Nozoe; Mari

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nozoe; Mari.The latest application filed is for "charged particle beam applied apparatus, and irradiation method".

Company Profile

0.68.70

Nozoe; Mari - Hino N/A JP
Nozoe; Mari - Ome JP
Nozoe; Mari - Ome-shi JP
Nozoe; Mari - Oume JP
Nozoe; Mari - Oume-shi JP
Nozoe, Mari - Hino-shi JP
NOZOE, MARI - TOKYO JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Charged particle beam applied apparatus, and irradiation method Grant 8,907,278 - Enyama , et al. December 9, 2	2014-12-09
Charged Particle Beam Applied Apparatus, And Irradiation Method App 20130299697 - Enyama; Momoyo ; et al.	2013-11-14
Method of inspecting pattern and inspecting instrument Grant 8,558,173 - Nozoe , et al. October 15, 2	2013-10-15
Charged particle beam device and sample observation method Grant 8,552,373 - Enyama , et al. October 8, 2	2013-10-08
Pattern check device and pattern check method Grant 8,421,008 - Nozoe , et al. April 16, 2	2013-04-16
Circuit Pattern Inspection Apparatus And Circuit Pattern Inspection Method App 20130082177 - Hiroi; Takashi ; et al.	2013-04-04
Charged Particle Beam Device And Sample Observation Method App 20120061565 - Enyama; Momoyo ; et al.	2012-03-15
Pattern Check Device And Pattern Check Method App 20110278452 - Nozoe; Mari ; et al.	2011-11-17
Pattern Inspection Device And Method App 20110133066 - Nozoe; Mari ; et al.	2011-06-09
Method and apparatus for inspecting integrated circuit pattern Grant 7,952,074 - Shinada , et al. May 31, 2	2011-05-31
Method of inspecting pattern and inspecting instrument Grant 7,876,113 - Nozoe , et al. January 25, 2	2011-01-25
Inspection Method And Inspection System Using Charged Particle Beam App 20090194690 - Nishiyama; Hidetoshi ; et al.	2009-08-06
Inspection Method And Inspection System Using Charged Particle Beam App 20090189075 - Nishiyama; Hidetoshi ; et al.	2009-07-30
Inspection method and inspection system using charged particle beam Grant 7,526,747 - Nishiyama , et al. April 28, 2	2009-04-28
Inspection method and inspection system using charged particle beam Grant 7,521,679 - Nishiyama , et al. April 21, 2	2009-04-21
Method And Apparatus For Inspecting Integrated Circuit Pattern App 20080302964 - Shinada; Hiroyuki ; et al.	2008-12-11
Method and apparatus for inspecting integrated circuit pattern Grant 7,417,444 - Shinada , et al. August 26, 2	2008-08-26
Method of inspecting a circuit pattern and inspecting instrument Grant 7,397,031 - Shinada , et al. July 8, 2	2008-07-08
Method and apparatus for inspecting patterns Grant 7,394,070 - Nozoe , et al. July 1, 2	2008-07-01
Method of inspecting pattern and inspecting instrument App 20080122462 - Nozoe; Mari	2008-05-29
Method of inspecting pattern and inspecting instrument Grant 7,375,538 - Nozoe May 20, 2	2008-05-20
Inspection method and apparatus using charged particle beam Grant 7,276,693 - Koyama , et al. October 2, 2	2007-10-02
Inspection method and inspection apparatus using electron beam Grant 7,271,385 - Gunji , et al. September 18, 2	2007-09-18
Method and system for inspecting a pattern Grant 7,260,256 - Hiroi , et al. August 21, 2	2007-08-21
Patterned wafer inspection method and apparatus therefor Grant 7,242,015 - Shinada , et al. July 10, 2	2007-07-10
Inspection method and inspection system using charged particle beam App 20070138390 - Nishiyama; Hidetoshi ; et al.	2007-06-21
Inspection method and apparatus for circuit pattern Grant 7,218,126 - Cheng , et al. May 15, 2	2007-05-15
Inspection method and inspection system using charged particle beam Grant 7,211,797 - Nishiyama , et al. May 1, 2	2007-05-01
Method of inspecting pattern and inspecting instrument App 20070023658 - Nozoe; Mari ; et al.	2007-02-01
Method of inspecting a circuit pattern and inspecting instrument App 20060243908 - Shinada; Hiroyuki ; et al.	2006-11-02
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 7,122,796 - Hiroi , et al. October 17, 2	2006-10-17
Method and apparatus for inspecting a semiconductor device Grant 7,116,817 - Tanaka , et al. October 3, 2	2006-10-03
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen Grant 7,116,816 - Tanaka , et al. October 3, 2	2006-10-03
Method of inspecting pattern and inspecting instrument Grant 7,112,791 - Nozoe , et al. September 26, 2	2006-09-26
Method of inspecting a circuit pattern and inspecting instrument Grant 7,098,455 - Shinada , et al. August 29, 2	2006-08-29
Inspection method and apparatus using charged particle beam App 20060163480 - Koyama; Hikaru ; et al.	2006-07-27
Method and apparatus for inspecting patterns App 20060163477 - Nozoe; Mari ; et al.	2006-07-27
Inspection method and inspection apparatus using electron beam App 20060076490 - Gunji; Yasuhiro ; et al.	2006-04-13
Method and apparatus for inspecting integrated circuit pattern Grant 7,026,830 - Shinada , et al. April 11, 2	2006-04-11
Inspection method and apparatus using charged particle beam Grant 7,019,294 - Koyama , et al. March 28, 2	2006-03-28
Method and apparatus for inspecting integrated circuit pattern App 20060043982 - Shinada; Hiroyuki ; et al.	2006-03-02
Inspection method and apparatus for circuit pattern App 20060028218 - Cheng; Zhaohui ; et al.	2006-02-09
Evaluation method and manufacturing method of semiconductor device App 20060022295 - Takafuji; Atsuko ; et al.	2006-02-02
Method and apparatus for inspecting a semiconductor device App 20060018532 - Tanaka; Maki ; et al.	2006-01-26
Patterned wafer inspection method and apparatus therefor App 20060017014 - Shinada; Hiroyuki ; et al.	2006-01-26
Patterned wafer inspection method and apparatus therefor Grant 6,979,823 - Shinada , et al. December 27, 2	2005-12-27
Circuit pattern inspection method and apparatus Grant 6,975,754 - Hiroi , et al. December 13, 2	2005-12-13
Method of inspecting pattern and inspecting instrument App 20050250224 - Nozoe, Mari	2005-11-10
Inspection method and inspection system using charged particle beam App 20050236648 - Nishiyama, Hidetoshi ; et al.	2005-10-27
Inspection method and inspection system using charged particle beam App 20050218325 - Nishiyama, Hidetoshi ; et al.	2005-10-06
Inspection method and apparatus for circuit pattern of resist material Grant 6,952,105 - Cheng , et al. October 4, 2	2005-10-04
Method and apparatus for inspecting a semiconductor device Grant 6,952,492 - Tanaka , et al. October 4, 2	2005-10-04
Inspection method and apparatus using charged particle beam App 20050190310 - Koyama, Hikaru ; et al.	2005-09-01
Inspection method and inspection system using charged particle beam Grant 6,931,620 - Nishiyama , et al. August 16, 2	2005-08-16
Method of inspecting pattern and inspecting instrument Grant 6,924,482 - Nozoe , et al. August 2, 2	2005-08-02
Inspection method, apparatus and system for circuit pattern Grant 6,919,564 - Nara , et al. July 19, 2	2005-07-19
Inspection method, apparatus and system for circuit pattern Grant 6,903,821 - Nara , et al. June 7, 2	2005-06-07
Circuit pattern inspection method and apparatus Grant 6,898,305 - Hiroi , et al. May 24, 2	2005-05-24
Inspection method and apparatus for circuit pattern of resist material App 20050099189 - Cheng, Zhaohui ; et al.	2005-05-12
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20050082476 - Hiroi, Takashi ; et al.	2005-04-21
Inspection method and inspection apparatus using electron beam App 20050040331 - Gunji, Yasuhiro ; et al.	2005-02-24
Inspection method of semiconductor device and inspection system Grant 6,859,060 - Neo , et al. February 22, 2	2005-02-22
Wafer inspection method of charging wafer with a charged particle beam then measuring electric properties thereof, and inspection device based thereon Grant 6,853,204 - Nishiyama , et al. February 8, 2	2005-02-08
Method of inspecting pattern and inspecting instrument App 20050006583 - Nozoe, Mari ; et al.	2005-01-13
Method and apparatus for charged particle beam microscopy Grant 6,838,667 - Tsuneta , et al. January 4, 2	2005-01-04
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,828,554 - Hiroi , et al. December 7, 2	2004-12-07
Patterned wafer inspection method and apparatus therefor App 20040222377 - Shinada, Hiroyuki ; et al.	2004-11-11
Patterned wafer inspection method and apparatus therefor Grant 6,797,954 - Shinada , et al. September 28, 2	2004-09-28
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20040164244 - Hiroi, Takashi ; et al.	2004-08-26
Method of inspecting pattern and inspecting instrument Grant 6,777,677 - Nozoe , et al. August 17, 2	2004-08-17
Inspection method, apparatus and system for circuit pattern Grant 6,759,655 - Nara , et al. July 6, 2	2004-07-06
Process management system Grant 6,757,621 - Mizuno , et al. June 29, 2	2004-06-29
Inspection system and inspection process for wafer with circuit using charged-particle beam Grant 6,753,524 - Matsui , et al. June 22, 2	2004-06-22
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,717,142 - Hiroi , et al. April 6, 2	2004-04-06
Method of inspecting circuit pattern and inspecting instrument Grant 6,703,850 - Nozoe , et al. March 9, 2	2004-03-09
Wafer inspection system and wafer inspection process using charged particle beam Grant 6,700,122 - Matsui , et al. March 2, 2	2004-03-02
Inspection method and inspection apparatus using electron beam App 20040026633 - Gunji, Yasuhiro ; et al.	2004-02-12
Pattern inspecting system and pattern inspecting method Grant 6,661,507 - Yoda , et al. December 9, 2	2003-12-09
Method of inspecting pattern and inspecting instrument App 20030213909 - Nozoe, Mari ; et al.	2003-11-20
Method of inspecting circuit pattern and inspecting instrument App 20030206027 - Nozoe, Mari ; et al.	2003-11-06
Inspection method and inspection system using charged particle beam App 20030204826 - Nishiyama, Hidetoshi ; et al.	2003-10-30
Method of inspecting a circuit pattern and inspecting instrument App 20030201391 - Shinada, Hiroyuki ; et al.	2003-10-30
Method of inspecting pattern and inspecting instrument App 20030179007 - Nozoe, Mari ; et al.	2003-09-25
Method and apparatus for inspecting integrated circuit pattern App 20030169060 - Shinada, Hiroyuki ; et al.	2003-09-11
Inspection method and inspection system using charged particle beam Grant 6,618,850 - Nishiyama , et al. September 9, 2	2003-09-09
Patterned wafer inspection method and apparatus therefor App 20030164460 - Shinada, Hiroyuki ; et al.	2003-09-04
Method of fabricating a semiconductor device Grant 6,613,593 - Tanaka , et al. September 2, 2	2003-09-02
Process management system App 20030130806 - Mizuno, Fumio ; et al.	2003-07-10
Method of inspecting circuit pattern and inspecting instrument Grant 6,583,634 - Nozoe , et al. June 24, 2	2003-06-24
Method of inspecting a circuit pattern and inspecting instrument Grant 6,583,413 - Shinada , et al. June 24, 2	2003-06-24
Method of inspecting pattern and inspecting instrument Grant 6,583,414 - Nozoe , et al. June 24, 2	2003-06-24
Inspection system and inspection process for wafer with circuit using charged-particle beam App 20030094572 - Matsui, Miyako ; et al.	2003-05-22
Inspection method of semiconductor device and inspection system App 20030071646 - Neo, Yoichiro ; et al.	2003-04-17
Process control system Grant 6,542,830 - Mizuno , et al. April 1, 2	2003-04-01
Inspection method using a charged particle beam and inspection device based thereon App 20030057971 - Nishiyama, Hidetoshi ; et al.	2003-03-27
Inspection method, apparatus and system for circuit pattern App 20030058444 - Nara, Yasuhiko ; et al.	2003-03-27
Inspection method, apparatus and system for circuit pattern Grant 6,504,609 - Nara , et al. January 7, 2	2003-01-07
Method and apparatus for inspecting a semiconductor device App 20020195574 - Tanaka, Maki ; et al.	2002-12-26
Method and apparatus for inspecting a semiconductor device App 20020197750 - Tanaka, Maki ; et al.	2002-12-26
Inspection method, apparatus and system for circuit pattern Grant 6,493,082 - Nara , et al. December 10, 2	2002-12-10
Inspection method, apparatus and system for circuit pattern Grant 6,480,279 - Nara , et al. November 12, 2	2002-11-12
Wafer inspection system and wafer inspection process using charged particle beam App 20020134936 - Matsui, Miyako ; et al.	2002-09-26
Patterned Wafer Inspection Method And Apparatus Therefor App 20020117635 - SHINADA, HIROYUKI ; et al.	2002-08-29
Inspection method, apparatus and system for circuit pattern App 20020113967 - Nara, Yasuhiko ; et al.	2002-08-22
Circuit pattern inspection method and apparatus App 20020114506 - Hiroi, Takashi ; et al.	2002-08-22
Inspection method, apparatus and system for circuit pattern App 20020109088 - Nara, Yasuhiko ; et al.	2002-08-15
Inspection method, apparatus and system for circuit pattern App 20020105648 - Nara, Yasuhiko ; et al.	2002-08-08
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20020100872 - Hiroi, Takashi ; et al.	2002-08-01
Method and system for inspecting a pattern App 20020094120 - Hiroi, Takashi ; et al.	2002-07-18
Inspection method, apparatus and system for circuit pattern Grant 6,421,122 - Nara , et al. July 16, 2	2002-07-16
Pattern inspecting system and pattern inspecting method App 20020080347 - Yoda, Haruo ; et al.	2002-06-27
Method and apparatus for charged particle beam microscopy App 20020056808 - Tsuneta, Ruriko ; et al.	2002-05-16
Circuit pattern inspection method and apparatus App 20020051565 - Hiroi, Takashi ; et al.	2002-05-02
Method of inspecting a pattern on a substrate Grant 6,376,854 - Shishido , et al. April 23, 2	2002-04-23
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,373,054 - Hiroi , et al. April 16, 2	2002-04-16
Method and apparatus for inspecting integrated circuit pattern App 20020027440 - Shinada, Hiroyuki ; et al.	2002-03-07
Method of inspecting pattern and inspecting instrument App 20010052781 - Nozoe, Mari ; et al.	2001-12-20
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen App 20010033683 - Tanaka, Maki ; et al.	2001-10-25
Method of inspecting pattern and apparatus thereof App 20010030300 - Shishido, Chie ; et al.	2001-10-18
Inspection method, apparatus and system for circuit pattern App 20010021019 - Nara, Yasuhiko ; et al.	2001-09-13
Inspection method, apparatus and system for circuit pattern App 20010019411 - Nara, Yasuhiko ; et al.	2001-09-06
Method of inspecting pattern and inspecting instrument App 20010017878 - Nozoe, Mari ; et al.	2001-08-30
Inspection method and inspection system using charged particle beam App 20010016938 - Nishiyama, Hidetoshi ; et al.	2001-08-23
Inspection method, apparatus and system for circuit pattern App 20010015805 - Nara, Yasuhiko ; et al.	2001-08-23
Inspection method, apparatus and system for circuit pattern App 20010011706 - Nara, Yasuhiko ; et al.	2001-08-09
Pattern inspecting system and pattern inspecting method App 20010009461 - Yoda, Haruo ; et al.	2001-07-26
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20010002697 - Hiroi, Takashi ; et al.	2001-06-07
Method of inspecting pattern and apparatus thereof with a differential brightness image detection Grant 6,236,057 - Shishido , et al. May 22, 2	2001-05-22
Method and apparatus for inspecting integrated circuit pattern Grant 6,172,363 - Shinada , et al. January 9, 2	2001-01-09
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,172,365 - Hiroi , et al. January 9, 2	2001-01-09
Method of inspecting pattern and apparatus thereof Grant 6,087,673 - Shishido , et al. July 11, 2	2000-07-11
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 5,986,263 - Hiroi , et al. November 16, 1	1999-11-16

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