 |