Patent | Date |
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Reflective Photomask And Method For Fabricating The Same App 20220283489 - PARK; SANG UK ;   et al. | 2022-09-08 |
Chemical supply structure and a developing apparatus having the same Grant 11,415,889 - Oh , et al. August 16, 2 | 2022-08-16 |
Substrate support device and substrate cleaning device including the same Grant 11,302,540 - Oh , et al. April 12, 2 | 2022-04-12 |
Pellicle Member And Reticle Assembly Including The Same App 20200225573 - OH; Jong Keun ;   et al. | 2020-07-16 |
Chemical Supply Structure And A Developing Apparatus Having The Same App 20200150539 - OH; Jong-Keun ;   et al. | 2020-05-14 |
Substrate Support Device And Substrate Cleaning Device Including The Same App 20190221451 - OH; Jong keun ;   et al. | 2019-07-18 |
Method of manufacturing photomask Grant 10,042,246 - Oh , et al. August 7, 2 | 2018-08-07 |
Method of forming photomask Grant 9,766,540 - Oh , et al. September 19, 2 | 2017-09-19 |
Method Of Manufacturing Photomask App 20160342079 - OH; Jong-Keun ;   et al. | 2016-11-24 |
Photomask and method of manufacturing the same Grant 9,417,518 - Oh , et al. August 16, 2 | 2016-08-16 |
Method of megasonic cleaning of an object Grant 9,370,805 - Choi , et al. June 21, 2 | 2016-06-21 |
Method Of Forming Photomask App 20160124301 - Oh; Jong Keun ;   et al. | 2016-05-05 |
Apparatus and method for providing a content upload service between different sites Grant 9,268,788 - Oh February 23, 2 | 2016-02-23 |
Photomask and method of forming the same Grant 9,223,199 - Oh , et al. December 29, 2 | 2015-12-29 |
Photomask And Method Of Manufacturing The Same App 20150010852 - OH; Jong-Keun ;   et al. | 2015-01-08 |
Photomasks and methods of manufacturing the same Grant 8,784,672 - Oh , et al. July 22, 2 | 2014-07-22 |
Apparatus And Method For Providing A Content Upload Service Between Different Sites App 20140143287 - OH; JONG-KEUN | 2014-05-22 |
Photomask And Method Of Forming The Same App 20140113221 - OH; Jong Keun ;   et al. | 2014-04-24 |
Method Of Megasonic Cleaning Of An Object App 20130008476 - CHOI; Jae-Hyuck ;   et al. | 2013-01-10 |
Method of megasonic cleaning of an object Grant 8,293,020 - Choi , et al. October 23, 2 | 2012-10-23 |
Photomasks And Methods Of Manufacturing The Same App 20120148944 - OH; Jong-Keun ;   et al. | 2012-06-14 |
Method Of Megasonic Cleaning Of An Object App 20110297182 - Choi; Jae-Hyuck ;   et al. | 2011-12-08 |
Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask Grant 7,989,123 - Lee , et al. August 2, 2 | 2011-08-02 |
Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask App 20100068631 - Lee; Han-shin ;   et al. | 2010-03-18 |