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Plasma Processing Apparatus And Plasma Processing Method
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Plasma processing apparatus
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Plasma Processing Apparatus
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Plasma Processing Systems and Methods for Chemical Processing a Substrate
App 20220068601 - Ventzek; Peter ; et al. | 2022-03-03 |
Plasma Processing Apparatus And Plasma Processing Method
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Mode-switching plasma systems and methods of operating thereof
Grant 11,251,021 - Ventzek , et al. February 15, 2 | 2022-02-15 |
Plasma Processing Methods Using Low Frequency Bias Pulses
App 20220028695 - Ranjan; Alok ; et al. | 2022-01-27 |
Plasma Processing Apparatus
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Plasma Processing Apparatus And Plasma Processing Method
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Plasma Processing Apparatus
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Plasma processing methods using low frequency bias pulses
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Plasma Processing Methods Using Low Frequency Bias Pulses
App 20210249225 - Ranjan; Alok ; et al. | 2021-08-12 |
Plasma Processing Apparatus
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Mode-Switching Plasma Systems and Methods of Operating Thereof
App 20210151296 - Ventzek; Peter ; et al. | 2021-05-20 |
Three-phase Pulsing Systems And Methods For Plasma Processing
App 20210050183 - Ventzek; Peter ; et al. | 2021-02-18 |
Mode-switching plasma systems and methods of operating thereof
Grant 10,910,196 - Ventzek , et al. February 2, 2 | 2021-02-02 |
Mode-switching Plasma Systems And Methods Of Operating Thereof
App 20210027991 - Ventzek; Peter ; et al. | 2021-01-28 |
Equipment And Methods For Plasma Processing
App 20210020405 - Ventzek; Peter ; et al. | 2021-01-21 |
Plasma Processing Apparatus
App 20210013015 - NAGASEKI; Kazuya ; et al. | 2021-01-14 |
Plasma processing apparatus
Grant 10,825,663 - Nagaseki , et al. November 3, 2 | 2020-11-03 |
Method of etching object to be processed
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Systems And Methods Of Control For Plasma Processing
App 20200058469 - Ranjan; Alok ; et al. | 2020-02-20 |
Maintenance method of plasma processing apparatus
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Plasma Processing Apparatus
App 20190131158 - MATSUMOTO; Kazuya ; et al. | 2019-05-02 |
Maintenance Method Of Plasma Processing Apparatus
App 20190131137 - MATSUMOTO; Kazuya ; et al. | 2019-05-02 |
Method for etching multilayer film
Grant 10,217,933 - Nishimura , et al. Feb | 2019-02-26 |
Ion beam irradiation apparatus and substrate processing apparatus
Grant 10,204,766 - Umezawa , et al. Feb | 2019-02-12 |
Method Of Etching Object To Be Processed
App 20180337025 - UMEZAWA; Yoshihiro ; et al. | 2018-11-22 |
Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
Grant 10,020,172 - Ohata , et al. July 10, 2 | 2018-07-10 |
Plasma Processing Apparatus
App 20180174806 - NAGASEKI; Kazuya ; et al. | 2018-06-21 |
Ion Beam Irradiation Apparatus And Substrate Processing Apparatus
App 20180108516 - UMEZAWA; Yoshihiro ; et al. | 2018-04-19 |
Plasma Processing Apparatus
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Method For Etching Multilayer Film
App 20170222139 - NISHIMURA; Eiichi ; et al. | 2017-08-03 |
Plasma processing apparatus
Grant 9,589,771 - Hosaka , et al. March 7, 2 | 2017-03-07 |
Plasma Processing Apparatus, Plasma Processing Method And Storage Medium For Storing Program For Executing The Method
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Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
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Plasma processing apparatus
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Plasma Processing Apparatus
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Plasma Processing Apparatus
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Plasma Processing Apparatus, Plasma Processing Method And Storage Medium For Storing Program For Executing The Method
App 20120061351 - Ohata; Mitsunori ; et al. | 2012-03-15 |
High rate method for stable temperature control of a substrate
Grant 8,084,720 - Ohata December 27, 2 | 2011-12-27 |
High rate method for stable temperature control of a substrate
Grant 7,893,387 - Ohata February 22, 2 | 2011-02-22 |
High Rate Method For Stable Temperature Control Of A Substrate
App 20110015803 - OHATA; Mitsunori | 2011-01-20 |
High Rate Method For Stable Temperature Control Of A Substrate
App 20090266809 - Ohata; Mitsunori | 2009-10-29 |
Method And System For Performing Multiple Treatments In A Dual-chamber Batch Processing System
App 20090212014 - Ohata; Mitsunori | 2009-08-27 |
High rate method for stable temperature control of a substrate
Grant 7,557,328 - Ohata July 7, 2 | 2009-07-07 |
High rate method for stable temperature control of a substrate
App 20080083738 - Ohata; Mitsunori | 2008-04-10 |
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