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Substrate Processing Apparatus App 20220115249 - OGATA; Nobuhiro ;   et al. | 2022-04-14 |
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Substrate processing apparatus, substrate processing method and recording medium Grant 11,024,518 - Ito , et al. June 1, 2 | 2021-06-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20200357667 - IINO; Tadashi ;   et al. | 2020-11-12 |
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Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20200070196 - KAMIMURA; Fumihiro ;   et al. | 2020-03-05 |
Substrate Processing Apparatus and Substrate Processing Method App 20200038897 - KAMIMURA; Fumihiro ;   et al. | 2020-02-06 |
Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium Grant 10,486,208 - Ogata , et al. Nov | 2019-11-26 |
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Substrate processing apparatus Grant 9,933,702 - Higashijima , et al. April 3, 2 | 2018-04-03 |
Substrate Processing Apparatus And Processing Liquid Supply Method App 20180090306 - Higashijima; Jiro ;   et al. | 2018-03-29 |
Substrate Processing Apparatus, Method Of Cleaning Substrate Processing Apparatus, And Storage Medium App 20170361364 - Ogata; Nobuhiro ;   et al. | 2017-12-21 |
Liquid processing apparatus with cleaning jig Grant 9,721,813 - Ogata , et al. August 1, 2 | 2017-08-01 |
Substrate Processing Apparatus And Method Of Cleaning Substrate Processing Apparatus App 20170200624 - Higashijima; Jiro ;   et al. | 2017-07-13 |
Substrate Processing Apparatus App 20170059996 - Higashijima; Jiro ;   et al. | 2017-03-02 |
Substrate liquid processing apparatus Grant 9,484,230 - Ogata , et al. November 1, 2 | 2016-11-01 |
Liquid processing apparatus and cleaning method Grant 9,387,520 - Ogata , et al. July 12, 2 | 2016-07-12 |
Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup Grant 9,355,871 - Higashijima , et al. May 31, 2 | 2016-05-31 |
Liquid processing apparatus, liquid processing method and storage medium Grant 9,305,767 - Nishi , et al. April 5, 2 | 2016-04-05 |
Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein Grant 9,108,231 - Ogata , et al. August 18, 2 | 2015-08-18 |
Liquid processing apparatus having switchable nozzles Grant 9,108,228 - Otsuka , et al. August 18, 2 | 2015-08-18 |
Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method Grant 9,073,103 - Morita , et al. July 7, 2 | 2015-07-07 |
Substrate liquid treatment apparatus with lift pin plate Grant 9,048,269 - Higashijima , et al. June 2, 2 | 2015-06-02 |
Substrate liquid cleaning apparatus with controlled liquid port ejection angle Grant 9,022,045 - Higashijima , et al. May 5, 2 | 2015-05-05 |
Liquid Processing Apparatus, Liquid Processing Method, And Computer-readable Recording Medium Having Program Stored Therein App 20140360540 - Ogata; Nobuhiro ;   et al. | 2014-12-11 |
Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus Grant 8,881,751 - Ogata , et al. November 11, 2 | 2014-11-11 |
Liquid processing apparatus and liquid processing method Grant 8,869,811 - Ogata , et al. October 28, 2 | 2014-10-28 |
Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein Grant 8,845,815 - Ogata , et al. September 30, 2 | 2014-09-30 |
Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium Grant 8,840,752 - Ogata , et al. September 23, 2 | 2014-09-23 |
Coating method Grant 8,808,798 - Kitano , et al. August 19, 2 | 2014-08-19 |
Coating film forming apparatus, use of coating film forming apparatus, and recording medium Grant 8,758,855 - Ogata , et al. June 24, 2 | 2014-06-24 |
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20140137893 - Otsuka; Takahisa ;   et al. | 2014-05-22 |
Liquid Processing Apparatus And Cleaning Method App 20140026927 - Ogata; Nobuhiro ;   et al. | 2014-01-30 |
Liquid Processing Apparatus, Cleaning Jig, And Cleaning Method App 20140014134 - Ogata; Nobuhiro ;   et al. | 2014-01-16 |
Coating method Grant 8,551,563 - Kitano , et al. October 8, 2 | 2013-10-08 |
Substrate liquid processing apparatus Grant 8,539,906 - Ogata , et al. September 24, 2 | 2013-09-24 |
Liquid Processing Apparatus, Liquid Processing Method, And Computer-readable Storage Medium Having Stored Therein A Computer-readable Program App 20130228200 - Otsuka; Takahisa ;   et al. | 2013-09-05 |
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Grant 8,354,141 - Nakashima , et al. January 15, 2 | 2013-01-15 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20130008872 - Higashuima; Jiro ;   et al. | 2013-01-10 |
Coating Method App 20120301612 - KITANO; Takahiro ;   et al. | 2012-11-29 |
Liquid Processing Apparatus, Liquid Processing Method, And Computer-readable Recording Medium Having Program Stored Therein App 20120260946 - OGATA; Nobuhiro ;   et al. | 2012-10-18 |
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20120234356 - Nishi; Kenji ;   et al. | 2012-09-20 |
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Computer Program for Performing the Same Method App 20120227768 - MORITA; Satoshi ;   et al. | 2012-09-13 |
Coating apparatus and method Grant 8,256,370 - Kitano , et al. September 4, 2 | 2012-09-04 |
Coating Apparatus And Method App 20120213925 - Kitano; Takahiro ;   et al. | 2012-08-23 |
Coating apparatus and method Grant 8,225,737 - Kitano , et al. July 24, 2 | 2012-07-24 |
Coating Film Forming Apparatus, Use Of Coating Film Forming Apparatus, And Recording Medium App 20120183693 - Ogata; Nobuhiro ;   et al. | 2012-07-19 |
Liquid Treatment Apparatus And Method App 20120160278 - HIGASHIJIMA; Jiro ;   et al. | 2012-06-28 |
Liquid Treatment Apparatus And Method App 20120160275 - HIGASHIJIMA; Jiro ;   et al. | 2012-06-28 |
Substrate Liquid Processing Apparatus App 20120153044 - Ogata; Nobuhiro ;   et al. | 2012-06-21 |
Coating film forming apparatus, use of coating film forming apparatus, and recording medium Grant 8,186,298 - Ogata , et al. May 29, 2 | 2012-05-29 |
Flow Passage Switching Apparatus, Processing Apparatus, Flow Passage Switching Method, Processing Method and Storage Medium App 20110308626 - Ogata; Nobuhiro ;   et al. | 2011-12-22 |
Substrate Liquid Processing Apparatus, Method Of Controlling Substrate Liquid Processing Apparatus, And Storage Medium Performing Substrate Liquid Processing Apparatus Control Method On Substrate Liquid Processing Apparatus App 20110297257 - OGATA; Nobuhiro ;   et al. | 2011-12-08 |
Substrate Liquid Processing Apparatus App 20110297192 - OGATA; Nobuhiro ;   et al. | 2011-12-08 |
Liquid Treatment Apparatus, Mounting And Dismounting Method Of A Cup Body, And Storage Medium App 20110220216 - NAKASHIMA; Tsunenaga ;   et al. | 2011-09-15 |
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Grant 7,984,690 - Nakashima , et al. July 26, 2 | 2011-07-26 |
Method of processing a substrate and apparatus processing the same Grant 7,976,896 - Fukuda , et al. July 12, 2 | 2011-07-12 |
Liquid Processing Apparatus And Liquid Processing Method App 20110048469 - OGATA; Nobuhiro ;   et al. | 2011-03-03 |
Coating Apparatus And Method App 20090285984 - KITANO; Takahiro ;   et al. | 2009-11-19 |
Coating Apparatus And Method App 20090285991 - Kitano; Takahiro ;   et al. | 2009-11-19 |
Coating Film Forming Apparatus, Use Of Coating Film Forming Apparatus, And Recording Medium App 20080280054 - OGATA; Nobuhiro ;   et al. | 2008-11-13 |
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium App 20080092813 - Nakashima; Tsunenaga ;   et al. | 2008-04-24 |
Method of processing a substrate and apparatus processing the same App 20070082134 - Fukuda; Yoshiteru ;   et al. | 2007-04-12 |