| Patent | Date |
|---|
Resist composition and patterning process
Grant 11,448,962 - Fujiwara , et al. September 20, 2 | 2022-09-20 |
Iodonium salt, resist composition, and pattern forming process
Grant 11,448,961 - Fujiwara , et al. September 20, 2 | 2022-09-20 |
Resist composition and patterning process
Grant 11,435,665 - Hatakeyama , et al. September 6, 2 | 2022-09-06 |
Chemically Amplified Negative Resist Composition And Resist Pattern Forming Process
App 20220276557 - Masunaga; Keiichi ; et al. | 2022-09-01 |
Onium salt, negative resist composition, and resist pattern forming process
Grant 11,429,023 - Domon , et al. August 30, 2 | 2022-08-30 |
Chemically Amplified Positive Resist Composition And Resist Pattern Forming Process
App 20220269174 - Kotake; Masaaki ; et al. | 2022-08-25 |
Resist composition and patterning process
Grant 11,415,887 - Hatakeyama , et al. August 16, 2 | 2022-08-16 |
Resist composition and patterning process
Grant 11,409,194 - Hatakeyama , et al. August 9, 2 | 2022-08-09 |
Resist Composition And Patterning Process
App 20220236643 - Adachi; Teppei ; et al. | 2022-07-28 |
Resist composition and patterning process
Grant 11,392,034 - Hatakeyama , et al. July 19, 2 | 2022-07-19 |
Composition for forming silicon-containing resist underlayer film and patterning process
Grant 11,385,544 - Ogihara , et al. July 12, 2 | 2022-07-12 |
Resist composition and patterning process
Grant 11,340,527 - Adachi , et al. May 24, 2 | 2022-05-24 |
Resist Composition And Pattern Forming Process
App 20220155687 - Ohashi; Masaki ; et al. | 2022-05-19 |
Molecular Resist Composition And Patterning Process
App 20220100089 - Ohashi; Masaki ; et al. | 2022-03-31 |
Resist composition and patterning process
Grant 11,281,101 - Hatakeyama , et al. March 22, 2 | 2022-03-22 |
Resist composition and patterning process
Grant 11,269,251 - Hatakeyama , et al. March 8, 2 | 2022-03-08 |
Resist composition and patterning process
Grant 11,269,253 - Hatakeyama , et al. March 8, 2 | 2022-03-08 |
Sulfonium salt, polymer, resist composition, and patterning process
Grant 11,262,653 - Ohashi , et al. March 1, 2 | 2022-03-01 |
Computer-readable Recording Medium Storing Response Processing Program, Response Processing Method, And Information Processing Apparatus
App 20220035849 - KAWAKAMI; Shinichi ; et al. | 2022-02-03 |
Sulfonium compound, resist composition, and patterning process
Grant 11,215,926 - Fujiwara , et al. January 4, 2 | 2022-01-04 |
Chemically amplified resist composition and patterning process
Grant 11,204,553 - Hatakeyama , et al. December 21, 2 | 2021-12-21 |
Resist composition and patterning process
Grant 11,187,980 - Hatakeyama , et al. November 30, 2 | 2021-11-30 |
Resist composition and patterning process
Grant 11,181,823 - Hatakeyama , et al. November 23, 2 | 2021-11-23 |
Resist composition and patterning process
Grant 11,175,580 - Hatakeyama , et al. November 16, 2 | 2021-11-16 |
Resist composition, patterning process, and barium salt
Grant 11,163,232 - Hatakeyama , et al. November 2, 2 | 2021-11-02 |
Computer-readable Recording Medium Storing Management Program, Management Method, And Information Processing Device
App 20210311978 - KAWAKAMI; Shinichi ; et al. | 2021-10-07 |
Sulfonium compound, positive resist composition, and resist pattern forming process
Grant 11,124,477 - Inoue , et al. September 21, 2 | 2021-09-21 |
Computer-readable Recording Medium Recording Answering Program, Answering Method, And Answering Device
App 20210271698 - KAWAKAMI; Shinichi ; et al. | 2021-09-02 |
Resist Composition And Patterning Process
App 20210200083 - ADACHI; Teppei ; et al. | 2021-07-01 |
Resist composition and patterning process
Grant 11,022,883 - Hatakeyama , et al. June 1, 2 | 2021-06-01 |
Photoacid generator, chemically amplified resist composition, and patterning process
Grant 11,022,881 - Honda , et al. June 1, 2 | 2021-06-01 |
Resist Composition And Patterning Process
App 20210141306 - ADACHI; Teppei ; et al. | 2021-05-13 |
Resist Composition And Patterning Process
App 20210048746 - Hatakeyama; Jun ; et al. | 2021-02-18 |
Positive Resist Composition And Patterning Process
App 20210003916 - Hatakeyama; Jun ; et al. | 2021-01-07 |
Resist composition and patterning process
Grant 10,871,711 - Hatakeyama , et al. December 22, 2 | 2020-12-22 |
Positive Resist Composition And Patterning Process
App 20200393760 - Hatakeyama; Jun ; et al. | 2020-12-17 |
Molecular Resist Composition And Patterning Process
App 20200379345 - Fukushima; Masahiro ; et al. | 2020-12-03 |
Onium Salt, Chemically Amplified Resist Composition And Patterning Process
App 20200369605 - Sagehashi; Masayoshi ; et al. | 2020-11-26 |
Adhesive composition, bio-electrode, and method for manufacturing a bio-electrode
Grant 10,844,257 - Hatakeyama , et al. November 24, 2 | 2020-11-24 |
Resist composition and patterning process
Grant 10,816,899 - Hatakeyama , et al. October 27, 2 | 2020-10-27 |
Resist composition and patterning process
Grant 10,809,617 - Hatakeyama , et al. October 20, 2 | 2020-10-20 |
Adhesive composition, bio-electrode, method for manufacturing a bio-electrode, and salt
Grant 10,808,148 - Hatakeyama , et al. October 20, 2 | 2020-10-20 |
Resist composition and patterning process
Grant 10,802,400 - Hatakeyama , et al. October 13, 2 | 2020-10-13 |
Sulfonium Compound, Chemically Amplified Resist Composition, And Patterning Process
App 20200319550 - Fukushima; Masahiro ; et al. | 2020-10-08 |
Resist Composition And Patterning Process
App 20200301274 - TANIGUCHI; Ryosuke ; et al. | 2020-09-24 |
Resist Composition And Patterning Process
App 20200285149 - Hatakeyama; Jun ; et al. | 2020-09-10 |
Resist Composition And Patterning Process
App 20200272048 - Hatakeyama; Jun ; et al. | 2020-08-27 |
Resist Composition And Patterning Process
App 20200272049 - Hatakeyama; Jun ; et al. | 2020-08-27 |
Resist Composition And Patterning Process
App 20200249571 - Kind Code | 2020-08-06 |
Resist Composition And Patterning Process
App 20200241414 - Hatakeyama; Jun ; et al. | 2020-07-30 |
Resist Composition And Patterning Process
App 20200241417 - Hatakeyama; Jun ; et al. | 2020-07-30 |
Chemically amplified negative resist composition and resist pattern forming process
Grant 10,725,377 - Kotake , et al. | 2020-07-28 |
Resist composition and patterning process
Grant 10,725,378 - Hatakeyama , et al. | 2020-07-28 |
Composition For Forming Silicon-containing Resist Underlayer Film And Patterning Process
App 20200233303 - OGIHARA; Tsutomu ; et al. | 2020-07-23 |
Onium Salt, Chemically Amplified Resist Composition, And Patterning Process
App 20200223796 - Fukushima; Masahiro ; et al. | 2020-07-16 |
Positive Resist Composition And Patterning Process
App 20200209747 - Hatakeyama; Jun ; et al. | 2020-07-02 |
Resist Composition And Patterning Process
App 20200192222 - Hatakeyama; Jun ; et al. | 2020-06-18 |
Resist composition and patterning process
Grant 10,649,332 - Hatakeyama , et al. | 2020-05-12 |
Onium Salt, Negative Resist Composition, And Resist Pattern Forming Process
App 20200133121 - Domon; Daisuke ; et al. | 2020-04-30 |
Resist composition and patterning process
Grant 10,620,533 - Hatakeyama , et al. | 2020-04-14 |
Adhesive composition, bio-electrode, and method for manufacturing a bio-electrode
Grant 10,610,116 - Hatakeyama , et al. | 2020-04-07 |
Resist composition and patterning process
Grant 10,613,436 - Hatakeyama , et al. | 2020-04-07 |
Onium Salt, Resist Composition, And Pattern Forming Process
App 20200102271 - Ohashi; Masaki ; et al. | 2020-04-02 |
Resist composition and patterning process
Grant 10,606,172 - Hatakeyama , et al. | 2020-03-31 |
Resist Composition And Patterning Process
App 20200089112 - Hatakeyama; Jun ; et al. | 2020-03-19 |
Resist Composition And Patterning Process
App 20200089111 - Hatakeyama; Jun ; et al. | 2020-03-19 |
Iodonium Salt, Resist Composition, And Pattern Forming Process
App 20200081341 - Fujiwara; Takayuki ; et al. | 2020-03-12 |
Resist Composition And Patterning Process
App 20200073237 - Hatakeyama; Jun ; et al. | 2020-03-05 |
Sulfonium Compound, Positive Resist Composition, And Resist Pattern Forming Process
App 20200071268 - Inoue; Naoya ; et al. | 2020-03-05 |
Resist Composition And Patterning Process
App 20200050107 - Hatakeyama; Jun ; et al. | 2020-02-13 |
Resist Composition And Patterning Process
App 20200050105 - Hatakeyama; Jun ; et al. | 2020-02-13 |
Chemically Amplified Resist Composition And Patterning Process
App 20200050104 - Hatakeyama; Jun ; et al. | 2020-02-13 |
Resist composition and patterning process
Grant 10,520,809 - Hatakeyama , et al. Dec | 2019-12-31 |
Resist composition and patterning process
Grant 10,520,811 - Hatakeyama , et al. Dec | 2019-12-31 |
Resist composition and patterning process
Grant 10,509,314 - Hatakeyama , et al. Dec | 2019-12-17 |
Resist Composition And Patterning Process
App 20190369491 - Hatakeyama; Jun ; et al. | 2019-12-05 |
Chemically amplified positive resist composition and resist pattern forming process
Grant 10,495,969 - Kotake , et al. De | 2019-12-03 |
Resist Composition And Patterning Process
App 20190354012 - Hatakeyama; Jun ; et al. | 2019-11-21 |
Resist composition and patterning process
Grant 10,474,030 - Hatakeyama , et al. Nov | 2019-11-12 |
Photoacid Generator, Chemically Amplified Resist Composition, And Patterning Process
App 20190324367 - Honda; Kazuya ; et al. | 2019-10-24 |
Positive resist composition, resist pattern forming process, and photomask blank
Grant 10,416,558 - Masunaga , et al. Sept | 2019-09-17 |
Polymer compound for conductive polymer and method for producing the same
Grant 10,363,555 - Hatakeyama , et al. | 2019-07-30 |
Resist composition and patterning process
Grant 10,323,113 - Hatakeyama , et al. | 2019-06-18 |
Resist Composition And Patterning Process
App 20190155155 - Hatakeyama; Jun ; et al. | 2019-05-23 |
Resist composition and patterning process
Grant 10,295,904 - Hatakeyama , et al. | 2019-05-21 |
Resist Composition And Patterning Process
App 20190113844 - Hatakeyama; Jun ; et al. | 2019-04-18 |
Resist Composition, Patterning Process, And Barium Salt
App 20190113846 - Hatakeyama; Jun ; et al. | 2019-04-18 |
Sulfonium compound, making method, resist composition, and pattern forming process
Grant 10,248,022 - Ohashi , et al. | 2019-04-02 |
Resist Composition And Patterning Process
App 20190094690 - Hatakeyama; Jun ; et al. | 2019-03-28 |
Polymer, making method, resist composition, and patterning process
Grant 10,234,757 - Ohashi , et al. | 2019-03-19 |
Resist composition and patterning process
Grant 10,222,696 - Hatakeyama , et al. | 2019-03-05 |
Sulfonium Compound, Resist Composition, And Patterning Process
App 20190064665 - Fujiwara; Takayuki ; et al. | 2019-02-28 |
Sulfonium Salt, Polymer, Resist Composition, And Patterning Process
App 20190033716 - Ohashi; Masaki ; et al. | 2019-01-31 |
Sulfonium salt, resist composition, and patterning process
Grant 10,180,626 - Fujiwara , et al. Ja | 2019-01-15 |
Sulfonium compound, resist composition, and pattern forming process
Grant 10,173,975 - Ohashi , et al. J | 2019-01-08 |
Resist Composition And Patterning Process
App 20180373150 - Hatakeyama; Jun ; et al. | 2018-12-27 |
Resist composition and patterning process
Grant 10,162,262 - Hatakeyama , et al. Dec | 2018-12-25 |
Resist Composition And Patterning Process
App 20180364574 - Hatakeyama; Jun ; et al. | 2018-12-20 |
Resist Composition And Patterning Process
App 20180364570 - Hatakeyama; Jun ; et al. | 2018-12-20 |
Resist Composition And Patterning Process
App 20180335696 - Hatakeyama; Jun ; et al. | 2018-11-22 |
Resist composition and patterning process
Grant 10,126,647 - Hatakeyama , et al. November 13, 2 | 2018-11-13 |
Polymer compound for a conductive polymer and method for producing same
Grant 10,125,202 - Hatakeyama , et al. November 13, 2 | 2018-11-13 |
Negative resist composition and resist pattern forming process
Grant 10,120,279 - Masunaga , et al. November 6, 2 | 2018-11-06 |
Resist composition and patterning process
Grant 10,101,653 - Hatakeyama , et al. October 16, 2 | 2018-10-16 |
Resist composition and patterning process
Grant 10,101,654 - Hatakeyama , et al. October 16, 2 | 2018-10-16 |
Resist Composition And Patterning Process
App 20180275512 - Hatakeyama; Jun ; et al. | 2018-09-27 |
Resist Composition And Patterning Process
App 20180267403 - Hatakeyama; Jun ; et al. | 2018-09-20 |
Resist composition, patterning process, and barium, cesium and cerium salts
Grant 10,078,264 - Hatakeyama , et al. September 18, 2 | 2018-09-18 |
Resist Composition And Patterning Process
App 20180239249 - Hatakeyama; Jun ; et al. | 2018-08-23 |
Sulfonium compound, resist composition, and patterning process
Grant 10,025,180 - Mitsui , et al. July 17, 2 | 2018-07-17 |
Positive resist composition and pattern forming process
Grant 10,012,902 - Hatakeyama , et al. July 3, 2 | 2018-07-03 |
Chemically Amplified Negative Resist Composition And Resist Pattern Forming Process
App 20180180998 - Kotake; Masaaki ; et al. | 2018-06-28 |
Chemically Amplified Positive Resist Composition and Resist Pattern Forming Process
App 20180180992 - Kotake; Masaaki ; et al. | 2018-06-28 |
Positive resist composition and patterning process
Grant 10,007,178 - Hatakeyama , et al. June 26, 2 | 2018-06-26 |
Onium salt compound, resist composition, and pattern forming process
Grant 9,989,847 - Ohashi , et al. June 5, 2 | 2018-06-05 |
Resist composition and patterning process
Grant 9,958,777 - Hatakeyama , et al. May 1, 2 | 2018-05-01 |
Resist composition and patterning process
Grant 9,958,776 - Hatakeyama , et al. May 1, 2 | 2018-05-01 |
Sulfonium Compound, Resist Composition, And Pattern Forming Process
App 20180099928 - Ohashi; Masaki ; et al. | 2018-04-12 |
Resist Composition And Patterning Process
App 20180101094 - Hatakeyama; Jun ; et al. | 2018-04-12 |
Resist Composition And Patterning Process
App 20180088463 - Hatakeyama; Jun ; et al. | 2018-03-29 |
Adhesive Composition, Bio-electrode, And Method For Manufacturing A Bio-electrode
App 20180085019 - HATAKEYAMA; Jun ; et al. | 2018-03-29 |
Adhesive Composition, Bio-electrode, Method For Manufacturing A Bio-electrode, And Salt
App 20180086948 - HATAKEYAMA; Jun ; et al. | 2018-03-29 |
Sulfonium Salt, Resist Composition, And Patterning Process
App 20180088464 - Fujiwara; Takayuki ; et al. | 2018-03-29 |
Resist Composition And Patterning Process
App 20180081267 - Hatakeyama; Jun ; et al. | 2018-03-22 |
Adhesive Composition, Bio-electrode, And Method For Manufacturing A Bio-electrode
App 20180072930 - HATAKEYAMA; Jun ; et al. | 2018-03-15 |
Patterning process and chemically amplified negative resist composition
Grant 9,910,358 - Hatakeyama , et al. March 6, 2 | 2018-03-06 |
Sulfonium Compound, Resist Composition, And Patterning Process
App 20180059543 - Mitsui; Ryo ; et al. | 2018-03-01 |
Compound, polymer compound, resist composition, and patterning process
Grant 9,897,916 - Ohashi , et al. February 20, 2 | 2018-02-20 |
Resist composition and patterning process
Grant 9,897,914 - Hatakeyama , et al. February 20, 2 | 2018-02-20 |
Positive Resist Composition, Resist Pattern Forming Process, And Photomask Blank
App 20180039177 - Masunaga; Keiichi ; et al. | 2018-02-08 |
Resist Composition And Patterning Process
App 20180039173 - Hatakeyama; Jun ; et al. | 2018-02-08 |
Negative Resist Composition And Resist Pattern Forming Process
App 20180039175 - Masunaga; Keiichi ; et al. | 2018-02-08 |
Resist Composition And Patterning Process
App 20170369616 - Hatakeyama; Jun ; et al. | 2017-12-28 |
Resist Composition And Patterning Process
App 20170351177 - Hatakeyama; Jun ; et al. | 2017-12-07 |
Novel Sulfonium Compound, Making Method, Resist Composition, And Pattern Forming Process
App 20170329227 - Ohashi; Masaki ; et al. | 2017-11-16 |
Positive Resist Composition And Pattern Forming Process
App 20170242339 - Hatakeyama; Jun ; et al. | 2017-08-24 |
Resist Composition And Patterning Process
App 20170205709 - Hatakeyama; Jun ; et al. | 2017-07-20 |
Resist Composition And Patterning Process
App 20170184962 - Hatakeyama; Jun ; et al. | 2017-06-29 |
Resist Composition And Patterning Process
App 20170184963 - Hatakeyama; Jun ; et al. | 2017-06-29 |
Resist Composition And Patterning Process
App 20170184964 - Hatakeyama; Jun ; et al. | 2017-06-29 |
Onium salt compound, resist composition, and pattern forming process
Grant 9,665,002 - Fukushima , et al. May 30, 2 | 2017-05-30 |
Polymer compound for a conductive polymer and method for producing same
Grant 9,663,593 - Hatakeyama , et al. May 30, 2 | 2017-05-30 |
Sulfonium salt, chemically amplified resist composition, and patterning process
Grant 9,645,491 - Fujiwara , et al. May 9, 2 | 2017-05-09 |
Resist Composition, Patterning Process, And Barium, Cesium And Cerium Salts
App 20170115566 - Hatakeyama; Jun ; et al. | 2017-04-27 |
Resist Composition And Patterning Process
App 20170115565 - Hatakeyama; Jun ; et al. | 2017-04-27 |
Resist Composition And Patterning Process
App 20170108775 - Hatakeyama; Jun ; et al. | 2017-04-20 |
Resist Composition And Patterning Process
App 20170108774 - Hatakeyama; Jun ; et al. | 2017-04-20 |
Resist Composition And Patterning Process
App 20170075218 - Hatakeyama; Jun ; et al. | 2017-03-16 |
Resist Composition And Patterning Process
App 20170075217 - Hatakeyama; Jun ; et al. | 2017-03-16 |
Polymer Compound For A Conductive Polymer And Method For Producing Same
App 20170058059 - HATAKEYAMA; Jun ; et al. | 2017-03-02 |
Compound, Polymer Compound, Resist Composition, And Patterning Process
App 20170038683 - OHASHI; Masaki ; et al. | 2017-02-09 |
Polymer compound for a conductive polymer and method for producing same
Grant 9,527,937 - Hatakeyama , et al. December 27, 2 | 2016-12-27 |
Chemically amplified resist composition and patterning process
Grant 9,523,914 - Hatakeyama , et al. December 20, 2 | 2016-12-20 |
Patterning process and resist composition
Grant 9,519,213 - Kobayashi , et al. December 13, 2 | 2016-12-13 |
Sulfonium Salt, Chemically Amplified Resist Composition, And Patterning Process
App 20160349612 - Fujiwara; Takayuki ; et al. | 2016-12-01 |
Chemically-amplified positive resist composition and resist patterning process using the same
Grant 9,500,949 - Domon , et al. November 22, 2 | 2016-11-22 |
Resist Composition And Patterning Process
App 20160334706 - Ohashi; Masaki | 2016-11-17 |
Onium Salt, Resist Composition, And Patterning Process
App 20160320698 - Fujiwara; Takayuki ; et al. | 2016-11-03 |
Novel Onium Salt Compound, Resist Composition, And Pattern Forming Process
App 20160259242 - Ohashi; Masaki ; et al. | 2016-09-08 |
Photo acid generator, chemically amplified resist composition, and patterning process
Grant 9,411,225 - Ohashi , et al. August 9, 2 | 2016-08-09 |
Photoacid generator, chemically amplified resist composition, and patterning process
Grant 9,366,958 - Ohashi , et al. June 14, 2 | 2016-06-14 |
Chemically Amplified Resist Composition And Patterning Process
App 20160147150 - Hatakeyama; Jun ; et al. | 2016-05-26 |
Novel Onium Salt Compound, Resist Composition, And Pattern Forming Process
App 20160131972 - Fukushima; Masahiro ; et al. | 2016-05-12 |
Chemically amplified negative resist composition and patterning process
Grant 9,329,476 - Domon , et al. May 3, 2 | 2016-05-03 |
Patterning Process And Chemically Amplified Negative Resist Composition
App 20160109803 - Hatakeyama; Jun ; et al. | 2016-04-21 |
Polymer Compound For Conductive Polymer And Method For Producing The Same
App 20160067702 - HATAKEYAMA; Jun ; et al. | 2016-03-10 |
Positive Resist Composition And Patterning Process
App 20160048076 - Hatakeyama; Jun ; et al. | 2016-02-18 |
Resist composition and patterning process
Grant 9,250,518 - Hatakeyama , et al. February 2, 2 | 2016-02-02 |
Polymer Compound For A Conductive Polymer And Method For Producing Same
App 20160017068 - HATAKEYAMA; Jun ; et al. | 2016-01-21 |
Polymer Compound For A Conductive Polymer And Method For Producing Same
App 20160017066 - HATAKEYAMA; Jun ; et al. | 2016-01-21 |
Sulfonium salt-containing polymer, resist composition, patterning process, and sulfonium salt monomer and making method
Grant 9,233,919 - Ohsawa , et al. January 12, 2 | 2016-01-12 |
Photo Acid Generator, Chemically Amplified Resist Composition, And Patterning Process
App 20160004155 - OHASHI; Masaki ; et al. | 2016-01-07 |
Acid generator, chemically amplified resist composition, and patterning process
Grant 9,223,205 - Ohashi , et al. December 29, 2 | 2015-12-29 |
Sulfonium salt, chemically amplified resist composition, and pattern forming process
Grant 9,221,742 - Ohashi , et al. December 29, 2 | 2015-12-29 |
Resist Composition And Patterning Process
App 20150346600 - Adachi; Teppei ; et al. | 2015-12-03 |
Photoacid Generator, Chemically Amplified Resist Composition, And Patterning Process
App 20150301449 - Ohashi; Masaki ; et al. | 2015-10-22 |
Sulfonium salt, polymer, resist composition, and patterning process
Grant 9,162,967 - Ohashi , et al. October 20, 2 | 2015-10-20 |
Patterning process and resist composition
Grant 9,164,384 - Ohashi , et al. October 20, 2 | 2015-10-20 |
Sulfonium salt, polymer, polymer making method, resist composition, and patterning process
Grant 9,146,464 - Ohashi , et al. September 29, 2 | 2015-09-29 |
Positive resist composition, monomer, polymer, and patterning process
Grant 9,140,988 - Hatakeyama , et al. September 22, 2 | 2015-09-22 |
Method for synthesizing rare earth metal extractant
Grant 9,133,100 - Sakaki , et al. September 15, 2 | 2015-09-15 |
Chemically-amplified Positive Resist Composition And Resist Patterning Process Using The Same
App 20150253664 - DOMON; Daisuke ; et al. | 2015-09-10 |
Sulfonium salt, resist composition and patterning process
Grant 9,122,155 - Ohashi , et al. September 1, 2 | 2015-09-01 |
Polymer, resist composition and patterning process
Grant 9,104,110 - Ohashi , et al. August 11, 2 | 2015-08-11 |
Sulfonium salt, polymer, resist composition, and patterning process
Grant 9,091,918 - Fukushima , et al. July 28, 2 | 2015-07-28 |
Chemically Amplified Negative Resist Composition And Patterning Process
App 20150198877 - DOMON; Daisuke ; et al. | 2015-07-16 |
Developer for photosensitive resist material and patterning process
Grant 9,057,959 - Hatakeyama , et al. June 16, 2 | 2015-06-16 |
Developer for photosensitive resist material and patterning process
Grant 9,052,602 - Hatakeyama , et al. June 9, 2 | 2015-06-09 |
Resist Composition And Patterning Process
App 20150125794 - Hatakeyama; Jun ; et al. | 2015-05-07 |
Sulfonium Salt, Chemically Amplified Resist Composition, And Pattern Forming Process
App 20150086926 - Ohashi; Masaki ; et al. | 2015-03-26 |
Pattern forming process and resist compostion
Grant 8,980,527 - Ohashi , et al. March 17, 2 | 2015-03-17 |
Sulfonium salt, resist composition, and patterning process
Grant 8,956,803 - Ohashi , et al. February 17, 2 | 2015-02-17 |
Preparation of polymer, resulting polymer, resist composition, and patterning process
Grant 8,957,160 - Ohashi , et al. February 17, 2 | 2015-02-17 |
Developer For Photosensitive Resist Material And Patterning Process
App 20140377706 - Hatakeyama; Jun ; et al. | 2014-12-25 |
Developer For Photosensitive Resist Material And Patterning Process
App 20140370441 - Hatakeyama; Jun ; et al. | 2014-12-18 |
Acid generator, chemically amplified resist composition, and patterning process
Grant 8,900,796 - Ohashi , et al. December 2, 2 | 2014-12-02 |
Patterning Process And Resist Composition
App 20140322650 - Ohashi; Masaki ; et al. | 2014-10-30 |
Sulfonium Salt-containing Polymer, Resist Composition, Patterning Process, And Sulfonium Salt Monomer And Making Method
App 20140296561 - OHSAWA; Youichi ; et al. | 2014-10-02 |
Method for synthesizing rare earth metal extractant
Grant 8,841,482 - Sakaki , et al. September 23, 2 | 2014-09-23 |
Sulfonium Salt, Polymer, Resist Composition, And Patterning Process
App 20140272707 - Fukushima; Masahiro ; et al. | 2014-09-18 |
Patterning Process And Resist Composition
App 20140255843 - Kobayashi; Tomohiro ; et al. | 2014-09-11 |
Chemically amplified positive resist composition for ArF immersion lithography and pattern forming process
Grant 8,815,492 - Ohsawa , et al. August 26, 2 | 2014-08-26 |
Sulfonium salt-containing polymer, resist composition, patterning process, and sulfonium salt monomer and making method
Grant 8,785,105 - Ohsawa , et al. July 22, 2 | 2014-07-22 |
Sulfonium Salt, Resist Composition, And Patterning Process
App 20140199629 - OHASHI; Masaki ; et al. | 2014-07-17 |
Sulfonium Salt, Resist Composition And Patterning Process
App 20140199630 - OHASHI; Masaki ; et al. | 2014-07-17 |
Positive Resist Composition, Monomer, Polymer, And Patterning Process
App 20140162188 - Hatakeyama; Jun ; et al. | 2014-06-12 |
Sulfonium Salt, Polymer, Polymer Making Method, Resist Composition, And Patterning Process
App 20140162189 - Ohashi; Masaki ; et al. | 2014-06-12 |
Resist composition and patterning process using the same
Grant 8,748,076 - Nagasawa , et al. June 10, 2 | 2014-06-10 |
Patterning process and resist composition
Grant 8,741,554 - Hatakeyama , et al. June 3, 2 | 2014-06-03 |
Patterning process and resist composition
Grant 8,741,546 - Hatakeyama , et al. June 3, 2 | 2014-06-03 |
Near-infrared absorptive layer-forming composition and multilayer film comprising near-infrared absorptive layer
Grant 8,722,307 - Tachibana , et al. May 13, 2 | 2014-05-13 |
Sulfonium salt, polymer, method for producing the polymer, resist composition and patterning process
Grant 8,691,490 - Ohashi , et al. April 8, 2 | 2014-04-08 |
Preparation of 2,2-bis (fluoroalkyl) oxirane and preparation of photoacid generator therefrom
Grant 8,686,166 - Sagehashi , et al. April 1, 2 | 2014-04-01 |
Sulfonium Salt, Polymer, Resist Composition, And Patterning Process
App 20130337378 - Ohashi; Masaki ; et al. | 2013-12-19 |
Photoacid generator, resist composition, and patterning process
Grant 8,609,889 - Ohashi , et al. December 17, 2 | 2013-12-17 |
Polymer, Resist Composition And Patterning Process
App 20130323647 - Ohashi; Masaki ; et al. | 2013-12-05 |
Acid Generator, Chemically Amplified Resist Composition, And Patterning Process
App 20130236832 - OHASHI; Masaki ; et al. | 2013-09-12 |
Preparation Of Polymer, Resulting Polymer, Resist Composition, And Patterning Process
App 20130224660 - OHASHI; Masaki ; et al. | 2013-08-29 |
Acid Generator, Chemically Amplified Resist Composition, And Patterning Process
App 20130224657 - OHASHI; Masaki ; et al. | 2013-08-29 |
Polymer, Making Method, Resist Composition, And Patterning Process
App 20130224659 - Ohashi; Masaki ; et al. | 2013-08-29 |
Patterning Process And Resist Composition
App 20130209936 - Hatakeyama; Jun ; et al. | 2013-08-15 |
Patterning process and resist composition
Grant 8,507,175 - Hatakeyama , et al. August 13, 2 | 2013-08-13 |
Pattern Forming Process And Resist Compostion
App 20130183621 - Ohashi; Masaki ; et al. | 2013-07-18 |
Near-infrared Absorbing Film Composition For Lithographic Application
App 20130157463 - Goldfarb; Dario L. ; et al. | 2013-06-20 |
Method For Synthesizing Rare Earth Metal Extractant
App 20130123534 - Sakaki; Kazuaki ; et al. | 2013-05-16 |
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION FOR ArF IMMERSION LITHOGRAPHY AND PATTERN FORMING PROCESS
App 20130108964 - Ohsawa; Youichi ; et al. | 2013-05-02 |
Method For Synthesizing Rare Earth Metal Extractant
App 20130102806 - Sakaki; Kazuaki ; et al. | 2013-04-25 |
Patterning process and resist composition
Grant 8,426,115 - Hatakeyama , et al. April 23, 2 | 2013-04-23 |
Acetal compounds and their preparation, polymers, resist compositions and patterning process
Grant 8,420,290 - Hasegawa , et al. April 16, 2 | 2013-04-16 |
Sulfonium salt, acid generator, resist composition, photomask blank, and patterning process
Grant 8,394,570 - Ohashi , et al. March 12, 2 | 2013-03-12 |
Chemically amplified positive photoresist composition and pattern forming process
Grant 8,361,693 - Masunaga , et al. January 29, 2 | 2013-01-29 |
Preparation Of 2,2-bis (fluoroalkyl) Oxirane And Preparation Of Photoacid Generator Therefrom
App 20130005997 - SAGEHASHI; Masayoshi ; et al. | 2013-01-03 |
Near-infrared absorbing dye, near-infrared absorptive film-forming composition, and near-infrared absorptive film
Grant 8,323,536 - Ohashi , et al. December 4, 2 | 2012-12-04 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film Comprising Near-infrared Absorptive Layer
App 20120301828 - TACHIBANA; Seiichiro ; et al. | 2012-11-29 |
Sulfonate and its derivative, photosensitive acid generator, and resist composition and patterning process using the same
Grant 8,283,104 - Ohashi , et al. October 9, 2 | 2012-10-09 |
Double patterning process
Grant 8,247,166 - Takemura , et al. August 21, 2 | 2012-08-21 |
Resist Composition And Patterning Process Using The Same
App 20120196228 - NAGASAWA; Takayuki ; et al. | 2012-08-02 |
Positive Resist Composition And Patterning Process
App 20120164577 - TANIGUCHI; Ryosuke ; et al. | 2012-06-28 |
Chemically-amplified positive resist composition and patterning process thereof
Grant 8,202,677 - Takeda , et al. June 19, 2 | 2012-06-19 |
Method of making a plate-shaped peeling member
Grant 8,187,404 - Ohta , et al. May 29, 2 | 2012-05-29 |
Sulfonium Salt-containing Polymer, Resist Composition, Patterning Process, And Sulfonium Salt Monomer And Making Method
App 20120129103 - Ohsawa; Youichi ; et al. | 2012-05-24 |
Near-infrared Absorbing Dye, Near-infrared Absorptive Film-forming Composition, And Near-infrared Absorptive Film
App 20120119171 - OHASHI; Masaki ; et al. | 2012-05-17 |
Sulfonium salt, resist composition, and patterning process
Grant 8,173,354 - Ohsawa , et al. May 8, 2 | 2012-05-08 |
Method and apparatus for testing characteristics of thin-film magnetic head
Grant 8,138,754 - Ogawa , et al. March 20, 2 | 2012-03-20 |
Double patterning process
Grant 8,129,100 - Takemura , et al. March 6, 2 | 2012-03-06 |
Photoacid generator, resist composition, and patterning process
Grant 8,114,570 - Ohsawa , et al. February 14, 2 | 2012-02-14 |
Photoacid generator, resist composition, and patterning process
Grant 8,114,571 - Ohashi , et al. February 14, 2 | 2012-02-14 |
Polymerizable anion-containing sulfonium salt and polymer, resist composition, and patterning process
Grant 8,105,748 - Ohashi , et al. January 31, 2 | 2012-01-31 |
Positive resist composition and patterning process
Grant 8,062,828 - Ohsawa , et al. November 22, 2 | 2011-11-22 |
Polymerizable anion-containing sulfonium salt and polymer, resist composition, and patterning process
Grant 8,057,985 - Ohashi , et al. November 15, 2 | 2011-11-15 |
Monomer, resist composition, and patterning process
Grant 8,057,982 - Hatakeyama , et al. November 15, 2 | 2011-11-15 |
Hydroxyl-containing monomer, polymer, resist composition, and patterning process
Grant 8,053,165 - Kinsho , et al. November 8, 2 | 2011-11-08 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film
App 20110262863 - TACHIBANA; Seiichiro ; et al. | 2011-10-27 |
Near-infrared Absorptive Layer-forming Composition And Multilayer Film
App 20110262862 - OHASHI; Masaki ; et al. | 2011-10-27 |
Sulfonium salt-containing polymer, resist composition, and patterning process
Grant 8,039,198 - Tachibana , et al. October 18, 2 | 2011-10-18 |
Ester compounds and their preparation, polymers, resist compositions and patterning process
Grant 7,998,657 - Ohashi , et al. August 16, 2 | 2011-08-16 |
Novel Sulfonium Salt, Polymer, Method For Producing The Polymer, Resist Composition And Patterning Process
App 20110189607 - OHASHI; Masaki ; et al. | 2011-08-04 |
Positive resist composition and patterning process
Grant 7,985,528 - Nishi , et al. July 26, 2 | 2011-07-26 |
Patterning Process And Resist Composition
App 20110091812 - Hatakeyama; Jun ; et al. | 2011-04-21 |
Ester compounds and their preparation, polymers, resist compositions and patterning process
Grant 7,902,385 - Ohashi , et al. March 8, 2 | 2011-03-08 |
Ester Compounds And Their Preparation, Polymers, Resist Compositions And Patterning Process
App 20110039204 - OHASHI; Masaki ; et al. | 2011-02-17 |
Patterning Process And Resist Composition
App 20110033803 - Hatakeyama; Jun ; et al. | 2011-02-10 |
Sulfonium Salt, Resist Composition, And Patterning Process
App 20110008735 - OHSAWA; Youichi ; et al. | 2011-01-13 |
Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process
Grant 7,868,199 - Hasegawa , et al. January 11, 2 | 2011-01-11 |
Photoacid Generator, Resist Composition, And Patterning Process
App 20110003247 - Ohashi; Masaki ; et al. | 2011-01-06 |
Chemically Amplified Positive Photoresist Composition And Pattern Forming Process
App 20100316955 - Masunaga; Keiichi ; et al. | 2010-12-16 |
Patterning Process And Resist Composition
App 20100304297 - HATAKEYAMA; Jun ; et al. | 2010-12-02 |
Novel Sulfonate And Its Derivative, Photosensitive Acid Generator, And Resist Composition And Patterning Process Using The Same
App 20100209827 - OHASHI; Masaki ; et al. | 2010-08-19 |
Sulfonium Salt, Acid Generator, Resist Composition, Photomask Blank, And Patterning Process
App 20100143830 - OHASHI; Masaki ; et al. | 2010-06-10 |
Acetal Compounds And Their Preparation, Polymers, Resist Compositions And Patterning Process
App 20100136485 - HASEGAWA; Koji ; et al. | 2010-06-03 |
Polymerizable Anion-containing Sulfonium Salt And Polymer, Resist Composition, And Patterning Process
App 20100099042 - OHASHI; Masaki ; et al. | 2010-04-22 |
Polymerizable ester compounds, polymers, resist compositions and patterning process
Grant 7,687,222 - Watanabe , et al. March 30, 2 | 2010-03-30 |
Music game with strike sounds changing in quality in the progress of music and entertainment music system
Grant 7,682,237 - Ueshima , et al. March 23, 2 | 2010-03-23 |
Positive Resist Composition And Patterning Process
App 20100062366 - Nishi; Tsunehiro ; et al. | 2010-03-11 |
Double Patterning Process
App 20100062380 - Takemura; Katsuya ; et al. | 2010-03-11 |
Polymerizable Anion-containing Sulfonium Salt And Polymer, Resist Composition, And Patterning Process
App 20100055608 - Ohashi; Masaki ; et al. | 2010-03-04 |
Photoacid generator, resist composition, and patterning process
Grant 7,670,751 - Ohashi , et al. March 2, 2 | 2010-03-02 |
Chemically-amplified positive resist composition and patterning process thereof
App 20100009286 - Takeda; Takanobu ; et al. | 2010-01-14 |
Nitrogen-containing organic compound, resist composition and patterning process
Grant 7,629,108 - Watanabe , et al. December 8, 2 | 2009-12-08 |
Method And Apparatus For Testing Characteristics Of Thin-film Magnetic Head
App 20090284857 - Ogawa; Akio ; et al. | 2009-11-19 |
Novel Photoacid Generator, Resist Composition, And Patterning Process
App 20090274978 - OHASHI; Masaki ; et al. | 2009-11-05 |
Double Patterning Process
App 20090253084 - TAKEMURA; Katsuya ; et al. | 2009-10-08 |
Novel Photoacid Generator, Resist Composition, And Patterning Process
App 20090246694 - Ohsawa; Youichi ; et al. | 2009-10-01 |
Hydroxyl-containing Monomer, Polymer, Resist Composition, And Patterning Process
App 20090239179 - Kinsho; Takeshi ; et al. | 2009-09-24 |
Sulfonium Salt-containing Polymer, Resist Composition, And Patterning Process
App 20090233223 - TACHIBANA; Seiichiro ; et al. | 2009-09-17 |
Monomer, Resist Composition, And Patterning Process
App 20090226843 - HATAKEYAMA; Jun ; et al. | 2009-09-10 |
Positive Resist Composition And Patterning Process
App 20090202943 - Ohsawa; Youichi ; et al. | 2009-08-13 |
Sulfonium salt having polymerizable anion, polymer, resist composition, and patterning process
Grant 7,569,326 - Ohsawa , et al. August 4, 2 | 2009-08-04 |
Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
Grant 7,556,909 - Kobayashi , et al. July 7, 2 | 2009-07-07 |
Fluorinated monomer having cyclic structure, manufacturing method, polymer, photoresist composition and patterning process
Grant 7,531,289 - Kinsho , et al. May 12, 2 | 2009-05-12 |
Photoacid generators, resist compositions, and patterning process
Grant 7,527,912 - Ohsawa , et al. May 5, 2 | 2009-05-05 |
Novel Photoacid Generator, Resist Composition, And Patterning Process
App 20090061358 - OHASHI; Masaki ; et al. | 2009-03-05 |
Nitrogen-containing organic compound, resist composition and patterning process
App 20080102405 - Watanabe; Takeru ; et al. | 2008-05-01 |
Sulfonium salt having polymerizable anion, polymer, resist composition, and patterning process
App 20080102407 - Ohsawa; Youichi ; et al. | 2008-05-01 |
Novel photoacid generators, resist compositions, and patterning process
App 20080085469 - Ohsawa; Youichi ; et al. | 2008-04-10 |
Ester compounds and their preparation, polymers, resist compositions and patterning process
App 20080008965 - Ohashi; Masaki ; et al. | 2008-01-10 |
Polymerizable ester compounds, polymers, resist compositions and patterning process
App 20080008962 - Watanabe; Takeru ; et al. | 2008-01-10 |
Stepped Position Specifying Apparatus, Stepping Type Exercise Apparatus, Stepped Position Specifying Method and Exercising Support Method
App 20070252327 - Ueshima; Hiromu ; et al. | 2007-11-01 |
Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process
App 20070179309 - Hasegawa; Koji ; et al. | 2007-08-02 |
Novel sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
App 20070099113 - Kobayashi; Katsuhiro ; et al. | 2007-05-03 |
Memory cartridge system
Grant 7,156,742 - Ueshima , et al. January 2, 2 | 2007-01-02 |
Weather strip
Grant 7,097,180 - Kuzuya , et al. August 29, 2 | 2006-08-29 |
Fluorinated monomer having cyclic structure, manufacturing method, polymer, photoresist composition and patterning process
App 20060093960 - Kinsho; Takeshi ; et al. | 2006-05-04 |
Weather strip and method of manufacturing the same
App 20050246963 - Kogiso, Harumi ; et al. | 2005-11-10 |
Weather strip having variable length holding lip
Grant 6,935,072 - Kogiso , et al. August 30, 2 | 2005-08-30 |
Method for producing extruded products
App 20050184415 - Ohashi, Masaki | 2005-08-25 |
Automotive weather strip
Grant 6,889,472 - Nozaki , et al. May 10, 2 | 2005-05-10 |
Music game with strike sounds changing in quality in the progress of music and entertainment music system
App 20050096132 - Ueshima, Hiromu ; et al. | 2005-05-05 |
Weather strip
App 20040227306 - Kuzuya, Hiroshi ; et al. | 2004-11-18 |
Automotive weather strip
App 20030051411 - Nozaki, Masahiro ; et al. | 2003-03-20 |
Weather strip and method of manufacturing the same
App 20030009947 - Kogiso, Harumi ; et al. | 2003-01-16 |
Memory cartridge system
App 20020055387 - Ueshima, Hiromu ; et al. | 2002-05-09 |
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