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OGASAWARA; Kosuke Patent Filings

OGASAWARA; Kosuke

Patent Applications and Registrations

Patent applications and USPTO patent grants for OGASAWARA; Kosuke.The latest application filed is for "plasma processing method and plasma processing apparatus".

Company Profile
3.11.18
  • OGASAWARA; Kosuke - Miyagi JP
  • OGASAWARA; Kosuke - Tokyo JP
  • Ogasawara; Kosuke - Kurokawa-gun JP
  • Ogasawara; Kosuke - Portland OR
  • Ogasawara; Kosuke - Nirasaki JP
  • Ogasawara; Kosuke - Sendai JP
  • OGASAWARA; Kosuke - Sendai City JP
  • OGASAWARA; Kosuke - Nirasaki-shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Plasma Processing Method And Plasma Processing Apparatus
App 20220301824 - OGASAWARA; Kosuke ;   et al.
2022-09-22
Method of etching film and plasma processing apparatus
Grant 11,404,282 - Ogasawara , et al. August 2, 2
2022-08-02
Reagent Management Method
App 20220221478 - KAWABE; Toshiki ;   et al.
2022-07-14
Piercing Condition Selection Method
App 20220221479 - KAWABE; Toshiki ;   et al.
2022-07-14
Plasma processing method and plasma processing apparatus
Grant 11,367,590 - Ogasawara , et al. June 21, 2
2022-06-21
Processing Apparatus And Processing Method
App 20220148890 - SAWACHI; Atsushi ;   et al.
2022-05-12
Plasma Etching Method And Plasma Processing Apparatus
App 20210313148 - OGASAWARA; Kosuke ;   et al.
2021-10-07
Plasma Processing Method And Plasma Processing Apparatus
App 20210020409 - OGASAWARA; Kosuke ;   et al.
2021-01-21
Method Of Etching Film And Plasma Processing Apparatus
App 20200303203 - Ogasawara; Kosuke ;   et al.
2020-09-24
Plasma Etching Method And Plasma Processing Apparatus
App 20190326092 - OGASAWARA; Kosuke ;   et al.
2019-10-24
Method for controlling etching in pitch doubling
Grant 9,564,342 - Ogasawara February 7, 2
2017-02-07
Method For Controlling Etching In Pitch Doubling
App 20160093501 - Ogasawara; Kosuke
2016-03-31
Particle beam irradiation system and operating method
Grant 9,199,095 - Ogasawara , et al. December 1, 2
2015-12-01
Sidewall image transfer method for low aspect ratio patterns
Grant 8,980,111 - Ko , et al. March 17, 2
2015-03-17
Particle Beam Irradiation System And Operating Method
App 20150060703 - OGASAWARA; Kosuke ;   et al.
2015-03-05
Sidewall Image Transfer Method For Low Aspect Ratio Patterns
App 20130306598 - KO; AKITERU ;   et al.
2013-11-21
Plasma processing apparatus for performing accurate end point detection
Grant 8,580,077 - Ogasawara , et al. November 12, 2
2013-11-12
Substrate processing method
Grant 8,232,207 - Ogasawara , et al. July 31, 2
2012-07-31
Etching method, etching apparatus and storage medium
Grant 8,187,980 - Ogasawara May 29, 2
2012-05-29
Plasma processing method and post-processing method
Grant 7,871,532 - Shimizu , et al. January 18, 2
2011-01-18
Substrate Processing Method
App 20100167549 - OGASAWARA; Kosuke ;   et al.
2010-07-01
Plasma Processing Apparatus For Performing Accurate End Point Detection
App 20100089532 - OGASAWARA; Kosuke ;   et al.
2010-04-15
Plasma processing method and plasma processing apparatus for performing accurate end point detection
Grant 7,662,646 - Ogasawara , et al. February 16, 2
2010-02-16
Plasma Processing Apparatus, Cleaning Method Thereof, Control Program And Computer Storage Medium
App 20080216957 - Ogasawara; Kosuke ;   et al.
2008-09-11
Etching Method, Etching Apparatus And Storage Medium
App 20080188086 - OGASAWARA; Kosuke
2008-08-07
Plasma Processing Method And Plasma Processing Apparatus
App 20080070327 - OGASAWARA; Kosuke ;   et al.
2008-03-20
Method and apparatus for manufacturing a semiconductor device, control program and computer-readable storage medium
App 20070102399 - Ogasawara; Kosuke
2007-05-10
Plasma processing method and post-processing method
App 20060191877 - Shimizu; Akitaka ;   et al.
2006-08-31

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