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Patent applications and USPTO patent grants for Ogata; Taro.The latest application filed is for "optical apparatus and exposure apparatus incorporating the apparatus".
Patent | Date |
---|---|
Optical apparatus and exposure apparatus incorporating the apparatus Grant 6,961,114 - Murayama , et al. November 1, 2 | 2005-11-01 |
Optical apparatus and exposure apparatus incorporating the apparatus App 20030206280 - Murayama, Masayuki ;   et al. | 2003-11-06 |
Optical exposure apparatus and photo-cleaning method Grant 6,642,994 - Mori , et al. November 4, 2 | 2003-11-04 |
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus App 20020126268 - Matsumoto, Yukako ;   et al. | 2002-09-12 |
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus Grant 6,411,368 - Matsumoto , et al. June 25, 2 | 2002-06-25 |
Optical exposure apparatus and photo-cleaning method App 20010030740 - Mori, Takashi ;   et al. | 2001-10-18 |
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