OGAWA; Riki

Patent Applications and Registrations

Patent applications and USPTO patent grants for OGAWA; Riki.The latest application filed is for "inspection apparatus".

Company Profile

13.65.74

OGAWA; Riki - Kawasaki-shi JP
Ogawa; Riki - Kawasaki JP
Ogawa; Riki - Yokohama JP
Ogawa; Riki - Kanagawa JP
Ogawa; Riki - Yokohama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection Apparatus App 20220299456 - OGAWA; Riki	2022-09-22
Inspection apparatus and inspection method Grant 11,385,192 - Shiratsuchi , et al. July 12, 2	2022-07-12
Multibeam inspection apparatus Grant 11,189,459 - Hashimoto , et al. November 30, 2	2021-11-30
Multiple electron beam inspection apparatus and multiple electron beam inspection method Grant 11,101,103 - Shiratsuchi , et al. August 24, 2	2021-08-24
Inspection method and inspection apparatus Grant 11,004,193 - Hirano , et al. May 11, 2	2021-05-11
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus, and multiple electron beam irradiation method Grant 11,004,657 - Sugihara , et al. May 11, 2	2021-05-11
Pattern inspection method and pattern inspection apparatus Grant 10,984,525 - Hirano , et al. April 20, 2	2021-04-20
Multiple electron beam inspection apparatus and multiple electron beam inspection method Grant 10,984,978 - Inoue , et al. April 20, 2	2021-04-20
Inspection Apparatus And Inspection Method App 20210010959 - SHIRATSUCHI; Masataka ; et al.	2021-01-14
Multibeam Inspection Apparatus App 20200395191 - HASHIMOTO; Hideaki ; et al.	2020-12-17
Pattern inspection apparatus and pattern inspection method Grant 10,846,846 - Shiratsuchi , et al. November 24, 2	2020-11-24
Electron beam inspection apparatus and electron beam inspection method Grant 10,775,326 - Tsuchiya , et al. September 15, 2	2020-09-15
Multiple Electron Beam Inspection Apparatus And Multiple Electron Beam Inspection Method App 20200286709 - SHIRATSUCHI; Masataka ; et al.	2020-09-10
Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method Grant 10,768,126 - Ogawa Sep	2020-09-08
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method Grant 10,734,190 - Ando , et al.	2020-08-04
Charged particle beam inspection method Grant 10,727,026 - Noda , et al.	2020-07-28
Multiple Electron Beam Irradiation Apparatus, Multiple Electron Beam Inspection Apparatus, And Multiple Electron Beam Irradiatio App 20200234919 - SUGIHARA; Shinji ; et al.	2020-07-23
Pattern inspection apparatus and pattern inspection method Grant 10,719,928 - Otaki , et al.	2020-07-21
Electron beam inspection apparatus and electron beam inspection method Grant 10,712,295 - Tsuchiya , et al.	2020-07-14
Multiple Electron Beam Inspection Apparatus And Multiple Electron Beam Inspection Method App 20200161082 - INOUE; Hiromu ; et al.	2020-05-21
Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method Grant 10,655,956 - Ogawa , et al.	2020-05-19
Inspection method and inspection apparatus Grant 10,643,327 - Ogawa	2020-05-05
Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method Grant 10,636,138 - Ogawa	2020-04-28
Electron Beam Inspection Apparatus and Electron Beam Inspection Method App 20190369035 - Tsuchiya; Hideo ; et al.	2019-12-05
Multiple Charged Particle Beam Inspection Apparatus And Multiple Charged Particle Beam Inspection Method App 20190360951 - OGAWA; Riki	2019-11-28
Displacement Measurement Device And Displacement Measurement Method App 20190361124 - OGAWA; Riki ; et al.	2019-11-28
Mask inspection apparatus and mask inspection method Grant 10,488,180 - Yamashita , et al. Nov	2019-11-26
Multiple Electron Beam Irradiation Apparatus, Multiple Electron Beam Inspection Apparatus And Multiple Electron Beam Irradiation App 20190355547 - Ando; Atsushi ; et al.	2019-11-21
Pattern Inspection Apparatus And Pattern Inspection Method App 20190346769 - Hashimoto; Hideaki ; et al.	2019-11-14
Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method Grant 10,444,487 - Ogawa Oc	2019-10-15
Pattern Inspection Method And Pattern Inspection Apparatus App 20190279348 - HIRANO; Ryoichi ; et al.	2019-09-12
Electron Beam Inspection Apparatus And Electron Beam Inspection Method App 20190277782 - TSUCHIYA; Hideo ; et al.	2019-09-12
Inspection method and inspection apparatus Grant 10,410,335 - Ogawa , et al. Sept	2019-09-10
Image capturing apparatus and inspection apparatus and inspection method Grant 10,401,299 - Ogawa Sep	2019-09-03
Charged Particle Beam Inspection Method App 20190259572 - NODA; Chosaku ; et al.	2019-08-22
Pattern inspection apparatus for detecting a pattern defect Grant 10,386,308 - Otaki , et al. A	2019-08-20
Template substrate for use in adjusting focus offset for defect detection Grant 10,359,370 - Tsuchiya , et al.	2019-07-23
Inspection Method And Inspection Apparatus App 20190213726 - Hirano; Ryoichi ; et al.	2019-07-11
Displacement Measuring Apparatus, Electron Beam Inspection Apparatus, And Displacement Measuring Method App 20190195621 - OGAWA; Riki ; et al.	2019-06-27
Pattern inspection apparatus Grant 10,282,635 - Ogawa	2019-05-07
Focusing apparatus, focusing method, and pattern inspection method Grant 10,222,341 - Otaki , et al.	2019-03-05
Pattern Inspection Apparatus And Pattern Inspection Method App 20190066286 - SHIRATSUCHI; Masataka ; et al.	2019-02-28
Inspection apparatus Grant 10,197,507 - Ogawa , et al. Fe	2019-02-05
Method for measuring pattern width deviation, and pattern inspection apparatus Grant 10,192,304 - Inoue , et al. Ja	2019-01-29
Polarized Image Acquisition Apparatus, Pattern Inspection Apparatus, Polarized Image Acquisition Method, And Pattern Inspection Method App 20180364472 - Ogawa; Riki	2018-12-20
Image Capturing Device And Inspection Apparatus And Inspection Method App 20180335394 - OGAWA; Riki	2018-11-22
Inspection Method And Inspection Apparatus App 20180293724 - Ogawa; Riki ; et al.	2018-10-11
Charged particle beam inspection apparatus and charged particle beam inspection method Grant 10,041,892 - Shiratsuchi , et al. August 7, 2	2018-08-07
Image capturing device and inspection apparatus and inspection method Grant 10,036,714 - Ogawa July 31, 2	2018-07-31
Inspection method and inspection apparatus Grant 10,007,980 - Ogawa , et al. June 26, 2	2018-06-26
Polarized Image Acquisition Apparatus, Pattern Inspection Apparatus, Polarized Image Acquisition Method, And Pattern Inspection Method App 20180114306 - OGAWA; Riki	2018-04-26
Inspection Method And Inspection Apparatus App 20180075595 - Ogawa; Riki ; et al.	2018-03-15
Template Substrate For Use In Adjusting Focus Offset For Defect Detection App 20180045656 - TSUCHIYA; Hideo ; et al.	2018-02-15
Charged Particle Beam Inspection Apparatus And Charged Particle Beam Inspection Method App 20180031498 - SHIRATSUCHI; Masataka ; et al.	2018-02-01
Pattern Inspection Apparatus App 20180024075 - OTAKI; Toshiaki ; et al.	2018-01-25
Focusing Apparatus, Focusing Method, And Pattern Inspection Method App 20180003649 - OTAKI; Toshiaki ; et al.	2018-01-04
Inspection method and inspection apparatus Grant 9,846,928 - Ogawa , et al. December 19, 2	2017-12-19
Inspection method, template substrate, and focus offset method Grant 9,804,103 - Tsuchiya , et al. October 31, 2	2017-10-31
Pattern Inspection Apparatus App 20170206433 - OGAWA; Riki	2017-07-20
Defect inspection device Grant 9,683,947 - Hirono , et al. June 20, 2	2017-06-20
Inspection Method And Inspection Apparatus App 20170132772 - OGAWA; Riki	2017-05-11
Method For Measuring Pattern Width Deviation, And Pattern Inspection Apparatus App 20170069111 - INOUE; Kazuhiko ; et al.	2017-03-09
Inspection apparatus and inspection method Grant 9,575,010 - Ogawa , et al. February 21, 2	2017-02-21
Pattern Inspection Apparatus And Pattern Inspection Method App 20170032507 - OTAKI; Toshiaki ; et al.	2017-02-02
Inspection apparatus and inspection method Grant 9,557,277 - Inoue , et al. January 31, 2	2017-01-31
Inspection Apparatus And Inspection Method App 20160370300 - OGAWA; Riki ; et al.	2016-12-22
Mask Inspection Apparatus And Mask Inspection Method App 20160267648 - YAMASHITA; Yasuhiro ; et al.	2016-09-15
Illumination apparatus and inspection apparatus Grant 9,423,356 - Ogawa , et al. August 23, 2	2016-08-23
Illumination apparatus and pattern inspection apparatus Grant 9,410,899 - Otaki , et al. August 9, 2	2016-08-09
Defect Inspection Device App 20160209333 - HIRONO; Masatoshi ; et al.	2016-07-21
Pattern Test Apparatus App 20150377800 - OGAWA; Riki ; et al.	2015-12-31
Focal position adjustment method and inspection method Grant 9,213,001 - Nagahama , et al. December 15, 2	2015-12-15
Sample support apparatus Grant 9,207,189 - Ogawa , et al. December 8, 2	2015-12-08
Defect detection method Grant 9,194,817 - Sugihara , et al. November 24, 2	2015-11-24
Inspection Method, Template Substrate, And Focus Offset Method App 20150332452 - TSUCHIYA; Hideo ; et al.	2015-11-19
Pattern test apparatus Grant 9,157,870 - Ogawa , et al. October 13, 2	2015-10-13
Image Capturing Apparatus And Inspection Apparatus And Inspection Method App 20150285744 - OGAWA; Riki	2015-10-08
Illumination Apparatus And Pattern Inspection Apparatus App 20150219568 - OTAKI; Toshiaki ; et al.	2015-08-06
Focal Position Adjustment Method And Inspection Method App 20150204796 - NAGAHAMA; Hiroyuki ; et al.	2015-07-23
Pattern evaluation method and apparatus Grant 9,086,388 - Ogawa , et al. July 21, 2	2015-07-21
Objective Lens Switching Mechanism And Inspection Apparatus App 20150138541 - NUKADA; Hideki ; et al.	2015-05-21
Inspection apparatus and inspection method Grant 9,036,143 - Yamashita , et al. May 19, 2	2015-05-19
Image Capturing Device And Inspection Apparatus And Inspection Method App 20150054941 - OGAWA; Riki	2015-02-26
Inspection Apparatus App 20150022812 - OGAWA; Riki	2015-01-22
Inspection Apparatus And Inspection Method App 20140307254 - YAMASHITA; Yasuhiro ; et al.	2014-10-16
Illumination Apparatus And Inspection Apparatus App 20140300893 - OGAWA; Riki ; et al.	2014-10-09
Sample Support Apparatus App 20140240700 - OGAWA; Riki ; et al.	2014-08-28
Inspection Method And Inspection Apparatus App 20140232849 - OGAWA; Riki ; et al.	2014-08-21
Pattern inspection apparatus and pattern inspection method Grant 8,797,525 - Ogawa August 5, 2	2014-08-05
Inspection Apparatus App 20140204202 - OGAWA; Riki ; et al.	2014-07-24
Luminous flux branching element and mask defect inspection apparatus Grant 8,767,200 - Ogawa , et al. July 1, 2	2014-07-01
Illuminating apparatus, pattern inspection apparatus, and method of forming illuminating light Grant 8,755,040 - Ogawa June 17, 2	2014-06-17
Inspection Apparatus And Inspection Method App 20140111636 - Inoue; Hiromu ; et al.	2014-04-24
Pattern Evaluation Method And Apparatus App 20140072202 - OGAWA; Riki ; et al.	2014-03-13
Defect Detection Method App 20140055774 - SUGIHARA; Shinji ; et al.	2014-02-27
Pattern Test Apparatus App 20140055780 - OGAWA; Riki ; et al.	2014-02-27
Luminous Flux Branching Element And Mask Defect Inspection Apparatus App 20130176559 - OGAWA; Riki ; et al.	2013-07-11
Pattern Inspection Apparatus And Pattern Inspection Method App 20130083318 - OGAWA; Riki	2013-04-04
Illuminating Apparatus, Pattern Inspection Apparatus, And Method Of Forming Illuminating Light App 20120189032 - OGAWA; Riki	2012-07-26
Light polarization control using serial combination of surface-segmented half wavelength plates Grant 8,199,403 - Ogawa June 12, 2	2012-06-12
Pattern Inspection Apparatus App 20120081538 - Ogawa; Riki ; et al.	2012-04-05
Reticle defect inspection apparatus and reticle defect inspection method Grant 8,072,592 - Watanabe , et al. December 6, 2	2011-12-06
Reticle defect inspection apparatus and inspection method using thereof Grant 8,049,897 - Hirano , et al. November 1, 2	2011-11-01
Automatic focus adjusting mechanism and optical image acquisition apparatus Grant 8,004,655 - Shiratsuchi , et al. August 23, 2	2011-08-23
Reticle Defect Inspection Apparatus And Reticle Defect Inspection Method App 20110096324 - WATANABE; Toshiyuki ; et al.	2011-04-28
Reticle defect inspection apparatus and reticle defect inspection method Grant 7,911,599 - Watanabe , et al. March 22, 2	2011-03-22
Reticle defect inspection apparatus and reticle defect inspection method Grant 7,894,051 - Hirano , et al. February 22, 2	2011-02-22
Automatic Focus Adjusting Mechanism And Optical Image Acquisition Apparatus App 20100247085 - Shiratsuchi; Masataka ; et al.	2010-09-30
Mask-defect inspecting apparatus with movable focusing lens Grant 7,760,349 - Sekine , et al. July 20, 2	2010-07-20
Light Polarization Control Using Serial Combination Of Surface-segmented Half Wavelength Plates App 20090237909 - OGAWA; Riki	2009-09-24
Mask defect inspection apparatus Grant 7,551,273 - Sekine , et al. June 23, 2	2009-06-23
Defect inspecting apparatus Grant 7,508,526 - Ogawa , et al. March 24, 2	2009-03-24
Level detection apparatus Grant 7,495,779 - Ogawa February 24, 2	2009-02-24
Defect inspection apparatus Grant 7,491,959 - Ogawa , et al. February 17, 2	2009-02-17
Reticle Defect Inspection Apparatus And Inspection Method Using Thereof App 20080259328 - HIRANO; Ryoichi ; et al.	2008-10-23
Reticle Defect Inspection Apparatus And Reticle Defect Inspection Method App 20080259323 - Hirano; Ryoichi ; et al.	2008-10-23
Reticle Defect Inspection Apparatus And Reticle Defect Inspection Method App 20080239290 - WATANABE; Toshiyuki ; et al.	2008-10-02
Level Detection Apparatus App 20080231846 - OGAWA; Riki	2008-09-25
Mask defect inspection apparatus App 20080204723 - Sekine; Akihiko ; et al.	2008-08-28
Mask Pattern Inspection Apparatus With Koehler Illumination System Using Light Source Of High Spatial Coherency App 20080204737 - OGAWA; Riki ; et al.	2008-08-28
Light amount measurement device and light amount measurement method Grant 7,388,660 - Kobayashi , et al. June 17, 2	2008-06-17
Mask defect inspection apparatus Grant 7,379,176 - Sekine , et al. May 27, 2	2008-05-27
Pattern inspecting method and pattern inspecting apparatus Grant 7,359,043 - Tsuchiya , et al. April 15, 2	2008-04-15
Defect inspecting apparatus and defect inspection method Grant 7,345,755 - Ogawa , et al. March 18, 2	2008-03-18
Light amount measurement device and light amount measurement method App 20070081149 - Kobayashi; Noboru ; et al.	2007-04-12
Defect inspection apparatus App 20070070334 - Ogawa; Riki ; et al.	2007-03-29
Automatic focusing apparatus Grant 7,123,345 - Sugihara , et al. October 17, 2	2006-10-17
Defect inspecting apparatus and defect inspection method App 20060087649 - Ogawa; Riki ; et al.	2006-04-27
Defect inspecting apparatus App 20060082782 - Ogawa; Riki ; et al.	2006-04-20
Mask defect inspection apparatus App 20050213083 - Sekine, Akihiko ; et al.	2005-09-29
Mask-defect inspecting apparatus App 20050213084 - Sekine, Akihiko ; et al.	2005-09-29
Pattern inspection apparatus and pattern inspection method Grant 6,909,501 - Ogawa , et al. June 21, 2	2005-06-21
Automatic focusing apparatus App 20050052634 - Sugihara, Shinji ; et al.	2005-03-10
Pattern inspecting method and pattern inspecting apparatus App 20040184652 - Tsuchiya, Hideo ; et al.	2004-09-23
Method of adjusting the level of a specimen surface App 20040114824 - Ogawa, Riki ; et al.	2004-06-17
Pattern inspection apparatus and pattern inspection method App 20020037099 - Ogawa, Riki ; et al.	2002-03-28

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