| Patent | Date |
|---|
Semiconductor device and method of manufacturing thereof
Grant 11,358,858 - Rahafrooz , et al. June 14, 2 | 2022-06-14 |
Sensing Device
App 20220128359 - PAL; Sagnik ; et al. | 2022-04-28 |
Through silicon via (TSV) formation in integrated circuits
Grant 11,097,942 - Nunan , et al. August 24, 2 | 2021-08-24 |
Semiconductor Device And Method Of Manufacturing Thereof
App 20210229978 - RAHAFROOZ; Amir ; et al. | 2021-07-29 |
Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry
Grant 10,081,535 - Chen , et al. September 25, 2 | 2018-09-25 |
Through Silicon Via (tsv) Formation In Integrated Circuits
App 20180111823 - Nunan; Thomas Kieran ; et al. | 2018-04-26 |
Method of fabricating piezoelectric MEMS devices
Grant 9,917,243 - Nunan , et al. March 13, 2 | 2018-03-13 |
MEMs device with outgassing shield
Grant 9,764,946 - Chen , et al. September 19, 2 | 2017-09-19 |
Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
Grant 9,556,017 - Chen , et al. January 31, 2 | 2017-01-31 |
Apparatus and method of forming a MEMS device with etch channels
Grant 9,446,948 - Nunan September 20, 2 | 2016-09-20 |
Apparatus and Method of Forming a MEMS Device with Etch Channels
App 20160251214 - Nunan; Thomas Kieran | 2016-09-01 |
Method of Fabricating Piezoelectric MEMS Devices
App 20160111625 - Nunan; Thomas Kieran ; et al. | 2016-04-21 |
Microchip with blocking apparatus
Grant 9,242,856 - Chen , et al. January 26, 2 | 2016-01-26 |
Apparatus and method for forming alignment features for back side processing of a wafer
Grant 9,105,644 - Tsau , et al. August 11, 2 | 2015-08-11 |
MEMS Device with Outgassing Shield
App 20150115376 - Chen; Li ; et al. | 2015-04-30 |
Apparatus and Method for Forming Alignment Features for Back Side Processing of a Wafer
App 20150028499 - Tsau; Christine H. ; et al. | 2015-01-29 |
Apparatus and Method for Preventing Stiction of MEMS Devices Encapsulated by Active Circuitry
App 20140374856 - Chen; Li ; et al. | 2014-12-25 |
Apparatus and Method for Shielding and Biasing in MEMS Devices Encapsulated by Active Circuitry
App 20140374850 - Chen; Li ; et al. | 2014-12-25 |
Microchip with Blocking Apparatus and Method of Fabricating Microchip
App 20140203422 - Chen; Li ; et al. | 2014-07-24 |
Microchip with blocking apparatus and method of fabricating microchip
Grant 8,749,036 - Chen , et al. June 10, 2 | 2014-06-10 |
Microchip With Blocking Apparatus And Method Of Fabricating Microchip
App 20140131850 - Chen; Li ; et al. | 2014-05-15 |
Method of bonding wafers
Grant 8,507,913 - Nunan , et al. August 13, 2 | 2013-08-13 |
Reduced stiction MEMS device with exposed silicon carbide
Grant 8,507,306 - Chen , et al. August 13, 2 | 2013-08-13 |
MEMS device with roughened surface and method of producing the same
Grant 8,389,314 - Martin , et al. March 5, 2 | 2013-03-05 |
Single crystal silicon sensor with additional layer and method of producing the same
Grant 8,227,286 - Nunan , et al. July 24, 2 | 2012-07-24 |
Single crystal silicon sensor with additional layer and method of producing the same
Grant 8,227,876 - Nunan , et al. July 24, 2 | 2012-07-24 |
Method of Bonding Wafers
App 20120074417 - Nunan; Thomas Kieran ; et al. | 2012-03-29 |
Micromachined microphone and multisensor and method for producing same
Grant 8,129,803 - Martin , et al. March 6, 2 | 2012-03-06 |
Single Crystal Silicon Sensor with Additional Layer and Method of Producing the Same
App 20110095384 - Nunan; Thomas Kieran ; et al. | 2011-04-28 |
Reduced Stiction MEMS Device with Exposed Silicon Carbide
App 20110073859 - Chen; Li ; et al. | 2011-03-31 |
Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication
App 20100320548 - Tsau; Christine H. ; et al. | 2010-12-23 |
Micromachined microphone and multisensor and method for producing same
App 20100285628 - Martin; John R. ; et al. | 2010-11-11 |
Micromachined microphone and multisensor and method for producing same
Grant 7,825,484 - Martin , et al. November 2, 2 | 2010-11-02 |
Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications
Grant 7,754,617 - Nunan July 13, 2 | 2010-07-13 |
Polysilicon Deposition and Anneal Process Enabling Thick Polysilicon Films for MEMS Applications
App 20090042372 - Nunan; Thomas Kieran | 2009-02-12 |
MEMS Device with Roughened Surface and Method of Producing the Same
App 20080081391 - Martin; John R. ; et al. | 2008-04-03 |
Single crystal silicon sensor with additional layer and method of producing the same
Grant 7,138,694 - Nunan , et al. November 21, 2 | 2006-11-21 |
Micromachined microphone and multisensor and method for producing same
App 20060237806 - Martin; John R. ; et al. | 2006-10-26 |
Single crystal silicon sensor with additional layer and method of producing the same
App 20060214248 - Nunan; Thomas Kieran ; et al. | 2006-09-28 |
Method of forming a MEMS device
App 20060148133 - Nunan; Thomas Kieran ; et al. | 2006-07-06 |
Single crystal silicon sensor with additional layer and method of producing the same
App 20050196933 - Nunan, Thomas Kieran ; et al. | 2005-09-08 |
MEMS device with conductive path through substrate
Grant 6,936,918 - Harney , et al. August 30, 2 | 2005-08-30 |
Mems Device With Conductive Path Through Substrate
App 20050127499 - Harney, Kieran P. ; et al. | 2005-06-16 |
| 