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Method for correcting mask pattern, photomask, method for fabricating photomask, electron beam writing method for fabricating photomask, exposure method, semiconductor device, and method for fabricating semiconductor device Grant 7,767,364 - Ogawa , et al. August 3, 2 | 2010-08-03 |
Method For Correcting Mask Pattern, Photomask, Method For Fabricating Photomask, Electron Beam Writing Method For Fabricating Photomask, Exposure Method, Semiconductor Device, And Method For Fabricating Semiconductor Device App 20100038798 - Ogawa; Kazuhisa ;   et al. | 2010-02-18 |
Air-cooled Engine App 20100031903 - Sato; Yoshikazu ;   et al. | 2010-02-11 |
Engine Oil Filter System App 20090314245 - Ogawa; Kazuhisa ;   et al. | 2009-12-24 |
Breather Device For Engine App 20090301449 - Ogawa; Kazuhisa ;   et al. | 2009-12-10 |
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V-type Engine App 20090301415 - OGAWA; Kazuhisa ;   et al. | 2009-12-10 |
Mask pattern generating method Grant 7,541,117 - Ogawa , et al. June 2, 2 | 2009-06-02 |
Air-cooled Engine App 20090044769 - Kubo; Yoshihiko ;   et al. | 2009-02-19 |
Fuel tank with filters Grant 7,429,322 - Fujita , et al. September 30, 2 | 2008-09-30 |
Method of forming exposure mask pattern, exposure mask pattern, and method of producing semiconductor device Grant 7,384,710 - Ogawa , et al. June 10, 2 | 2008-06-10 |
Mask Pattern Generating Method App 20070283313 - Ogawa; Kazuhisa ;   et al. | 2007-12-06 |
Exposure pattern forming method and exposure pattern Grant 7,200,834 - Ogawa , et al. April 3, 2 | 2007-04-03 |
Exposure pattern forming method and exposure pattern Grant 7,165,235 - Ogawa , et al. January 16, 2 | 2007-01-16 |
Method for correcting mask pattern, photomask, method for fabricating photomask, electron beam writing method for fabricating photomask, exposure method, semiconductor device, and method for fabricating semiconductor device App 20060134532 - Ogawa; Kazuhisa ;   et al. | 2006-06-22 |
Exposure pattern forming method and exposure pattern Grant 7,000,216 - Ogawa , et al. February 14, 2 | 2006-02-14 |
Method of correcting mask pattern App 20060014082 - Ogawa; Kazuhisa | 2006-01-19 |
Exposure pattern forming method and exposure pattern App 20050204330 - Ogawa, Kazuhisa ;   et al. | 2005-09-15 |
Exposure pattern forming method and exposure pattern App 20050174557 - Ogawa, Kazuhisa ;   et al. | 2005-08-11 |
Exposure mask pattern forming method, exposure mask pattern, and semiconductor device manufacturing method App 20050147893 - Ogawa, Kazuhisa ;   et al. | 2005-07-07 |
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Method for mask data verification and computer readable record medium recording the verification program Grant 6,658,641 - Ashida , et al. December 2, 2 | 2003-12-02 |
Method for forming exposure pattern and exposure pattern App 20030140329 - Ogawa, Kazuhisa ;   et al. | 2003-07-24 |
Method for mask data verification and computer readable record medium recording the verification program App 20020066069 - Ashida, Isao ;   et al. | 2002-05-30 |
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