Ohkubo; Akinori

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ohkubo; Akinori.The latest application filed is for "wavefront measuring apparatus, wavefront measuring method, method of manufacturing optical element, and assembly adjustment apparatus of optical system".

Company Profile

0.18.20

Ohkubo; Akinori - Utsunomiya N/A JP
OHKUBO; Akinori - Hidaka-shi JP
Ohkubo; Akinori - Utsunomiya-shi JP
Ohkubo; Akinori - Tucson AZ
Ohkubo; Akinori - Tochigi-ken JP
Ohkubo; Akinori - Tsurugashima JP
Ohkubo, Akinori - Tsurugashima-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and method for estimating wavefront parameters Grant 9,182,289 - Barrett , et al. November 10, 2	2015-11-10
Wavefront optical measuring apparatus Grant 9,091,614 - Ohkubo , et al. July 28, 2	2015-07-28
Wavefront Measuring Apparatus, Wavefront Measuring Method, Method Of Manufacturing Optical Element, And Assembly Adjustment Apparatus Of Optical System App 20150073752 - OHKUBO; Akinori ; et al.	2015-03-12
Apparatus And Method For Estimating Wavefront Parameters App 20130092816 - Barrett; Harrison ; et al.	2013-04-18
Wavefront Optical Measuring Apparatus App 20120296591 - Ohkubo; Akinori ; et al.	2012-11-22
Method and apparatus for measuring surface profile of an object Grant 8,314,938 - Ohkubo , et al. November 20, 2	2012-11-20
Light intensity distribution measurement apparatus and measurement method, and exposure apparatus Grant 8,223,313 - Ohkubo July 17, 2	2012-07-17
Method for measuring polarization characteristics and measurement apparatus Grant 8,139,215 - Ohkubo March 20, 2	2012-03-20
Method And Apparatus For Measuring Surface Profile Of An Object App 20120026511 - Ohkubo; Akinori ; et al.	2012-02-02
Exposure apparatus Grant 8,085,384 - Ohkubo , et al. December 27, 2	2011-12-27
Method and device for image measurement, exposure apparatus, substrate for image measurement, and device manufacturing method Grant 8,009,272 - Ohkubo August 30, 2	2011-08-30
Measurement apparatus, measurement method, exposure apparatus, and device manufacturing method Grant 7,929,113 - Ohkubo April 19, 2	2011-04-19
Measurement apparatus, exposure apparatus, and device manufacturing method Grant 7,911,585 - Ohkubo March 22, 2	2011-03-22
Method For Measuring Polarization Characteristics And Measurement Apparatus App 20100118304 - Ohkubo; Akinori	2010-05-13
Measurement Apparatus, Measurement Method, Exposure Apparatus, And Device Manufacturing Method App 20090274963 - Ohkubo; Akinori	2009-11-05
Light Intensity Distribution Measurement Apparatus And Measurement Method, And Exposure Apparatus App 20090180094 - Ohkubo; Akinori	2009-07-16
Measurement Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20090009740 - Ohkubo; Akinori	2009-01-08
Method And Device For Image Measurement, Exposure Apparatus, Substrate For Image Measurement, And Device Manufacturing Method App 20080291420 - Ohkubo; Akinori	2008-11-27
Particle remover, exposure apparatus having the same, and device manufacturing method Grant 7,414,240 - Ohkubo , et al. August 19, 2	2008-08-19
Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beam Grant 7,379,151 - Osawa , et al. May 27, 2	2008-05-27
Point diffraction interferometer and exposure apparatus and method using the same Grant 7,304,749 - Ohkubo December 4, 2	2007-12-04
Measuring apparatus and exposure apparatus having the same Grant 7,295,327 - Ohkubo November 13, 2	2007-11-13
Exposure Apparatus App 20070252968 - Ohkubo; Akinori ; et al.	2007-11-01
Tilt angle detection device and method utilizing pattern identification Grant 7,200,077 - Ohkubo , et al. April 3, 2	2007-04-03
Immersion optical system and optical apparatus having the same Grant 7,199,939 - Ohkubo , et al. April 3, 2	2007-04-03
Focus servo device Grant 7,190,642 - Ohkubo , et al. March 13, 2	2007-03-13
Exposure Apparatus App 20070013892 - Osawa; Hiroshi ; et al.	2007-01-18
Immersion optical system and optical apparatus having the same App 20060146662 - Ohkubo; Akinori ; et al.	2006-07-06
Particle remover, exposure apparatus having the same, and device manufacturing method App 20060086371 - Ohkubo; Akinori ; et al.	2006-04-27
Focus servo device App 20050276175 - Ohkubo, Akinori ; et al.	2005-12-15
Measuring apparatus and exposure apparatus having the same App 20050237540 - Ohkubo, Akinori	2005-10-27
Point diffraction interferometer and exposure apparatus and method using the same App 20050190377 - Ohkubo, Akinori	2005-09-01
Information reproducing apparatus and optical recording medium App 20040136281 - Yanagisawa, Takuma ; et al.	2004-07-15
Tilt angle detection device and method App 20040125712 - Ohkubo, Akinori ; et al.	2004-07-01
Optical disk App 20020060980 - Ohkubo, Akinori ; et al.	2002-05-23

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