Patent | Date |
---|
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 11,435,662 - Ohkubo , et al. September 6, 2 | 2022-09-06 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device Grant 11,415,875 - Maeda , et al. August 16, 2 | 2022-08-16 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20220214608 - SHISHIDO; Hiroaki ;   et al. | 2022-07-07 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20220179300 - SHISHIDO; Hiroaki ;   et al. | 2022-06-09 |
Mask Blank, Method For Manufacturing Reflective Mask, And Method For Manufacturing Semiconductor Device App 20220163880 - NOZAWA; Osamu ;   et al. | 2022-05-26 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 11,281,089 - Nozawa , et al. March 22, 2 | 2022-03-22 |
Mask Blank, Transfer Mask, And Semiconductor-device Manufacturing Method App 20220043335 - OHKUBO; Ryo ;   et al. | 2022-02-10 |
Mask Blank, Transfer Mask, And Semiconductor-device Manufacturing Method App 20220035235 - OHKUBO; Ryo ;   et al. | 2022-02-03 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20210364910 - OHKUBO; Ryo ;   et al. | 2021-11-25 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 11,119,400 - Ohkubo , et al. September 14, 2 | 2021-09-14 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20210255538 - MAEDA; Hitoshi ;   et al. | 2021-08-19 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device Grant 11,054,735 - Kajiwara , et al. July 6, 2 | 2021-07-06 |
Mask blank, phase shift mask, and method of manufacturing semiconductor device Grant 11,022,875 - Taniguchi , et al. June 1, 2 | 2021-06-01 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20210149294 - NOZAWA; Osamu ;   et al. | 2021-05-20 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device Grant 11,009,787 - Maeda , et al. May 18, 2 | 2021-05-18 |
Mask Blank, Method For Producing Transfer Mask, And Method For Producing Semiconductor Device App 20210109436 - OHKUBO; Ryo ;   et al. | 2021-04-15 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20210088895 - MAEDA; Hitoshi ;   et al. | 2021-03-25 |
Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device Grant 10,915,016 - Nozawa , et al. February 9, 2 | 2021-02-09 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20200409252 - TANIGUCHI; Kazutake ;   et al. | 2020-12-31 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20200150524 - NOZAWA; Osamu ;   et al. | 2020-05-14 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20200064725 - NOZAWA; Osamu ;   et al. | 2020-02-27 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 10,571,797 - Nozawa , et al. Feb | 2020-02-25 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 10,527,931 - Nozawa , et al. J | 2020-01-07 |
Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device Grant 10,481,485 - Nozawa , et al. Nov | 2019-11-19 |
Mask blank, transfer mask and methods of manufacturing the same Grant 10,365,555 - Shishido , et al. July 30, 2 | 2019-07-30 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20190163047 - KAJIWARA; Takenori ;   et al. | 2019-05-30 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20190040516 - OHKUBO; Ryo ;   et al. | 2019-02-07 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20190004419 - NOZAWA; Osamu ;   et al. | 2019-01-03 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device App 20180299767 - NOZAWA; Osamu ;   et al. | 2018-10-18 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device Grant 10,101,650 - Nozawa , et al. October 16, 2 | 2018-10-16 |
Mask Blank, Transfer Mask, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device App 20180259841 - NOZAWA; Osamu ;   et al. | 2018-09-13 |
Mask blank and method of manufacturing phase shift mask Grant 9,952,497 - Okubo , et al. April 24, 2 | 2018-04-24 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20180052387 - NOZAWA; Osamu ;   et al. | 2018-02-22 |
Mask blank, transfer mask, and method for manufacturing transfer mask Grant 9,726,972 - Shishido , et al. August 8, 2 | 2017-08-08 |
Reflective mask blank, reflective mask and method of manufacturing reflective mask Grant 9,625,805 - Sakai , et al. April 18, 2 | 2017-04-18 |
Mask Blank And Method Of Manufacturing Phase Shift Mask App 20170023856 - OKUBO; Yasushi ;   et al. | 2017-01-26 |
Mask blank and method of manufacturing phase shift mask Grant 9,494,852 - Okubo , et al. November 15, 2 | 2016-11-15 |
Mask Blank, Transfer Mask And Methods Of Manufacturing The Same App 20160202602 - SHISHIDO; Hiroaki ;   et al. | 2016-07-14 |
Mask Blank, Transfer Mask, And Method For Manufacturing Transfer Mask App 20160202603 - SHISHIDO; Hiroaki ;   et al. | 2016-07-14 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device App 20160187769 - NOZAWA; Osamu ;   et al. | 2016-06-30 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Reflective Mask App 20150261083 - SAKAI; Kazuya ;   et al. | 2015-09-17 |
Mask Blank And Method Of Manufacturing Phase Shift Mask App 20150198873 - Okubo; Yasushi ;   et al. | 2015-07-16 |
Reflective mask blank, reflective mask and method of manufacturing reflective mask Grant 9,075,315 - Sakai , et al. July 7, 2 | 2015-07-07 |
Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device Grant 9,029,048 - Sakai , et al. May 12, 2 | 2015-05-12 |
Mask Blank, Transfer Mask, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device App 20130078553 - SAKAI; Kazuya ;   et al. | 2013-03-28 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Reflective Mask App 20130078554 - SAKAI; Kazuya ;   et al. | 2013-03-28 |
Photomask blank manufacturing method and photomask manufacturing method Grant 8,221,941 - Suzuki , et al. July 17, 2 | 2012-07-17 |
Photomask Blank Manufacturing Method And Photomask Manufacturing Method App 20100167185 - SUZUKI; Toshiyuki ;   et al. | 2010-07-01 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,632,612 - Shiota , et al. December 15, 2 | 2009-12-15 |
Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect Grant 7,282,305 - Shoki , et al. October 16, 2 | 2007-10-16 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20070082278 - Shiota; Yuuki ;   et al. | 2007-04-12 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,115,341 - Shiota , et al. October 3, 2 | 2006-10-03 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask Grant 7,011,910 - Shiota , et al. March 14, 2 | 2006-03-14 |
Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect App 20040175633 - Shoki, Tsutomo ;   et al. | 2004-09-09 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask App 20040086788 - Shiota, Yuki ;   et al. | 2004-05-06 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20030180631 - Shiota, Yuuki ;   et al. | 2003-09-25 |