Oh; Jeonghoon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Oh; Jeonghoon.The latest application filed is for "substrate polishing simultaneously over multiple mini platens".
Company Profile
30.71.106
- Oh; Jeonghoon - Saratoga CA
- Oh; Jeonghoon - San Jose CA
- Oh; Jeonghoon - Seoul KR
- Oh; Jeonghoon - Sunnyvale CA US
Patent Activity
| Patent | Date |
|---|---|
| Retaining ring having inner surfaces with features Grant 11,453,099 - Reedy , et al. September 27, 2 | 2022-09-27 |
| Substrate Polishing Simultaneously Over Multiple Mini Platens App 20220297258 - OH; Jeonghoon ; et al. | 2022-09-22 |
| Edge load ring Grant 11,440,159 - Pai , et al. September 13, 2 | 2022-09-13 |
| Retaining ring design Grant 11,400,560 - Oh , et al. August 2, 2 | 2022-08-02 |
| Reinforcement ring for carrier head with flexible membrane Grant 11,370,079 - Oh , et al. June 28, 2 | 2022-06-28 |
| Three-zone carrier head and flexible membrane Grant 11,338,409 - Oh , et al. May 24, 2 | 2022-05-24 |
| Retaining Ring With Shaped Surface And Method Of Forming App 20220152778 - Chen; Hung Chih ; et al. | 2022-05-19 |
| Sequential Application Of Cleaning Fluids For Improved Maintenance Of Chemical Mechanical Polishing Systems App 20220118583 - OH; Jeonghoon ; et al. | 2022-04-21 |
| Edge Load Ring App 20220097202 - PAI; Uday ; et al. | 2022-03-31 |
| Parameter Sensing And Computer Modeling For Gas Delivery Health Monitoring App 20220092241 - Moradian; Ala ; et al. | 2022-03-24 |
| Substrate Handling Systems And Methods For Cmp Processing App 20220072682 - OH; Jeonghoon ; et al. | 2022-03-10 |
| Retaining ring with shaped surface Grant 11,260,500 - Chen , et al. March 1, 2 | 2022-03-01 |
| Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes Grant 11,241,769 - Ishikawa , et al. February 8, 2 | 2022-02-08 |
| Methods Of Detecting Non-conforming Substrate Processing Events During Chemical Mechanical Polishing App 20220016739 - OH; Jeonghoon ; et al. | 2022-01-20 |
| Retaining Ring Having Inner Surfaces with Facets App 20210249276 - Oh; Jeonghoon ; et al. | 2021-08-12 |
| Retaining ring having inner surfaces with facets Grant 11,056,350 - Oh , et al. July 6, 2 | 2021-07-06 |
| Sputtering target with backside cooling grooves Grant 11,011,356 - West , et al. May 18, 2 | 2021-05-18 |
| Retaining Ring with Shaped Surface App 20200398399 - Chen; Hung Chih ; et al. | 2020-12-24 |
| Electrostatic chuck with embossed top plate and cooling channels Grant 10,832,931 - Mangalore , et al. November 10, 2 | 2020-11-10 |
| Sputtering Target With Backside Cooling Grooves App 20200294778 - WEST; Brian T. ; et al. | 2020-09-17 |
| Spiral And Concentric Movement Designed For Cmp Location Specific Polish (lsp) App 20200282506 - LAU; Eric ; et al. | 2020-09-10 |
| Retaining ring with shaped surface Grant 10,766,117 - Chen , et al. Sep | 2020-09-08 |
| Chemical Mechanical Polishing System With Platen Temperature Control App 20200246935 - Kind Code | 2020-08-06 |
| Three-zone Carrier Head And Flexible Membrane App 20200223028 - Oh; Jeonghoon ; et al. | 2020-07-16 |
| Sputtering target with backside cooling grooves Grant 10,714,321 - West , et al. | 2020-07-14 |
| Textured membrane for a multi-chamber carrier head Grant 10,702,971 - Oh , et al. | 2020-07-07 |
| Polishing System with Platen for Substrate Edge Control App 20200206866 - Gurusamy; Jay ; et al. | 2020-07-02 |
| Retaining Ring Having Inner Surfaces with Features App 20200114489 - Reedy; Steven Mark ; et al. | 2020-04-16 |
| Polishing System With Support Post And Annular Platen Or Polishing Pad App 20200114487 - Butterfield; Paul D. ; et al. | 2020-04-16 |
| Polishing system with local area rate control and oscillation mode Grant 10,610,994 - Lau , et al. | 2020-04-07 |
| Methods For A Web-based Cmp System App 20200086456 - SKLYAR; Dmitry ; et al. | 2020-03-19 |
| Textured small pad for chemical mechanical polishing Grant 10,589,399 - Oh , et al. | 2020-03-17 |
| Polishing system with annular platen or polishing pad for substrate monitoring Grant 10,562,147 - Butterfield , et al. Feb | 2020-02-18 |
| Three-zone carrier head and flexible membrane Grant 10,532,441 - Oh , et al. Ja | 2020-01-14 |
| Temperature Control of Chemical Mechanical Polishing App 20200001427 - Soundararajan; Hari ; et al. | 2020-01-02 |
| Temperature Control of Chemical Mechanical Polishing App 20200001426 - Soundararajan; Hari ; et al. | 2020-01-02 |
| Retaining ring having inner surfaces with features Grant 10,500,695 - Reedy , et al. Dec | 2019-12-10 |
| Acoustic emission monitoring and endpoint for chemical mechanical polishing Grant 10,478,937 - Tang , et al. Nov | 2019-11-19 |
| Local area polishing system and polishing pad assemblies for a polishing system Grant 10,434,623 - Lau , et al. O | 2019-10-08 |
| Retaining Ring For Cmp App 20190291238 - Nagengast; Andrew J. ; et al. | 2019-09-26 |
| Monitoring of Vibrations During Chemical Mechanical Polishing App 20190283204 - Swedek; Boguslaw A. ; et al. | 2019-09-19 |
| Reinforcement Ring For Carrier Head With Flexible Membrane App 20190210181 - Oh; Jeonghoon ; et al. | 2019-07-11 |
| Gas cooled substrate support for stabilized high temperature deposition Grant 10,344,375 - West , et al. July 9, 2 | 2019-07-09 |
| Retaining ring for CMP Grant 10,322,492 - Nagengast , et al. | 2019-06-18 |
| Methods And Apparatus For Profile And Surface Preparation Of Retaining Rings Utilized In Chemical Mechanical Polishing Processes App 20190105754 - ISHIKAWA; David Masayuki ; et al. | 2019-04-11 |
| Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes Grant 10,252,397 - Ishikawa , et al. | 2019-04-09 |
| Retaining Ring Design App 20190099857 - OH; Jeonghoon ; et al. | 2019-04-04 |
| Methods for the continuous processing of substrates Grant 10,236,198 - Wu , et al. | 2019-03-19 |
| Method Of Identifying And Tracking Roll To Roll Polishing Pad Materials During Processing App 20190030677 - OH; Jeonghoon ; et al. | 2019-01-31 |
| Sputtering Target With Backside Cooling Grooves App 20180342378 - WEST; Brian T. ; et al. | 2018-11-29 |
| Spiral And Concentric Movement Designed For Cmp Location Specific Polish (lsp) App 20180250788 - LAU; Eric ; et al. | 2018-09-06 |
| Sputtering target with backside cooling grooves Grant 10,049,863 - West , et al. August 14, 2 | 2018-08-14 |
| Retaining Ring With Shaped Surface App 20180185979 - Chen; Hung Chih ; et al. | 2018-07-05 |
| Anti-arc Zero Field Plate App 20180119281 - BAEK; Jonghoon ; et al. | 2018-05-03 |
| Retaining ring with Shaped Surface Grant 9,937,601 - Chen , et al. April 10, 2 | 2018-04-10 |
| Polishing System With Annular Platen Or Polishing Pad For Substrate Monitoring App 20180056477 - Butterfield; Paul D. ; et al. | 2018-03-01 |
| Gas Cooled Substrate Support For Stabilized High Temperature Deposition App 20180037987 - WEST; Brian ; et al. | 2018-02-08 |
| Retaining Ring For Cmp App 20180021918 - Nagengast; Andrew J. ; et al. | 2018-01-25 |
| Sputtering Target With Backside Cooling Grooves App 20180019108 - WEST; Brian T. ; et al. | 2018-01-18 |
| Anti-arc zero field plate Grant 9,850,576 - Baek , et al. December 26, 2 | 2017-12-26 |
| Continuous Substrate Processing System App 20170365491 - Wu; Banqiu ; et al. | 2017-12-21 |
| Semiconductor device and method of fabricating the same Grant 9,842,841 - Kim , et al. December 12, 2 | 2017-12-12 |
| Semiconductor devices having channels with retrograde doping profile Grant 9,837,423 - Oh , et al. December 5, 2 | 2017-12-05 |
| Gas cooled substrate support for stabilized high temperature deposition Grant 9,790,589 - West , et al. October 17, 2 | 2017-10-17 |
| Sputtering target with backside cooling grooves Grant 9,779,920 - West , et al. October 3, 2 | 2017-10-03 |
| Polishing System With Local Area Rate Control And Oscillation Mode App 20170274495 - LAU; Eric ; et al. | 2017-09-28 |
| Local Area Polishing System And Polishing Pad Assemblies For A Polishing System App 20170274497 - LAU; Eric ; et al. | 2017-09-28 |
| Textured Small Pad For Chemical Mechanical Polishing App 20170274498 - Oh; Jeonghoon ; et al. | 2017-09-28 |
| Continuous substrate processing system Grant 9,748,125 - Wu , et al. August 29, 2 | 2017-08-29 |
| Coated retaining ring Grant 9,731,399 - Martin , et al. August 15, 2 | 2017-08-15 |
| Configurable pressure design for multizone chemical mechanical planarization polishing head Grant 9,610,672 - Oh , et al. April 4, 2 | 2017-04-04 |
| Textured Membrane For A Multi-chamber Carrier Head App 20170001282 - Oh; Jeonghoon ; et al. | 2017-01-05 |
| Retaining Ring Having Inner Surfaces with Features App 20160346897 - Reedy; Steven Mark ; et al. | 2016-12-01 |
| Semiconductor devices including channel dopant layer Grant 9,484,409 - Lee , et al. November 1, 2 | 2016-11-01 |
| Textured membrane for a multi-chamber carrier head Grant 9,452,505 - Oh , et al. September 27, 2 | 2016-09-27 |
| Acoustic Emission Monitoring and Endpoint for Chemical Mechanical Polishing App 20160256978 - Tang; Jianshe ; et al. | 2016-09-08 |
| Semiconductor Devices Having Channels With Retrograde Doping Profile App 20160204201 - OH; JEONGHOON ; et al. | 2016-07-14 |
| Systems, Apparatus, And Methods For An Improved Polishing Head Gimbal Using A Spherical Ball Bearing App 20160176014 - Gurusamy; Jay ; et al. | 2016-06-23 |
| Retaining ring having inner surfaces with facets Grant 9,368,371 - Oh , et al. June 14, 2 | 2016-06-14 |
| Retaining Ring Having Inner Surfaces With Facets App 20160151879 - Oh; Jeonghoon ; et al. | 2016-06-02 |
| Semiconductor Devices Including Channel Dopant Layer App 20160141367 - LEE; EUN-SUN ; et al. | 2016-05-19 |
| Methods And Apparatus For Profile And Surface Preparation Of Retaining Rings Utilized In Chemical Mechanical Polishing Processes App 20160121453 - ISHIKAWA; David Masayuki ; et al. | 2016-05-05 |
| Semiconductor Device And Method Of Fabricating The Same App 20160079246 - KIM; Ji Hun ; et al. | 2016-03-17 |
| Configurable Pressure Design For Multizone Chemical Mechanical Planarization Polishing Head App 20160059377 - OH; Jeonghoon ; et al. | 2016-03-03 |
| Retaining Ring With Shaped Surface App 20160045997 - Chen; Hung Chih ; et al. | 2016-02-18 |
| Electrostatic Chuck With Embossed Top Plate And Cooling Channels App 20150348813 - MANGALORE; CHETHAN ; et al. | 2015-12-03 |
| Retaining ring with shaped surface Grant 9,186,773 - Chen , et al. November 17, 2 | 2015-11-17 |
| Retaining Ring Having Inner Surfaces with Facets App 20150303070 - Oh; Jeonghoon ; et al. | 2015-10-22 |
| Gas Cooled Substrate Support For Stabilized High Temperature Deposition App 20150232983 - WEST; Brian ; et al. | 2015-08-20 |
| Method and apparatus for substrate support with multi-zone heating Grant 9,089,007 - Yang , et al. July 21, 2 | 2015-07-21 |
| Coated Retaining Ring App 20150099437 - MARTIN; Daniel L. ; et al. | 2015-04-09 |
| Sputtering Target With Backside Cooling Grooves App 20150047975 - WEST; Brian T. ; et al. | 2015-02-19 |
| Textured Membrane For A Multi-chamber Carrier Head App 20150038065 - Oh; Jeonghoon ; et al. | 2015-02-05 |
| Chemical Mechanical Polishing Retaining Ring Methods And Apparatus App 20150021498 - Hsu; Samuel ; et al. | 2015-01-22 |
| Substrate support bushing Grant 8,911,151 - Hou , et al. December 16, 2 | 2014-12-16 |
| Multi-chamber carrier head with a textured membrane Grant 8,808,062 - Oh , et al. August 19, 2 | 2014-08-19 |
| Three-zone Carrier Head And Flexible Membrane App 20140150974 - Oh; Jeonghoon ; et al. | 2014-06-05 |
| Retaining Ring With Shaped Surface App 20140053981 - Chen; Hung Chih ; et al. | 2014-02-27 |
| Multi-chamber Carrier Head With A Textured Membrane App 20130334752 - Oh; Jeonghoon ; et al. | 2013-12-19 |
| Retaining ring with shaped surface Grant 8,585,468 - Chen , et al. November 19, 2 | 2013-11-19 |
| Method And Apparatus For Independent Wafer Handling App 20130287529 - YANG; Yao-Hung ; et al. | 2013-10-31 |
| Method And Apparatus For Substrate Support With Multi-zone Heating App 20130284721 - Yang; Yao-Hung ; et al. | 2013-10-31 |
| Continuous Substrate Processing System App 20130192524 - Wu; Banqiu ; et al. | 2013-08-01 |
| Rotary Substrate Processing System App 20130192761 - Yudovsky; Joseph ; et al. | 2013-08-01 |
| Multi-Chamber Substrate Processing System App 20130196078 - Yudovsky; Joseph ; et al. | 2013-08-01 |
| Flexible membrane for carrier head Grant 8,469,776 - Zuniga , et al. June 25, 2 | 2013-06-25 |
| Multi-chamber carrier head with a textured membrane Grant 8,454,413 - Oh , et al. June 4, 2 | 2013-06-04 |
| Method For Balancing Gas Flow Supplying Multiple Cvd Reactors App 20130104996 - OH; JEONGHOON ; et al. | 2013-05-02 |
| Substrate Support Bushing App 20130101241 - HOU; TAO ; et al. | 2013-04-25 |
| Retaining ring with shaped profile Grant 8,388,412 - Prabhu , et al. March 5, 2 | 2013-03-05 |
| Mini Blocker Plate With Standoff Spacers App 20130004681 - Tso; Alan ; et al. | 2013-01-03 |
| Retaining Ring With Shaped Surface App 20120071067 - Chen; Hung Chih ; et al. | 2012-03-22 |
| Retaining Ring With Shaped Profile App 20120028548 - Prabhu; Gopalakrishna B. ; et al. | 2012-02-02 |
| Multiple zone carrier head with flexible membrane Grant 8,088,299 - Chen , et al. January 3, 2 | 2012-01-03 |
| Retaining ring with shaped surface Grant 8,066,551 - Chen , et al. November 29, 2 | 2011-11-29 |
| Retaining ring with shaped profile Grant 8,033,895 - Prabhu , et al. October 11, 2 | 2011-10-11 |
| Carrier head with retaining ring and carrier ring Grant 8,021,215 - Zuniga , et al. September 20, 2 | 2011-09-20 |
| Flexible Membrane for Carrier Head App 20110212672 - Zuniga; Steven M. ; et al. | 2011-09-01 |
| Anti-arc Zero Field Plate App 20110197814 - BAEK; JONGHOON ; et al. | 2011-08-18 |
| Retaining Ring With Shaped Surface App 20110195639 - Chen; Hung Chih ; et al. | 2011-08-11 |
| Processing Chamber With Translating Wear Plate For Lift Pin App 20110164955 - White; John M. ; et al. | 2011-07-07 |
| Flexible membrane for carrier head Grant 7,950,985 - Zuniga , et al. May 31, 2 | 2011-05-31 |
| Retaining ring with shaped surface Grant 7,927,190 - Chen , et al. April 19, 2 | 2011-04-19 |
| Multiple Zone Carrier Head With Flexible Membrane App 20110070810 - Chen; Hung Chih ; et al. | 2011-03-24 |
| Carrier ring for carrier head Grant 7,901,273 - Zuniga , et al. March 8, 2 | 2011-03-08 |
| Multiple zone carrier head with flexible membrane Grant 7,842,158 - Chen , et al. November 30, 2 | 2010-11-30 |
| Flexible Membrane for Carrier Head App 20100240287 - Zuniga; Steven M. ; et al. | 2010-09-23 |
| Carrier head using flexure restraints for retaining ring alignment Grant 7,749,052 - Yi , et al. July 6, 2 | 2010-07-06 |
| Carrier Ring for Carrier Head App 20100151777 - Zuniga; Steven M. ; et al. | 2010-06-17 |
| Carrier Head With Retaining Ring And Carrier Ring App 20100136892 - Zuniga; Steven M. ; et al. | 2010-06-03 |
| Flexible membrane for carrier head Grant 7,727,055 - Zuniga , et al. June 1, 2 | 2010-06-01 |
| Carrier ring for carrier head Grant 7,699,688 - Zuniga , et al. April 20, 2 | 2010-04-20 |
| Carrier Head Using Flexure Restraints For Retaining Ring Alignment App 20100062694 - Yi; Jin ; et al. | 2010-03-11 |
| Carrier head with retaining ring and carrier ring Grant 7,654,888 - Zuniga , et al. February 2, 2 | 2010-02-02 |
| Pad Properties Using Nanoparticle Additives App 20090278081 - M'Saad; Hichem ; et al. | 2009-11-12 |
| Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly Grant 7,575,504 - Zuniga , et al. August 18, 2 | 2009-08-18 |
| Fast substrate loading on polishing head without membrane inflation step Grant 7,527,271 - Oh , et al. May 5, 2 | 2009-05-05 |
| Composite retaining ring Grant 7,503,837 - Oh , et al. March 17, 2 | 2009-03-17 |
| Retaining Ring with Shaped Profile App 20090021024 - Prabhu; Gopalakrishna B. ; et al. | 2009-01-22 |
| Retaining Ring With Shaped Surface App 20080196833 - Chen; Hung Chih ; et al. | 2008-08-21 |
| Flexible Membrane for Carrier Head App 20080119122 - Zuniga; Steven M. ; et al. | 2008-05-22 |
| Retaining Ring, Flexible Membrane for Applying Load to a Retaining Ring, and Retaining Ring Assembly App 20080119118 - Zuniga; Steven M. ; et al. | 2008-05-22 |
| Carrier Head With Retaining Ring And Carrier Ring App 20080119120 - Zuniga; Steven M. ; et al. | 2008-05-22 |
| Carrier Ring for Carrier Head App 20080119119 - Zuniga; Steven M. ; et al. | 2008-05-22 |
| Fast Substrate Loading On Polishing Head Without Membrane Inflation Step App 20070289124 - Oh; Jeonghoon ; et al. | 2007-12-20 |
| Rotational Alignment Mechanism For Load Cups App 20070281589 - Oh; Jeonghoon ; et al. | 2007-12-06 |
| Multipe Zone Carrier Head With Flexible Membrane App 20070272356 - Chen; Hung Chih ; et al. | 2007-11-29 |
| Multi-chamber Carrier Head With A Textured Membrane App 20070202785 - Oh; Jeonghoon ; et al. | 2007-08-30 |
| Composite Retaining Ring App 20070197146 - Oh; Jeonghoon ; et al. | 2007-08-23 |
| Multiple zone carrier head with flexible membrane Grant 7,255,771 - Chen , et al. August 14, 2 | 2007-08-14 |
| Flexible membrane for multi-chamber carrier head Grant 7,198,561 - Chen , et al. April 3, 2 | 2007-04-03 |
| Composite retaining ring Grant 7,186,171 - Oh , et al. March 6, 2 | 2007-03-06 |
| Composite retaining ring App 20060240750 - Oh; Jeonghoon ; et al. | 2006-10-26 |
| Flexible membrane for multi-chamber carrier head App 20060154580 - Chen; Hung Chih ; et al. | 2006-07-13 |
| Two part retaining ring Grant 6,974,371 - Chen , et al. December 13, 2 | 2005-12-13 |
| Multiple zone carrier head with flexible membrane App 20050211377 - Chen, Hung Chih ; et al. | 2005-09-29 |
| Retaining ring with shaped surface App 20050191947 - Chen, Hung Chih ; et al. | 2005-09-01 |
| Two part retaining ring App 20040219870 - Chen, Hung Chih ; et al. | 2004-11-04 |
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