| Patent | Date |
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Method Of Processing Substrate, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20220267905 - SEINO; Atsuro ; et al. | 2022-08-25 |
Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium
Grant 11,424,127 - Ogawa , et al. August 23, 2 | 2022-08-23 |
Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
App 20220259738 - OGAWA; Arito | 2022-08-18 |
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
Grant 11,393,719 - Ogawa July 19, 2 | 2022-07-19 |
Substrate Processing Method, Method Of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium And Substrate Processing Apparatus
App 20220216061 - OGAWA; Arito ; et al. | 2022-07-07 |
Method Of Processing Substrate, Method Of Manufacturing Semiconductor Device, Recording Medium, And Substrate Processing Apparatus
App 20220208557 - OGAWA; Arito ; et al. | 2022-06-30 |
Method Of Processing Substrate, Recording Medium, And Substrate Processing Apparatus
App 20220165565 - SEINO; Atsuro ; et al. | 2022-05-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Method Of Processing Substrate, And Recording Medium
App 20220093404 - OGAWA; Arito ; et al. | 2022-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20220093392 - JODA; Takuya ; et al. | 2022-03-24 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210388487 - ASHITANI; Atsuhiko ; et al. | 2021-12-16 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210305058 - OGAWA; Arito ; et al. | 2021-09-30 |
Method Of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium And Substrate Processing Apparatus
App 20210242023 - OGAWA; Arito | 2021-08-05 |
Method Of Manufacturing Semiconductor Device, Recording Medium, And Substrate Processing Apparatus
App 20210242026 - KURIBAYASHI; Koei ; et al. | 2021-08-05 |
Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus
Grant 11,004,676 - Ogawa , et al. May 11, 2 | 2021-05-11 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium
App 20200373202 - OGAWA; Arito | 2020-11-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200335328 - OGAWA; Arito ; et al. | 2020-10-22 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,734,218 - Ogawa , et al. | 2020-08-04 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200194269 - OGAWA; Arito ; et al. | 2020-06-18 |
Method of manufacturing semiconductor device
Grant 10,410,870 - Seino , et al. Sept | 2019-09-10 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 10,388,530 - Ogawa , et al. A | 2019-08-20 |
Method of manufacturing semiconductor device, substrate processing device, and recording medium
Grant 10,366,894 - Kaga , et al. July 30, 2 | 2019-07-30 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20190157089 - OGAWA; Arito ; et al. | 2019-05-23 |
Method For Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium, And Substrate Processing Apparatus
App 20190096663 - OGAWA; Arito ; et al. | 2019-03-28 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20190019673 - OGAWA; Arito ; et al. | 2019-01-17 |
Method of manufacturing semiconductor device
Grant 10,121,651 - Ogawa , et al. November 6, 2 | 2018-11-06 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20180247819 - OGAWA; Arito ; et al. | 2018-08-30 |
Method Of Manufacturing Semiconductor Device
App 20180211843 - SEINO; Atsuro ; et al. | 2018-07-26 |
Method of manufacturing semiconductor device
Grant 10,014,226 - Ogawa July 3, 2 | 2018-07-03 |
Method Of Manufacturing Semiconductor Device
App 20180182619 - OGAWA; Arito ; et al. | 2018-06-28 |
Method of manufacturing semiconductor device
Grant 9,970,107 - Ogawa , et al. May 15, 2 | 2018-05-15 |
Method of manufacturing semiconductor device
Grant 9,972,500 - Kaga , et al. May 15, 2 | 2018-05-15 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 9,966,268 - Ogawa , et al. May 8, 2 | 2018-05-08 |
Method of Manufacturing Semiconductor Device
App 20180080122 - OGAWA; Arito ; et al. | 2018-03-22 |
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
Grant 9,824,883 - Ashihara , et al. November 21, 2 | 2017-11-21 |
Method Of Manufacturing Semiconductor Device
App 20170309490 - OGAWA; Arito | 2017-10-26 |
Method Of Manufacturing Semiconductor Device
App 20170287786 - OGAWA; Arito | 2017-10-05 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 9,745,656 - Ogawa , et al. August 29, 2 | 2017-08-29 |
Method of manufacturing a semiconductor device and recording medium
Grant 9,666,439 - Ogawa May 30, 2 | 2017-05-30 |
Method of manufacturing semiconductor device
Grant 9,653,351 - Ogawa , et al. May 16, 2 | 2017-05-16 |
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same
Grant 9,653,301 - Horii , et al. May 16, 2 | 2017-05-16 |
Method of Manufacturing Semiconductor Device
App 20170047227 - KAGA; Yukinao ; et al. | 2017-02-16 |
Method Of Manufacturing Semiconductor Device
App 20170011958 - OGAWA; Arito ; et al. | 2017-01-12 |
Method of manufacturing semiconductor device
Grant 9,508,555 - Kaga , et al. November 29, 2 | 2016-11-29 |
Semiconductor Device Having Electrode Made Of High Work Function Material, Method And Apparatus For Manufacturing The Same
App 20160343573 - HORII; Sadayoshi ; et al. | 2016-11-24 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20160305017 - OGAWA; Arito ; et al. | 2016-10-20 |
Semiconductor device having electrode made of high work function material and method of manufacturing the same
Grant 9,472,637 - Horii , et al. October 18, 2 | 2016-10-18 |
Method Of Manufacturing Semiconductor Device And Recording Medium
App 20160293421 - HARADA; Kazuhiro ; et al. | 2016-10-06 |
Method Of Manufacturing A Semiconductor Device And Recording Medium
App 20160284552 - OGAWA; Arito | 2016-09-29 |
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same
Grant 9,437,704 - Horii , et al. September 6, 2 | 2016-09-06 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,425,039 - Harada , et al. August 23, 2 | 2016-08-23 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 9,406,520 - Ogawa , et al. August 2, 2 | 2016-08-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Device, And Recording Medium
App 20160196978 - KAGA; Yukinao ; et al. | 2016-07-07 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 9,378,964 - Ogawa , et al. June 28, 2 | 2016-06-28 |
Method of manufacturing a semiconductor device
Grant 9,368,358 - Harada , et al. June 14, 2 | 2016-06-14 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 9,355,850 - Ogawa , et al. May 31, 2 | 2016-05-31 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20160093508 - OGAWA; Arito | 2016-03-31 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20160079070 - OGAWA; Arito ; et al. | 2016-03-17 |
Method Of Manufacturing A Semiconductor Device
App 20160056044 - HARADA; Kazuhiro ; et al. | 2016-02-25 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150340226 - ASHIHARA; Hiroshi ; et al. | 2015-11-26 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150325447 - OGAWA; Arito ; et al. | 2015-11-12 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20150279663 - Harada; Kazuhiro ; et al. | 2015-10-01 |
Semiconductor device, method of manufacturing semiconductor device and system of processing substrate
Grant 9,123,644 - Ogawa September 1, 2 | 2015-09-01 |
Method Of Manufacturing Semiconductor Device
App 20150243507 - HARADA; Kazuhiro ; et al. | 2015-08-27 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20150200103 - OGAWA; Arito ; et al. | 2015-07-16 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20150200102 - OGAWA; Arito ; et al. | 2015-07-16 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20150200104 - OGAWA; Arito ; et al. | 2015-07-16 |
Method, apparatus, and non-transitory computer readable recording medium for manufacturing a semiconductor device with an amorphous oxide film
Grant 9,082,747 - Ogawa July 14, 2 | 2015-07-14 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150187567 - ASHIHARA; Hiroshi ; et al. | 2015-07-02 |
Method For Producing A Composite Wafer And A Method For Producing A Semiconductor Crystal Layer Forming Wafer
App 20150187652 - YAMAMOTO; Taketsugu ; et al. | 2015-07-02 |
Semiconductor Device Having Electrode Made Of High Work Function Material, Method And Apparatus For Manufacturing The Same
App 20150171180 - HORII; Sadayoshi ; et al. | 2015-06-18 |
Semiconductor Device Having Electrode Made Of High Work Function Material And Method Of Manufacturing The Same
App 20150171179 - HORII; Sadayoshi ; et al. | 2015-06-18 |
Method of manufacturing semiconductor device
Grant 9,059,089 - Harada , et al. June 16, 2 | 2015-06-16 |
Semiconductor Device, Method Of Manufacturing Semiconductor Device And System Of Processing Substrate
App 20150162200 - OGAWA; Arito | 2015-06-11 |
Method Of Producing Composite Wafer And Composite Wafer
App 20150155165 - HATA; Masahiko ; et al. | 2015-06-04 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150111378 - OGAWA; Arito ; et al. | 2015-04-23 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 9,012,323 - Ogawa , et al. April 21, 2 | 2015-04-21 |
Semiconductor device, method of manufacturing semiconductor device and system of processing substrate
Grant 8,994,124 - Ogawa March 31, 2 | 2015-03-31 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
Grant 8,951,912 - Ogawa , et al. February 10, 2 | 2015-02-10 |
Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
Grant 8,937,022 - Ogawa January 20, 2 | 2015-01-20 |
Method of Manufacturing Semiconductor Device
App 20140295667 - Kaga; Yukinao ; et al. | 2014-10-02 |
Substrate Processing Apparatus, Substrate Processing Method, Method Of Manufacturing Semiconductor Device And Recording Medium
App 20140256152 - Ogawa; Arito | 2014-09-11 |
Method Of Manufacturing Semiconductor Device
App 20140242790 - HARADA; Kazuhiro ; et al. | 2014-08-28 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20140179086 - OGAWA; Arito ; et al. | 2014-06-26 |
Method of manufacturing a semiconductor device
Grant 8,741,731 - Takebayashi , et al. June 3, 2 | 2014-06-03 |
Method of Manufacturing Semiconductor Device, Substrate Processing Method and Apparatus, Non-Transitory Computer Readable Recording Medium, and Semiconductor Device
App 20140084389 - Ogawa; Arito | 2014-03-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method And Substrate Processing Apparatus
App 20130309876 - Ogawa; Arito | 2013-11-21 |
Method Of Manufacturing A Semiconductor Device
App 20130122720 - Takebayashi; Yuji ; et al. | 2013-05-16 |
Method of manufacturing a semiconductor device
Grant 8,420,552 - Takebayashi , et al. April 16, 2 | 2013-04-16 |
Method of manufacturing semiconductor device and substrate processing system
Grant 8,404,603 - Ogawa , et al. March 26, 2 | 2013-03-26 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Computer-readable Recording Medium
App 20130065391 - Ogawa; Arito ; et al. | 2013-03-14 |
Semiconductor device manufacturing method
Grant 8,367,560 - Ogawa , et al. February 5, 2 | 2013-02-05 |
Semiconductor Device, Method Of Manufacturing Semiconductor Device And System Of Processing Substrate
App 20120261773 - OGAWA; Arito | 2012-10-18 |
Semiconductor Device, Method Of Manufacturing Semiconductor Device, And Substrate Processing Apparatus
App 20110163452 - HORII; Sadayoshi ; et al. | 2011-07-07 |
Semiconductor device and fabrication method thereof
Grant 7,884,423 - Iwamoto , et al. February 8, 2 | 2011-02-08 |
Method Of Manufacturing Semiconductor Device, Semiconductor Device, And Substrate Processing Apparatus
App 20110024875 - TAKEBAYASHI; Yuji ; et al. | 2011-02-03 |
Method Of Manufacturing Semiconductor Device And Substrate Processing System
App 20110003482 - Ogawa; Arito ; et al. | 2011-01-06 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20100291763 - OGAWA; Arito ; et al. | 2010-11-18 |
Semiconductor device manufacturing method and substrate processing apparatus
App 20080318442 - Ogawa; Arito ; et al. | 2008-12-25 |
Semiconductor Device and Fabrication Method Thereof
App 20080303099 - Iwamoto; Kunihiko ; et al. | 2008-12-11 |
MOS transistor apparatus and method of manufacturing same
Grant 6,905,928 - Kanda , et al. June 14, 2 | 2005-06-14 |
MOS transistor apparatus and method of manufacturing same
Grant 6,870,224 - Kanda , et al. March 22, 2 | 2005-03-22 |
MOS transistor devices and method of manufacturing same
App 20040145001 - Kanda, Naoki ; et al. | 2004-07-29 |
MOS transistor apparatus and method of manufacturing same
App 20040051139 - Kanda, Naoki ; et al. | 2004-03-18 |
MOS transistor apparatus and method of manufacturing same
App 20030183901 - Kanda, Naoki ; et al. | 2003-10-02 |
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