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name:-0.013016939163208
name:-0.0016000270843506
Ogi; Tatsuya Patent Filings

Ogi; Tatsuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ogi; Tatsuya.The latest application filed is for "anomaly detection method and semiconductor manufacturing apparatus".

Company Profile
1.14.11
  • Ogi; Tatsuya - Yamanashi JP
  • Ogi; Tatsuya - Kurokawa-gun JP
  • Ogi; Tatsuya - Miyagi JP
  • Ogi; Tatsuya - Nirasaki N/A JP
  • Ogi; Tatsuya - Nirasaki-Shi JP
  • OGI; Tatsuya - Nirasaki City JP
  • Ogi; Tatsuya - Cupertino CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Anomaly detection method and semiconductor manufacturing apparatus
Grant 10,418,289 - Ogi , et al. Sept
2019-09-17
Anomaly Detection Method And Semiconductor Manufacturing Apparatus
App 20180068906 - OGI; Tatsuya ;   et al.
2018-03-08
Plasma processing apparatus, plasma processing method, and storage medium
Grant 9,299,540 - Ogi , et al. March 29, 2
2016-03-29
Substrate transfer method and storage medium
Grant 9,002,494 - Endo , et al. April 7, 2
2015-04-07
Plasma Processing Apparatus, Plasma Processing Method, And Storage Medium
App 20150001181 - OGI; Tatsuya ;   et al.
2015-01-01
Plasma processing apparatus, plasma processing method, and storage medium
Grant 8,864,934 - Ogi , et al. October 21, 2
2014-10-21
Substrate replacing method and substrate processing apparatus
Grant 8,663,489 - Ishizawa , et al. March 4, 2
2014-03-04
Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
Grant 8,423,176 - Ogi April 16, 2
2013-04-16
Plasma Processing Apparatus, Plasma Processing Method, And Storage Medium
App 20120248067 - Ogi; Tatsuya ;   et al.
2012-10-04
Method Of Analyzing Cause Of Abnormality And Program Analyzing Abnormality
App 20120101758 - OGI; Tatsuya
2012-04-26
Substrate transfer method, control program, and storage medium storing same
Grant 8,140,181 - Ogi March 20, 2
2012-03-20
Substrate Transfer Method And Storage Medium
App 20120059502 - Endo; Eiki ;   et al.
2012-03-08
Substrate Processing Apparatus And Substrate Transfer Method Adopted In Substrate Processing Apparatus
App 20120004753 - OGI; Tatsuya
2012-01-05
Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
Grant 8,078,311 - Ogi December 13, 2
2011-12-13
Substrate Replacing Method And Substrate Processing Apparatus
App 20100252532 - ISHIZAWA; SHIGERU ;   et al.
2010-10-07
Substrate Transfer Method, Control Program, And Storage Medium Storing Same
App 20100094452 - OGI; Tatsuya
2010-04-15
Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
App 20060182533 - Ogi; Tatsuya
2006-08-17
System and method for scheduling the movement of wafers in a wafer-processing tool
Grant 6,711,454 - Joma , et al. March 23, 2
2004-03-23
System and method for scheduling the movement of wafers in a wafer-processing tool
App 20030120371 - Joma, Kentaro ;   et al.
2003-06-26
System and method for scheduling the movement of wafers in a wafer-processing tool
Grant 6,535,784 - Joma , et al. March 18, 2
2003-03-18
System and method for scheduling the movement of wafers in a wafer-processing tool
App 20020160621 - Joma, Kentaro ;   et al.
2002-10-31

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