Ogasawara; Munehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ogasawara; Munehiro.The latest application filed is for "multi-beam image acquisition apparatus and multi-beam image acquisition method".

Company Profile

14.64.65

Ogasawara; Munehiro - Hiratsuka JP
OGASAWARA; Munehiro - Hiratsuka-shi JP
Ogasawara; Munehiro - Yokohama JP
OGASAWARA; Munehiro - Yokohama-shi JP
Ogasawara; Munehiro - Kanagawa JP
Ogasawara; Munehiro - Kanagawa-Ken JP
Ogasawara; Munehiro - Fujisawa JP
Ogasawara, Munehiro - Fujisawa-shi JP
Ogasawara, Munehiro - Minato-ku JP
Ogasawara; Munehiro - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus Grant 11,417,495 - Inoue , et al. August 16, 2	2022-08-16
Multi-beam Image Acquisition Apparatus And Multi-beam Image Acquisition Method App 20220230837 - INOUE; Kazuhiko ; et al.	2022-07-21
Drawing Apparatus And Deflector App 20220172919 - KISHI; Kazuhiro ; et al.	2022-06-02
Multi-charged Particle Beam Irradiation Apparatus And Multi-charged Particle Beam Inspection Apparatus App 20210319974 - INOUE; Kazuhiko ; et al.	2021-10-14
Multiple electron beams irradiation apparatus Grant 11,145,485 - Inoue , et al. October 12, 2	2021-10-12
Multiple electron beams irradiation apparatus Grant 11,139,138 - Inoue , et al. October 5, 2	2021-10-05
Charged particle beam writing apparatus and charged particle beam writing method Grant 10,998,164 - Touya , et al. May 4, 2	2021-05-04
Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method Grant 10,998,162 - Miyamoto , et al. May 4, 2	2021-05-04
Multiple electron beam inspection apparatus with through-hole with spiral shape Grant 10,950,410 - Inoue , et al. March 16, 2	2021-03-16
Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus Grant 10,886,102 - Inoue , et al. January 5, 2	2021-01-05
Aberration Corrector And Multiple Electron Beam Irradiation Apparatus App 20200395189 - INOUE; Kazuhiko ; et al.	2020-12-17
Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus Grant 10,790,110 - Ogasawara September 29, 2	2020-09-29
Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line Grant 10,784,073 - Ogasawara Sept	2020-09-22
Charged particle beam lithography apparatus and charged particle beam pattern writing method Grant 10,784,081 - Ogasawara Sept	2020-09-22
Multiple Electron Beams Irradiation Apparatus App 20200286704 - INOUE; Kazuhiko ; et al.	2020-09-10
Charged Particle Beam Lithography Apparatus And Charged Particle Beam Pattern Writing Method App 20200266033 - OGASAWARA; Munehiro	2020-08-20
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method Grant 10,734,190 - Ando , et al.	2020-08-04
Multiple Electron Beams Irradiation Apparatus App 20200211812 - INOUE; Kazuhiko ; et al.	2020-07-02
Optical System Adjustment Method Of Image Acquisition Apparatus App 20200203121 - OGASAWARA; Munehiro ; et al.	2020-06-25
Charged particle beam lithography apparatus and charged particle beam pattern writing method Grant 10,685,809 - Ogasawara	2020-06-16
Multiple Electron Beam Inspection Apparatus App 20200176216 - INOUE; Kazuhiko ; et al.	2020-06-04
Optical system adjustment method of image acquisition apparatus Grant 10,629,406 - Ogasawara , et al.	2020-04-21
Charged particle beam writing apparatus and charged particle beam writing method Grant 10,622,186 - Uemura , et al.	2020-04-14
Multiple Electron Beam Irradiation Apparatus, Multiple Electron Beam Irradiation Method, And Multiple Electron Beam Inspection A App 20200013585 - INOUE; Kazuhiko ; et al.	2020-01-09
Charged particle beam writing method and charged particle beam writing apparatus Grant 10,504,686 - Ogasawara , et al. Dec	2019-12-10
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20190371565 - TOUYA; Takanao ; et al.	2019-12-05
Multiple Electron Beam Irradiation Apparatus, Multiple Electron Beam Inspection Apparatus And Multiple Electron Beam Irradiation App 20190355547 - Ando; Atsushi ; et al.	2019-11-21
Electron beam irradiation apparatus and electron beam dynamic focus adjustment method Grant 10,451,976 - Ogasawara Oc	2019-10-22
Charged Particle Beam Irradiation Apparatus, Charged Particle Beam Image Acquisition Apparatus, and Charged Particle Beam Inspec App 20190304737 - Ogasawara; Munehiro	2019-10-03
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant RE47,561 - Yoshikawa , et al.	2019-08-06
Charged Particle Beam Lithography Apparatus And Charged Particle Beam Pattern Writing Method App 20190198293 - OGASAWARA; Munehiro	2019-06-27
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20190189389 - UEMURA; Takuya ; et al.	2019-06-20
Aperture for inspecting multi beam, beam inspection apparatus for multi beam, and multi charged particle beam writing apparatus Grant 10,283,316 - Yamashita , et al.	2019-05-07
Charged Particle Beam Irradiation Apparatus And Method For Reducing Electrification Of Substrate App 20190096632 - OGASAWARA; Munehiro	2019-03-28
Charged-particle Beam Apparatus, Charged-particle Beam Writing Apparatus, And Charged-particle Beam Controlling Method App 20190080879 - MIYAMOTO; Nobuo ; et al.	2019-03-14
Multi-beam optical system adjustment method, and multi-beam exposure apparatus Grant 10,224,172 - Ogasawara , et al.	2019-03-05
Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus Grant 10,224,171 - Touya , et al.	2019-03-05
Optical System Adjustment Method Of Image Acquisition Apparatus App 20190051487 - Ogasawara; Munehiro ; et al.	2019-02-14
Multiple charged particle beam apparatus Grant 10,163,604 - Ogasawara Dec	2018-12-25
Charged Particle Beam Writing Method And Charged Particle Beam Writing Apparatus App 20180342366 - OGASAWARA; Munehiro ; et al.	2018-11-29
Electron Beam Irradiation Apparatus And Electron Beam Dynamic Focus Adjustment Method App 20180284620 - OGASAWARA; Munehiro	2018-10-04
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20180261421 - MATSUMOTO; Hiroshi ; et al.	2018-09-13
Charged particle beam lithography method and charged particle beam lithography apparatus Grant 10,074,515 - Ogasawara September 11, 2	2018-09-11
Inspection apparatus and inspection method Grant 10,043,634 - Ogasawara August 7, 2	2018-08-07
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 10,020,159 - Matsumoto , et al. July 10, 2	2018-07-10
Blanking Deflector, And Multi Charged Particle Beam Writing Apparatus App 20180166248 - OGASAWARA; Munehiro	2018-06-14
Multi-beam Optical System Adjustment Method, And Multi-beam Exposure Apparatus App 20180130632 - OGASAWARA; Munehiro ; et al.	2018-05-10
Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method Grant 9,916,962 - Nishimura , et al. March 13, 2	2018-03-13
Aperture For Inspecting Multi Beam, Beam Inspection Apparatus For Multi Beam, And Multi Charged Particle Beam Writing Apparatus App 20180040455 - Yamashita; Hiroshi ; et al.	2018-02-08
Inspection apparatus and inspection method Grant 9,859,096 - Ogasawara January 2, 2	2018-01-02
Blanking Device For Multi Charged Particle Beams, And Multi Charged Particle Beam Irradiation Apparatus App 20170345612 - TOUYA; Takanao ; et al.	2017-11-30
Multi Charged Particle Beam Irradiation Apparatus, Multi Charged Particle Beam Irradiation Method, And Multi Charged Particle Beam Adjustment Method App 20170309440 - NISHIMURA; Shinsuke ; et al.	2017-10-26
Data generating apparatus, energy beam writing apparatus, and energy beam writing method Grant 9,748,074 - Ogasawara August 29, 2	2017-08-29
Inspection Apparatus And Inspection Method App 20170243716 - OGASAWARA; Munehiro	2017-08-24
Inspection Apparatus And Inspection Method App 20170243715 - OGASAWARA; Munehiro	2017-08-24
Multi charged particle beam writing method, and multi charged particle beam writing apparatus Grant 9,691,585 - Matsumoto , et al. June 27, 2	2017-06-27
Multiple Charged Particle Beam Apparatus App 20170178862 - OGASAWARA; Munehiro	2017-06-22
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20170098524 - MATSUMOTO; Hiroshi ; et al.	2017-04-06
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 9,570,267 - Matsumoto , et al. February 14, 2	2017-02-14
Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams Grant 9,530,610 - Chiba , et al. December 27, 2	2016-12-27
Charged Particle Beam Lithography Method And Charged Particle Beam Lithography Apparatus App 20160365226 - OGASAWARA; Munehiro	2016-12-15
Blanking Aperture Array Device For Multi-beams, And Fabrication Method Of Blanking Aperture Array Device For Multi-beams App 20160155600 - CHIBA; Kazuhiro ; et al.	2016-06-02
Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table Grant 9,343,266 - Ogasawara , et al. May 17, 2	2016-05-17
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 9,343,268 - Yoshikawa , et al. May 17, 2	2016-05-17
Multi charged particle beam writing apparatus Grant 9,299,535 - Ogasawara March 29, 2	2016-03-29
Data Generating Apparatus, Energy Beam Writing Apparatus, And Energy Beam Writing Method App 20160071692 - OGASAWARA; Munehiro	2016-03-10
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20160042908 - MATSUMOTO; Hiroshi ; et al.	2016-02-11
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 9,202,673 - Matsumoto , et al. December 1, 2	2015-12-01
Multi Charged Particle Beam Writing Method, And Multi Charged Particle Beam Writing Apparatus App 20150340196 - MATSUMOTO; Hiroshi ; et al.	2015-11-26
Multi Charged Particle Beam Writing Apparatus App 20150255249 - OGASAWARA; Munehiro	2015-09-10
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 9,076,564 - Yoshikawa , et al. July 7, 2	2015-07-07
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20150064934 - YOSHIKAWA; Ryoichi ; et al.	2015-03-05
Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens Grant 8,927,941 - Touya , et al. January 6, 2	2015-01-06
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 8,907,306 - Yoshikawa , et al. December 9, 2	2014-12-09
Charged particle beam writing apparatus Grant 8,884,254 - Touya , et al. November 11, 2	2014-11-11
Multi charged particle beam writing apparatus Grant 8,835,868 - Touya , et al. September 16, 2	2014-09-16
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20140225008 - YOSHIKAWA; Ryoichi ; et al.	2014-08-14
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,791,422 - Touya , et al. July 29, 2	2014-07-29
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20140187056 - YOSHIKAWA; Ryoichi ; et al.	2014-07-03
Charged Particle Beam Writing Apparatus App 20140175303 - TOUYA; Takanao ; et al.	2014-06-26
Multi Charged Particle Beam Writing Apparatus App 20140175302 - TOUYA; Takanao ; et al.	2014-06-26
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 8,741,547 - Yoshikawa , et al. June 3, 2	2014-06-03
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20140124684 - MATSUMOTO; Hiroshi ; et al.	2014-05-08
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 8,710,467 - Yoshikawa , et al. April 29, 2	2014-04-29
Charged Particle Beam Pattern Writing Method And Charged Particle Beam Writing Apparatus App 20140061499 - Ogasawara; Munehiro ; et al.	2014-03-06
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20130320230 - YOSHIKAWA; Ryoichi ; et al.	2013-12-05
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 8,586,951 - Yoshikawa , et al. November 19, 2	2013-11-19
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20130240750 - Touya; Takanao ; et al.	2013-09-19
Multi charged particle beam writing apparatus and multi charged particle beam writing method Grant 8,492,732 - Ogasawara July 23, 2	2013-07-23
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20130157198 - YOSHIKAWA; Ryoichi ; et al.	2013-06-20
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130149646 - TOUYA; Takanao ; et al.	2013-06-13
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20130082187 - OGASAWARA; Munehiro	2013-04-04
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20130056645 - Yoshikawa; Ryoichi ; et al.	2013-03-07
Multi Charged Particle Beam Writing Apparatus And Multi Charged Particle Beam Writing Method App 20130056647 - YOSHIKAWA; Ryoichi ; et al.	2013-03-07
Electron beam irradiation apparatus and electron beam drawing apparatus Grant 8,362,427 - Nishimura , et al. January 29, 2	2013-01-29
Electron Beam Irradiation Apparatus And Electron Beam Drawing Apparatus App 20120235054 - Nishimura; Shinsuke ; et al.	2012-09-20
Manufacturing Method Of Master Disk For Patterned Medium And Magnetic Recording Disk Manufacturing Method App 20120118853 - OGASAWARA; Munehiro ; et al.	2012-05-17
Charged beam drawing apparatus Grant 7,692,158 - Ogasawara April 6, 2	2010-04-06
Defect inspecting apparatus Grant 7,508,526 - Ogawa , et al. March 24, 2	2009-03-24
Electron Beam Drawing Apparatus App 20080231192 - Ogasawara; Munehiro	2008-09-25
Pattern writing and forming method Grant 7,388,216 - Ogasawara June 17, 2	2008-06-17
Electron beam irradiating apparatus and irradiating method Grant 7,326,943 - Ogasawara February 5, 2	2008-02-05
Charged beam drawing apparatus App 20070228297 - Ogasawara; Munehiro	2007-10-04
Pattern Writing And Forming Method App 20070228293 - OGASAWARA; Munehiro	2007-10-04
Pattern writing and forming method Grant 7,270,921 - Ogasawara September 18, 2	2007-09-18
Charged beam writing method and writing tool Grant 7,122,809 - Ogasawara October 17, 2	2006-10-17
Electron beam irradiating apparatus and irradiating method App 20060192148 - Ogasawara; Munehiro	2006-08-31
Defect inspecting apparatus App 20060082782 - Ogawa; Riki ; et al.	2006-04-20
Charged-particle beam writer Grant 7,002,167 - Ogasawara February 21, 2	2006-02-21
Charged beam writing method and writing tool App 20050133739 - Ogasawara, Munehiro	2005-06-23
Optical system adjusting method for energy beam apparatus Grant 6,836,319 - Ogasawara , et al. December 28, 2	2004-12-28
Optical system adjusting method for energy beam apparatus App 20040190006 - Ogasawara, Munehiro ; et al.	2004-09-30
Charged-particle beam writer App 20040089822 - Ogasawara, Munehiro	2004-05-13
Charged particle beam exposing apparatus Grant 6,642,675 - Ogasawara November 4, 2	2003-11-04
Charged particle beam system and chamber of charged particle beam system Grant 6,617,592 - Takamatsu , et al. September 9, 2	2003-09-09
Pattern writing and forming method App 20030151003 - Ogasawara, Munehiro	2003-08-14
Optical system adjusting method for energy beam apparatus Grant 6,606,149 - Ogasawara , et al. August 12, 2	2003-08-12
Charged particle beam exposing apparatus App 20020140383 - Ogasawara, Munehiro	2002-10-03
Charged particle beam system and chamber of charged particle beam system App 20010025931 - Takamatsu, Jun ; et al.	2001-10-04
Charged particle beam irradiation apparatus Grant 6,172,364 - Ogasawara , et al. January 9, 2	2001-01-09
Pattern transfer mask, mask inspection method and a mask inspection apparatus Grant 5,923,034 - Ogasawara , et al. July 13, 1	1999-07-13
Method for correcting astigmatism and focusing in charged particle optical lens-barrel Grant 5,793,041 - Ogasawara , et al. August 11, 1	1998-08-11
Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus Grant 5,539,211 - Ohtoshi , et al. July 23, 1	1996-07-23
Synchrotron-type accelerator with rod-shaped damping antenna Grant 4,794,340 - Ogasawara December 27, 1	1988-12-27