loadpatents
Patent applications and USPTO patent grants for Ogawa; Hironori.The latest application filed is for "temperature abnormality detection device".
Patent | Date |
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Stage device, charged particle beam apparatus, and vacuum apparatus Grant 11,417,496 - Takahashi , et al. August 16, 2 | 2022-08-16 |
Temperature Abnormality Detection Device App 20220214220 - IKEUCHI; Ryo ;   et al. | 2022-07-07 |
Vibration Damping System For Charged Particle Beam Apparatus App 20220208505 - ETOH; Jun ;   et al. | 2022-06-30 |
Charged particle beam apparatus, sample alignment method of charged particle beam apparatus Grant 11,342,156 - Ogawa , et al. May 24, 2 | 2022-05-24 |
Wafer inspection apparatus and wafer inspection method Grant 11,342,211 - Doi , et al. May 24, 2 | 2022-05-24 |
Stage Movement Control Apparatus and Charged Particle Beam System App 20220148845 - OGAWA; Hironori ;   et al. | 2022-05-12 |
Air Conditioner And Preheating Operation Method App 20220128286 - KOTERA; Keito ;   et al. | 2022-04-28 |
Connection Structure Between Printed Circuit Board And Terminal Block, Terminal Block, And Air Conditioner App 20220037814 - Fukagawa; Kazunari ;   et al. | 2022-02-03 |
Information Transmission System Using Bell App 20210335105 - KOIZUMI; Toshihiro ;   et al. | 2021-10-28 |
Charged Particle Beam Apparatus, Sample Alignment Method Of Charged Particle Beam Apparatus App 20210265129 - OGAWA; Hironori ;   et al. | 2021-08-26 |
Stage apparatus and charged particle beam apparatus Grant 11,049,687 - Takahashi , et al. June 29, 2 | 2021-06-29 |
Wafer Inspection Apparatus And Wafer Inspection Method App 20210118710 - DOI; Akira ;   et al. | 2021-04-22 |
Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus App 20210027978 - TAKAHASHI; Motohiro ;   et al. | 2021-01-28 |
Stage apparatus, and charged particle beam apparatus Grant 10,879,033 - Nishioka , et al. December 29, 2 | 2020-12-29 |
Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage Grant 10,804,067 - Kato , et al. October 13, 2 | 2020-10-13 |
Stage device and charged particle beam device Grant 10,770,259 - Takahashi , et al. Sep | 2020-09-08 |
Stage Apparatus And Charged Particle Beam Apparatus App 20200176217 - TAKAHASHI; Motohiro ;   et al. | 2020-06-04 |
Stage device and charged particle beam device Grant 10,658,151 - Takahashi , et al. | 2020-05-19 |
Stage device and charged particle beam device Grant 10,600,614 - Takahashi , et al. | 2020-03-24 |
Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device Grant 10,591,018 - Takahashi , et al. | 2020-03-17 |
Charged particle beam device Grant 10,586,676 - Kato , et al. | 2020-03-10 |
Stage Apparatus, And Charged Particle Beam Apparatus App 20190378678 - NISHIOKA; Akira ;   et al. | 2019-12-12 |
Seal bar and heat sealing apparatus Grant 10,442,139 - Ogawa , et al. Oc | 2019-10-15 |
Stage Device And Charged Particle Beam Device App 20190259567 - TAKAHASHI; Motohiro ;   et al. | 2019-08-22 |
Charged Particle Beam Apparatus App 20190252151 - KATO; Takanori ;   et al. | 2019-08-15 |
Stage apparatus and charged particle beam apparatus Grant 10,366,912 - Takahashi , et al. July 30, 2 | 2019-07-30 |
Stage Device And Charged Particle Beam Device App 20190228947 - TAKAHASHI; Motohiro ;   et al. | 2019-07-25 |
Frequency-characteristics measurement method and positioning control device Grant 10,296,015 - Odai , et al. | 2019-05-21 |
Vibration-suppressing Mechanism To Be Attached To Charged Particle Beam Device, And Charged Particle Beam Device App 20190145490 - TAKAHASHI; Hiroki ;   et al. | 2019-05-16 |
Charged Particle Beam Device App 20190108970 - KATO; Takanori ;   et al. | 2019-04-11 |
Stage Device And Charged Particle Beam Device App 20190103246 - TAKAHASHI; Motohiro ;   et al. | 2019-04-04 |
Charged particle beam apparatus and sample elevating apparatus Grant 10,153,128 - Sugaya , et al. Dec | 2018-12-11 |
Stage Apparatus and Charged Particle Beam Apparatus App 20180247855 - TAKAHASHI; Motohiro ;   et al. | 2018-08-30 |
Control Device, Control Method, And Control Program App 20180203422 - OZAKI; Masahiro ;   et al. | 2018-07-19 |
Seal Bar And Heat Sealing Apparatus App 20180178456 - OGAWA; Hironori ;   et al. | 2018-06-28 |
Charged Particle Beam Apparatus And Sample Elevating Apparatus App 20180138009 - SUGAYA; Masakazu ;   et al. | 2018-05-17 |
Stage apparatus with braking system for lens, beam, or vibration compensation Grant 9,905,393 - Ogawa , et al. February 27, 2 | 2018-02-27 |
Positioning control device Grant 9,673,021 - Ogawa , et al. June 6, 2 | 2017-06-06 |
Stage device and charged particle beam apparatus using the stage device Grant 9,627,173 - Ogawa , et al. April 18, 2 | 2017-04-18 |
Charged particle beam apparatus, stage controlling method, and stage system Grant 9,502,208 - Mizuochi , et al. November 22, 2 | 2016-11-22 |
Stage Apparatus and Charged Particle Radiation Apparatus Equipped with Stage Apparatus App 20160284506 - OGAWA; Hironori ;   et al. | 2016-09-29 |
Frequency-Characteristics Measurement Method and Positioning Control Device App 20160246305 - ODAI; Masaki ;   et al. | 2016-08-25 |
Charged Particle Beam Apparatus, Stage Controlling Method, and Stage System App 20160005568 - MIZUOCHI; Masaki ;   et al. | 2016-01-07 |
Positioning Control Device App 20150279613 - OGAWA; Hironori ;   et al. | 2015-10-01 |
Stage Device and Charged Particle Beam Apparatus Using the Stage Device App 20150248991 - OGAWA; Hironori ;   et al. | 2015-09-03 |
Sample positioning apparatus, sample stage, and charged particle beam apparatus Grant 8,946,652 - Takahashi , et al. February 3, 2 | 2015-02-03 |
Sample Positioning Apparatus, Sample Stage, And Charged Particle Beam Apparatus App 20140312246 - Takahashi; Motohiro ;   et al. | 2014-10-23 |
Stage device Grant 8,823,309 - Ogawa , et al. September 2, 2 | 2014-09-02 |
Stage Apparatus And Charged Particle Beam Apparatus App 20140042338 - Shibata; Nobuo ;   et al. | 2014-02-13 |
Stage Device App 20120145920 - Ogawa; Hironori ;   et al. | 2012-06-14 |
Specimen stage apparatus and specimen stage positioning control method Grant 8,076,651 - Koyama , et al. December 13, 2 | 2011-12-13 |
Specimen Stage Apparatus And Specimen Stage Positioning Control Method App 20090250625 - KOYAMA; Masahiro ;   et al. | 2009-10-08 |
Linear moving mechanism and transfer robot using the same Grant 7,306,423 - Ogawa , et al. December 11, 2 | 2007-12-11 |
Transfer robot Grant 7,114,907 - Ogawa , et al. October 3, 2 | 2006-10-03 |
Massaging device App 20060217643 - Yonekawa; Mitsuhisa ;   et al. | 2006-09-28 |
Two-arm transfer robot Grant 7,056,080 - Ogawa , et al. June 6, 2 | 2006-06-06 |
Massage machine App 20060036202 - Iwata; Yoshiyuki ;   et al. | 2006-02-16 |
Transfer robot App 20050118010 - Ogawa, Hironori ;   et al. | 2005-06-02 |
Two-arm transfer robot App 20050079043 - Ogawa, Hironori ;   et al. | 2005-04-14 |
Linear moving mechanism and transfer robot using the same App 20050036877 - Ogawa, Hironori ;   et al. | 2005-02-17 |
Two-armed transfer robot Grant RE37,731 - Ogawa , et al. June 11, 2 | 2002-06-11 |
Transfer robot Grant 6,293,746 - Ogawa , et al. September 25, 2 | 2001-09-25 |
Transfer robot Grant 6,190,114 - Ogawa , et al. February 20, 2 | 2001-02-20 |
Two-armed transfer robot Grant 6,109,860 - Ogawa , et al. August 29, 2 | 2000-08-29 |
Two-armed transfer robot Grant 6,102,649 - Ogawa , et al. August 15, 2 | 2000-08-15 |
Two-armed transfer robot Grant 5,975,834 - Ogawa , et al. November 2, 1 | 1999-11-02 |
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