O'Loughlin; Jennifer

Patent Applications and Registrations

Patent applications and USPTO patent grants for O'Loughlin; Jennifer.The latest application filed is for "systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition".

Company Profile

1.15.16

O'Loughlin; Jennifer - Portland OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition Grant 10,323,323 - Chandrasekharan , et al.	2019-06-18
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition App 20170175269 - Chandrasekharan; Ramesh ; et al.	2017-06-22
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition Grant 9,631,276 - Chandrasekharan , et al. April 25, 2	2017-04-25
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition App 20170016115 - Chandrasekharan; Ramesh ; et al.	2017-01-19
Method and apparatus for purging and plasma suppression in a process chamber Grant 9,399,228 - Breiling , et al. July 26, 2	2016-07-26
In-situ deposition of film stacks Grant 9,028,924 - Haverkamp , et al. May 12, 2	2015-05-12
Method And Apparatus For Purging And Plasma Suppression In A Process Chamber App 20140217193 - Breiling; Patrick ; et al.	2014-08-07
In-situ deposition of film stacks Grant 8,741,394 - Haverkamp , et al. June 3, 2	2014-06-03
Smooth silicon-containing films Grant 8,709,551 - Fox , et al. April 29, 2	2014-04-29
In-situ Deposition Of Film Stacks App 20130171834 - Haverkamp; Jason ; et al.	2013-07-04
Silicon Nitride Films For Semiconductor Device Applications App 20130157466 - Fox; Keith ; et al.	2013-06-20
Interfacial capping layers for interconnects Grant 8,268,722 - Yu , et al. September 18, 2	2012-09-18
Remote plasma processing of interface surfaces Grant 8,217,513 - Antonelli , et al. July 10, 2	2012-07-10
Pecvd Deposition Of Smooth Polysilicon Films App 20120142172 - FOX; Keith ; et al.	2012-06-07
Remote plasma processing of interface surfaces Grant 8,084,339 - Antonelli , et al. December 27, 2	2011-12-27
Smooth Silicon-Containing Films App 20110236600 - Fox; Keith ; et al.	2011-09-29
In-Situ Deposition of Film Stacks App 20110236594 - Haverkamp; Jason ; et al.	2011-09-29
Remote Plasma Processing Of Interface Surfaces App 20110120377 - Antonelli; George Andrew ; et al.	2011-05-26
Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,858,510 - Banerji , et al. December 28, 2	2010-12-28
Remote Plasma Processing Of Interface Surfaces App 20100317178 - Antonelli; George Andrew ; et al.	2010-12-16
Remote Plasma Processing Of Interface Surfaces App 20100317198 - Antonelli; George Andrew ; et al.	2010-12-16
Interfacial Capping Layers For Interconnects App 20100308463 - Yu; Jengyi ; et al.	2010-12-09
Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,648,899 - Banerji , et al. January 19, 2	2010-01-19
Ambient gas treatment of porous dielectric Grant 7,223,705 - Sriram , et al. May 29, 2	2007-05-29
Ambient gas treatment of porous dielectric App 20040224536 - Sriram, Mandyam A. ; et al.	2004-11-11
Adhesion between dielectric materials App 20040101667 - O'Loughlin, Jennifer ; et al.	2004-05-27
Adhesion between dielectric materials Grant 6,713,873 - O'Loughlin , et al. March 30, 2	2004-03-30

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