Patent | Date |
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Resist Underlayer Film-forming Composition App 20220283501 - OGATA; Hiroto ;   et al. | 2022-09-08 |
Resist Underlayer Film-forming Composition App 20220229368 - OGATA; Hiroto ;   et al. | 2022-07-21 |
Resist Underlayer Film-forming Composition App 20220155686 - TOKUNAGA; Hikaru ;   et al. | 2022-05-19 |
Resist Underlayer Film-forming Composition App 20220146939 - OGATA; Hiroto ;   et al. | 2022-05-12 |
Composition for forming a coating film for removing foreign matters Grant 11,319,514 - Kishioka , et al. May 3, 2 | 2022-05-03 |
Resist underlayer film-forming composition Grant 11,287,741 - Ogata , et al. March 29, 2 | 2022-03-29 |
Resist Underlayer Film-forming Composition App 20210311396 - OGATA; Hiroto ;   et al. | 2021-10-07 |
Resist underlayer film forming composition which contains compound having glycoluril skeleton as additive Grant 11,131,928 - Usui , et al. September 28, 2 | 2021-09-28 |
Protective film-forming composition Grant 11,112,696 - Hashimoto , et al. September 7, 2 | 2021-09-07 |
Compositions for forming a protective film against basic aqueous hydrogen peroxide solution, and pattern formation method Grant 11,003,078 - Ohashi , et al. May 11, 2 | 2021-05-11 |
Resist Underlayer Film-forming Composition Including Cyclic Carbonyl Compound App 20210124268 - TOKUNAGA; Hikaru ;   et al. | 2021-04-29 |
Resist Underlayer Film-forming Composition Using Carbon-oxygen Double Bond App 20210116814 - TOKUNAGA; Hikaru ;   et al. | 2021-04-22 |
Composition For Forming Resist Underlayer Film And Method For Forming Resist Pattern Using Same App 20210024689 - OGATA; Hiroto ;   et al. | 2021-01-28 |
Stepped Substrate Coating Composition Containing Compound Having Curable Functional Group App 20210024773 - TOKUNAGA; Hikaru ;   et al. | 2021-01-28 |
Composition for forming resist underlayer film and method for forming resist pattern using same Grant 10,844,167 - Ogata , et al. November 24, 2 | 2020-11-24 |
Resist Underlying Film Forming Composition App 20200209753 - TAMURA; Mamoru ;   et al. | 2020-07-02 |
Resist Underlayer Film Forming Composition Containing Compound Having Hydantoin Ring App 20200201183 - OGATA; Hiroto ;   et al. | 2020-06-25 |
Resist Underlayer Film-forming Composition App 20200201184 - OGATA; Hiroto ;   et al. | 2020-06-25 |
Resist Underlayer Film-forming Composition App 20200192224 - OGATA; Hiroto ;   et al. | 2020-06-18 |
Protective Film-forming Composition App 20200183282 - HASHIMOTO; Yuto ;   et al. | 2020-06-11 |
Composition For Forming A Coating Film For Removing Foreign Matters App 20200140792 - KISHIOKA; Takahiro ;   et al. | 2020-05-07 |
Resist Underlying Film-forming Composition Containing An Amide Group-containing Polyester App 20200041905 - TAMURA; Mamoru ;   et al. | 2020-02-06 |
Cationically polymerizable resist underlayer film-forming composition Grant 10,437,151 - Ogata , et al. O | 2019-10-08 |
Composition For Forming Resist Underlayer Film And Method For Forming Resist Pattern Using Same App 20190177475 - OGATA; Hiroto ;   et al. | 2019-06-13 |
Composition For Forming Protective Film Including Specific Crosslinking Agent, And Pattern Formation Method In Which Same Is Use App 20190163064 - OHASHI; Tomoya ;   et al. | 2019-05-30 |
Resist Underlayer Film Forming Composition Which Contains Compound Having Glycoluril Skeleton As Additive App 20190086806 - USUI; Yuki ;   et al. | 2019-03-21 |
Cationically Polymerizable Resist Underlayer Film-forming Composition App 20180081274 - OGATA; Hiroto ;   et al. | 2018-03-22 |
Pattern forming method using resist underlayer film Grant 9,793,131 - Ohashi , et al. October 17, 2 | 2017-10-17 |
Resist underlayer film-forming composition containing copolymer that has triazine ring and sulfur atom in main chain Grant 9,678,427 - Ogata , et al. June 13, 2 | 2017-06-13 |
Resist Underlayer Film-forming Composition Containing Copolymer That Has Triazine Ring And Sulfur Atom In Main Chain App 20170038687 - OGATA; Hiroto ;   et al. | 2017-02-09 |
Resist underlayer film-forming composition Grant 9,534,140 - Ohashi , et al. January 3, 2 | 2017-01-03 |
Pattern Forming Method Using Resist Underlayer Film App 20160218013 - OHASHI; Tomoya ;   et al. | 2016-07-28 |
Resist Underlayer Film-forming Composition App 20150337164 - OHASHI; Tomoya ;   et al. | 2015-11-26 |
Chair and support mechanism unit thereof Grant 7,293,833 - Takeuchi , et al. November 13, 2 | 2007-11-13 |
Chair and support mechanism unit thereof App 20060181128 - Takeuchi; Hiroshi ;   et al. | 2006-08-17 |