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Patent applications and USPTO patent grants for Obaru; Takanori.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
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Substrate Processing Apparatus And Substrate Processing Method App 20210398827 - Mouri; Nobuhiko ;   et al. | 2021-12-23 |
Substrate processing apparatus and substrate processing method Grant 11,139,182 - Mouri , et al. October 5, 2 | 2021-10-05 |
Substrate processing apparatus, substrate processing method and recording medium Grant 11,084,072 - Fukui , et al. August 10, 2 | 2021-08-10 |
Substrate Processing Apparatus And Substrate Processing Method App 20210159097 - OBARU; Takanori | 2021-05-27 |
Substrate Processing Apparatus And Substrate Processing Method App 20190181022 - Mouri; Nobuhiko ;   et al. | 2019-06-13 |
Substrate Processing Apparatus, Substrate Processing Method And Recording Medium App 20180200764 - Fukui; Shogo ;   et al. | 2018-07-19 |
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