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Plasma processing method and manufacturing method of semiconductor device
Grant 9,177,781 - Tahara , et al. November 3, 2 | 2015-11-03 |
Sputtering Apparatus And Manufacturing Method Of Magnetoresistive Element
App 20150259788 - NAGAMINE; Makoto ; et al. | 2015-09-17 |
Deposit removal method
Grant 9,126,229 - Tahara , et al. September 8, 2 | 2015-09-08 |
Plasma Etching Method And Plasma Etching Apparatus
App 20140284308 - MATSUYAMA; Shoichiro ; et al. | 2014-09-25 |
Deposit Removal Method
App 20140083979 - Tahara; Shigeru ; et al. | 2014-03-27 |
Semiconductor device producing method
Grant 8,513,134 - Omura , et al. August 20, 2 | 2013-08-20 |
Semiconductor device and method for manufacturing same
Grant 8,487,365 - Sasaki , et al. July 16, 2 | 2013-07-16 |
Method for manufacturing semiconductor device including a patterned SiOC film as a mask
Grant 8,211,783 - Sakurai , et al. July 3, 2 | 2012-07-03 |
Semiconductor Device Producing Method
App 20120021605 - OMURA; Mitsuhiro ; et al. | 2012-01-26 |
Plasma Processing Method And Manufacturing Method Of Semiconductor Device
App 20120009786 - TAHARA; Shigeru ; et al. | 2012-01-12 |
Semiconductor Device And Method For Manufacturing Same
App 20110291178 - SASAKI; Toshiyuki ; et al. | 2011-12-01 |
Method For Manufacturing Semiconductor Device
App 20110183497 - SAKURAI; Noriko ; et al. | 2011-07-28 |
Substrate Cleaning Method And Substrate Cleaning Apparatus
App 20110168205 - TAHARA; Shigeru ; et al. | 2011-07-14 |
Method of manufacturing semiconductor device
Grant 7,767,582 - Nishiyama , et al. August 3, 2 | 2010-08-03 |
Capacitive coupling plasma processing apparatus
Grant 7,767,055 - Himori , et al. August 3, 2 | 2010-08-03 |
Processing method for conservation of processing gases
Grant 7,628,931 - Saito , et al. December 8, 2 | 2009-12-08 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
Grant 7,595,885 - Sakai , et al. September 29, 2 | 2009-09-29 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
App 20080137083 - Sakai; Takayuki ; et al. | 2008-06-12 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
Grant 7,349,088 - Sakai , et al. March 25, 2 | 2008-03-25 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
Grant 7,327,455 - Sakai , et al. February 5, 2 | 2008-02-05 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
App 20070273880 - Sakai; Takayuki ; et al. | 2007-11-29 |
Etching method
Grant 7,285,498 - Ogawa , et al. October 23, 2 | 2007-10-23 |
Substrate Transferring Apparatus, Substrate Processing Apparatus, And Substrate Processing Method
App 20070227033 - Kobayashi; Yoshiyuki ; et al. | 2007-10-04 |
Method of manufacturing semiconductor device
App 20070082493 - Nishiyama; Nobuyasu ; et al. | 2007-04-12 |
Plasma processing method
Grant 7,182,879 - Sakai , et al. February 27, 2 | 2007-02-27 |
Capacitive coupling plasma processing apparatus
App 20060118044 - Himori; Shinji ; et al. | 2006-06-08 |
Method for fabricating a pattern and method for manufacturing a semiconductor device
Grant 7,045,462 - Sakai , et al. May 16, 2 | 2006-05-16 |
High speed silicon etching method
Grant 7,022,616 - Mimura , et al. April 4, 2 | 2006-04-04 |
Processing method for conservation of processing gases
App 20050279731 - Saito, Masashi ; et al. | 2005-12-22 |
Method of manufacturing semiconductor device
App 20050215062 - Miyagawa, Osamu ; et al. | 2005-09-29 |
Process monitoring system, process monitoring method, and method for manufacturing semiconductor device
App 20050140975 - Sakai, Takayuki ; et al. | 2005-06-30 |
Method of sequentially processing a plurality of lots each including semiconductor substrates
Grant 6,911,398 - Narita , et al. June 28, 2 | 2005-06-28 |
Method of manufacturing semiconductor device and semiconductor device
Grant 6,887,802 - Narita , et al. May 3, 2 | 2005-05-03 |
Etching method
App 20050085077 - Ogawa, Kazuto ; et al. | 2005-04-21 |
High precision pattern forming method of manufacturing a semiconductor device
Grant 6,846,750 - Ohiwa , et al. January 25, 2 | 2005-01-25 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
App 20040238126 - Hayashi, Hisataka ; et al. | 2004-12-02 |
Semiconductor device including trench capacitor and manufacturing method of the same
App 20040188739 - Takenaka, Keiichi ; et al. | 2004-09-30 |
Method of manufacturing semiconductor device
App 20040192034 - Ohiwa, Tokuhisa ; et al. | 2004-09-30 |
Plasma processing method
App 20040168766 - Sakai, Itsuko ; et al. | 2004-09-02 |
Gas recirculation flow control method and apparatus for use in vacuum system
Grant 6,782,907 - Kawasaki , et al. August 31, 2 | 2004-08-31 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
Grant 6,780,278 - Hayashi , et al. August 24, 2 | 2004-08-24 |
Plasma processing apparatus and plasma processing method
App 20040144491 - Ohuchi, Junko ; et al. | 2004-07-29 |
High speed silicon etching method
App 20040097079 - Mimura, Takanori ; et al. | 2004-05-20 |
Method for fabricating a pattern and method for manufacturing a semiconductor device
App 20040058533 - Sakai, Takayuki ; et al. | 2004-03-25 |
Method for manufacturing a semiconductor device using recirculation of a process gas
Grant 6,689,699 - Sakai , et al. February 10, 2 | 2004-02-10 |
Method of manufacturing semiconductor device and semiconductor device
App 20040017011 - Narita, Masaki ; et al. | 2004-01-29 |
Method for manufacturing a semiconductor device
App 20030181031 - Kojima, Akihiro ; et al. | 2003-09-25 |
Manufacturing method of semiconductor device using mask pattern having high etching resistance
Grant 6,576,562 - Ohuchi , et al. June 10, 2 | 2003-06-10 |
Plasma processing
App 20020192972 - Narita, Masaki ; et al. | 2002-12-19 |
Dry etching method and apparatus
App 20020155724 - Sakai, Takayuki ; et al. | 2002-10-24 |
Method of making semiconductor device
App 20020155727 - Narita, Masaki ; et al. | 2002-10-24 |
Gas recirculation flow control method and apparatus for use in vacuum system
App 20020134439 - Kawasaki, Hiroyuki ; et al. | 2002-09-26 |
Manufacturing method of semiconductor device using mask pattern having high etching resistance
App 20020119612 - Ohuchi, Junko ; et al. | 2002-08-29 |
Plasma processing method and plasma processing apparatus
Grant 6,433,297 - Kojima , et al. August 13, 2 | 2002-08-13 |
Plasma processing apparatus with reduced parasitic capacity and loss in RF power
App 20020042204 - Hayashi, Hisataka ; et al. | 2002-04-11 |
Semiconductor processing apparatus and method for manufacturing a semiconductor device
App 20020034880 - Sakai, Itsuko ; et al. | 2002-03-21 |
Semiconductor Device With A Thin Gate Stack Having A Plurality Of Insulating Layers
App 20020014657 - OHIWA, TOKUHISA ; et al. | 2002-02-07 |
Plasma processing method
App 20010051232 - Sakai, Itsuko ; et al. | 2001-12-13 |
Method of forming a pattern
App 20010034131 - Sato, Yasuhiko ; et al. | 2001-10-25 |
Gas recovery system and gas recovery method
App 20010015133 - Sakai, Itsuko ; et al. | 2001-08-23 |
Fabrication process using a multi-layer antireflective layer
Grant 5,998,100 - Azuma , et al. December 7, 1 | 1999-12-07 |
Polycide etching with HCL and chlorine
Grant 5,874,363 - Hoh , et al. February 23, 1 | 1999-02-23 |
Fabrication process using a thin resist
Grant 5,759,746 - Azuma , et al. June 2, 1 | 1998-06-02 |
Method of etching silicon nitride film
Grant 5,756,402 - Jimbo , et al. May 26, 1 | 1998-05-26 |
Thin film forming method and apparatus
Grant 5,658,389 - Matsuda , et al. August 19, 1 | 1997-08-19 |
Dry etching method
Grant 5,310,454 - Ohiwa , et al. May 10, 1 | 1994-05-10 |
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