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Patent applications and USPTO patent grants for Numata; Takayuki.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
---|---|
Substrate processing apparatus and substrate processing method Grant 10,294,566 - Fujikura , et al. | 2019-05-21 |
Substrate Processing Apparatus And Substrate Processing Method App 20180073139 - FUJIKURA; Hajime ;   et al. | 2018-03-15 |
Substrate Processing Apparatus And Substrate Processing Method App 20170260630 - FUJIKURA; Hajime ;   et al. | 2017-09-14 |
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method App 20170130336 - FUJIKURA; Hajime ;   et al. | 2017-05-11 |
Method and structure for preventive maintaining an elongated metal hollow member Grant 5,227,124 - Saito , et al. July 13, 1 | 1993-07-13 |
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