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Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece Grant 6,547,937 - Oberlitner , et al. April 15, 2 | 2003-04-15 |
Methods and apparatus for processing the surface of a microelectronic workpiece App 20020108851 - Woodruff, Daniel J. ;   et al. | 2002-08-15 |
Methods and apparatus for processing the surface of a microelectronic workpiece App 20020053510 - Woodruff, Daniel J. ;   et al. | 2002-05-09 |
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