Ogino; Kozo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ogino; Kozo.The latest application filed is for "exposure method and method of making a semiconductor device".

Company Profile

0.16.16

Ogino; Kozo - Kawasaki JP
Ogino; Kozo - Yokohama JP
OGINO; Kozo - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Data generation method for semiconductor device, and electron beam exposure system Grant 8,429,573 - Ogino , et al. April 23, 2	2013-04-23
Exposure method and method of making a semiconductor device Grant 8,298,732 - Minemura , et al. October 30, 2	2012-10-30
Exposure method using charged particle beam Grant 8,158,312 - Ogino April 17, 2	2012-04-17
Preparing data for hybrid exposure using both electron beam exposure and reticle exposure in lithographic process Grant 8,141,009 - Miyajima , et al. March 20, 2	2012-03-20
Parameter extracting method Grant 8,048,600 - Ogino November 1, 2	2011-11-01
Method for manufacturing semiconductor device or photomask Grant 8,022,376 - Ogino , et al. September 20, 2	2011-09-20
Exposure Method And Method Of Making A Semiconductor Device App 20110207053 - Minemura; Masahiko ; et al.	2011-08-25
Exposure data preparation method and exposure method Grant 7,977,018 - Ogino , et al. July 12, 2	2011-07-12
Charged particle beam projection method Grant 7,939,246 - Ogino May 10, 2	2011-05-10
Exposure Method Using Charged Particle Beam App 20110033789 - Ogino; Kozo	2011-02-10
Exposure data generator and method thereof Grant 7,861,210 - Ogino , et al. December 28, 2	2010-12-28
Exposure data generation method and device, exposure data verification method and device and storage medium App 20100162198 - OGINO; Kozo	2010-06-24
Exposure data generation method and device, exposure data verification method and device and storage medium Grant 7,707,540 - Ogino April 27, 2	2010-04-27
Method For Preparing Data For Exposure And Method For Manufacturing Photo Mask App 20090239160 - MIYAJIMA; Masaaki ; et al.	2009-09-24
Method For Manufacturing Semiconductor Device Or Photomask App 20090206282 - Ogino; Kozo ; et al.	2009-08-20
Data Generation Method For Semiconductor Device, And Electron Beam Exposure System App 20090187878 - Ogino; Kozo ; et al.	2009-07-23
Exposure Data Preparation Method And Exposure Method App 20090176168 - OGINO; Kozo ; et al.	2009-07-09
Exposure data generator and method thereof App 20090144693 - Ogino; Kozo ; et al.	2009-06-04
Exposure data generator and method thereof Grant 7,500,219 - Ogino , et al. March 3, 2	2009-03-03
Charged particle beam projection method and program used therefor App 20070196768 - Ogino; Kozo	2007-08-23
Exposure data generation method and device, exposure data verification method and device and storage medium App 20070192758 - Ogino; Kozo	2007-08-16
Pattern size correcting device and pattern size correcting method Grant 7,240,307 - Aoyama , et al. July 3, 2	2007-07-03
Method for generating backscattering intensity on the basis of lower layer structure in charged particle beam exposure, and method for fabricating semiconductor device utilizing this method Grant 7,205,078 - Osawa , et al. April 17, 2	2007-04-17
Parameter extracting method App 20070021938 - Ogino; Kozo	2007-01-25
Exposure data generator and method thereof App 20060195815 - Ogino; Kozo ; et al.	2006-08-31
Pattern size correcting device and pattern size correcting method App 20050121628 - Aoyama, Hajime ; et al.	2005-06-09
Method for generating backscattering intensity on the basis of lower layer structure in charged particle beam exposure, and method for fabricating semiconductor device utilizing this method App 20050040344 - Osawa, Morimi ; et al.	2005-02-24
Rectangle/lattice data conversion method for charged particle beam exposure mask pattern and charged particle beam exposure method Grant 6,677,089 - Ogino , et al. January 13, 2	2004-01-13
Charged particle beam exposure method Grant 6,544,700 - Ogino April 8, 2	2003-04-08
Rectangle/lattice data conversion method for charged particle beam exposure mask pattern and charged particle beam exposure method App 20020177056 - Ogino, Kozo ; et al.	2002-11-28
Charged particle beam exposure method and charged particle beam exposure apparatus App 20020028398 - Ogino, Kozo	2002-03-07

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