| Patent | Date |
|---|
Mask Blank, Phase Shift Mask And Method For Producing Semiconductor Device
App 20220252972 - MAEDA; Hitoshi ; et al. | 2022-08-11 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20220214608 - SHISHIDO; Hiroaki ; et al. | 2022-07-07 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20220179300 - SHISHIDO; Hiroaki ; et al. | 2022-06-09 |
Mask Blank, Method For Manufacturing Reflective Mask, And Method For Manufacturing Semiconductor Device
App 20220163880 - NOZAWA; Osamu ; et al. | 2022-05-26 |
Mask blank, phase shift mask, and method of manufacturing semiconductor device
Grant 11,333,966 - Nozawa , et al. May 17, 2 | 2022-05-17 |
Mask Blank, Phase Shift Mask, Method Of Manufacturing Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20220128898 - MAEDA; Hitoshi ; et al. | 2022-04-28 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20220121104 - MAEDA; Hitoshi ; et al. | 2022-04-21 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,281,089 - Nozawa , et al. March 22, 2 | 2022-03-22 |
Mask Blank, Transfer Mask, And Semiconductor-device Manufacturing Method
App 20220043335 - OHKUBO; Ryo ; et al. | 2022-02-10 |
Mask Blank, Transfer Mask, And Semiconductor-device Manufacturing Method
App 20220035235 - OHKUBO; Ryo ; et al. | 2022-02-03 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 11,231,645 - Shishido , et al. January 25, 2 | 2022-01-25 |
Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device
Grant 11,226,549 - Nozawa , et al. January 18, 2 | 2022-01-18 |
Mask Blank, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20210364909 - NOZAWA; Osamu ; et al. | 2021-11-25 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 11,054,735 - Kajiwara , et al. July 6, 2 | 2021-07-06 |
Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 11,016,382 - Kominato , et al. May 25, 2 | 2021-05-25 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20210149294 - NOZAWA; Osamu ; et al. | 2021-05-20 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10,942,442 - Nozawa , et al. March 9, 2 | 2021-03-09 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,942,441 - Nozawa , et al. March 9, 2 | 2021-03-09 |
Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device
Grant 10,942,440 - Iwashita , et al. March 9, 2 | 2021-03-09 |
Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method
Grant 10,935,881 - Kajiwara , et al. March 2, 2 | 2021-03-02 |
Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,915,016 - Nozawa , et al. February 9, 2 | 2021-02-09 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20210026235 - MAEDA; Hitoshi ; et al. | 2021-01-28 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20200150524 - NOZAWA; Osamu ; et al. | 2020-05-14 |
Mask Blanks, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20200117077 - KOMINATO; Atsushi ; et al. | 2020-04-16 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,606,164 - Nozawa , et al. | 2020-03-31 |
Mask Blank, Phase-shift Mask, And Method Of Manufacturing Semiconductor Device
App 20200064727 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Thereof, And Method For Manufacturing Semiconductor Device
App 20200064726 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20200064725 - NOZAWA; Osamu ; et al. | 2020-02-27 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,571,797 - Nozawa , et al. Feb | 2020-02-25 |
Mask blanks, phase shift mask, and method for manufacturing semiconductor device
Grant 10,551,733 - Kominato , et al. Fe | 2020-02-04 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,551,734 - Shishido , et al. Fe | 2020-02-04 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20200033718 - NOZAWA; Osamu ; et al. | 2020-01-30 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10,539,866 - Nozawa , et al. Ja | 2020-01-21 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,527,931 - Nozawa , et al. J | 2020-01-07 |
Mask blank, phase-shift mask, and method of manufacturing semiconductor device
Grant 10495966 - | 2019-12-03 |
Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device
Grant 10,481,485 - Nozawa , et al. Nov | 2019-11-19 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,481,486 - Nozawa , et al. Nov | 2019-11-19 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,365,556 - Shishido , et al. July 30, 2 | 2019-07-30 |
Mask blank, transfer mask and methods of manufacturing the same
Grant 10,365,555 - Shishido , et al. July 30, 2 | 2019-07-30 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190187550 - Shishido; Hiroaki ; et al. | 2019-06-20 |
Mask Blank, Phase Shift Mask, Method Of Manufacturing Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20190187551 - IWASHITA; Hiroyuki ; et al. | 2019-06-20 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190163047 - KAJIWARA; Takenori ; et al. | 2019-05-30 |
Mask Blank, Phase-shift Mask, And Method Of Manufacturing Semiconductor Device
App 20190146327 - NOZAWA; Osamu ; et al. | 2019-05-16 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,261,409 - Shishido , et al. | 2019-04-16 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190064651 - Shishido; Hiroaki ; et al. | 2019-02-28 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190040516 - OHKUBO; Ryo ; et al. | 2019-02-07 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20190018312 - NOZAWA; Osamu ; et al. | 2019-01-17 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20190004419 - NOZAWA; Osamu ; et al. | 2019-01-03 |
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
Grant 10,146,123 - Shishido , et al. De | 2018-12-04 |
Mask blank, phase shift mask, and method for manufacturing semiconductor device
Grant 10,114,281 - Nozawa , et al. October 30, 2 | 2018-10-30 |
Mask Blank, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180299767 - NOZAWA; Osamu ; et al. | 2018-10-18 |
Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 10,101,650 - Nozawa , et al. October 16, 2 | 2018-10-16 |
Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device
Grant 10,088,744 - Shishido , et al. October 2, 2 | 2018-10-02 |
Mask Blank, Transfer Mask, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device
App 20180259841 - NOZAWA; Osamu ; et al. | 2018-09-13 |
Mask Blank, Phase Shift Mask, Phase Shift Mask Manufacturing Method, And Semiconductor Device Manufacturing Method
App 20180210331 - KAJIWARA; Takenori ; et al. | 2018-07-26 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180149961 - NOZAWA; Osamu ; et al. | 2018-05-31 |
Mask Blank, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180143528 - NOZAWA; Osamu ; et al. | 2018-05-24 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180129130 - SHISHIDO; Hiroaki ; et al. | 2018-05-10 |
Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device
Grant 9,939,723 - Shishido , et al. April 10, 2 | 2018-04-10 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20180052387 - NOZAWA; Osamu ; et al. | 2018-02-22 |
Mask Blanks, Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20180031963 - KOMINATO; Atsushi ; et al. | 2018-02-01 |
Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device
Grant 9,864,268 - Shishido , et al. January 9, 2 | 2018-01-09 |
Mask Blank, Phase Shift Mask, Method For Manufacturing Phase Shift Mask, And Method For Manufacturing Semiconductor Device
App 20170285458 - SHISHIDO; Hiroaki ; et al. | 2017-10-05 |
Mask blank, transfer mask, and method for manufacturing transfer mask
Grant 9,726,972 - Shishido , et al. August 8, 2 | 2017-08-08 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20170168384 - SHISHIDO; Hiroaki ; et al. | 2017-06-15 |
Method of manufacturing mask blank and method of manufacturing transfer mask
Grant 9,664,997 - Kominato , et al. May 30, 2 | 2017-05-30 |
Mask Blank, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20170139316 - SHISHIDO; Hiroaki ; et al. | 2017-05-18 |
Mask blank, transfer mask and method of manufacturing transfer mask
Grant 9,651,859 - Hashimoto , et al. May 16, 2 | 2017-05-16 |
Reflective mask blank, reflective mask and method of manufacturing reflective mask
Grant 9,625,805 - Sakai , et al. April 18, 2 | 2017-04-18 |
Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device
Grant 9,625,807 - Shishido , et al. April 18, 2 | 2017-04-18 |
Mask blank, phase-shift mask, and method for manufacturing the same
Grant 9,625,806 - Nozawa , et al. April 18, 2 | 2017-04-18 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 9,612,527 - Kominato , et al. April 4, 2 | 2017-04-04 |
Mask Blank, Method Of Manufacturing Phase Shift Mask, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20170075210 - SHISHIDO; Hiroaki ; et al. | 2017-03-16 |
Mask Blank, Method Of Manufacturing Phase Shift Mask, Phase Shift Mask, And Method Of Manufacturing Semiconductor Device
App 20170068155 - SHISHIDO; Hiroaki ; et al. | 2017-03-09 |
Phase shift mask blank, method of manufacturing the same, and phase shift mask
Grant 9,436,079 - Nozawa , et al. September 6, 2 | 2016-09-06 |
Mask Blank, Transfer Mask And Methods Of Manufacturing The Same
App 20160202602 - SHISHIDO; Hiroaki ; et al. | 2016-07-14 |
Mask Blank, Transfer Mask, And Method For Manufacturing Transfer Mask
App 20160202603 - SHISHIDO; Hiroaki ; et al. | 2016-07-14 |
Mask Blank, Transfer Mask, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20160187769 - NOZAWA; Osamu ; et al. | 2016-06-30 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 9,372,393 - Kominato , et al. June 21, 2 | 2016-06-21 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 9,354,509 - Sakaya , et al. May 31, 2 | 2016-05-31 |
Mask Blank, Transfer Mask And Method Of Manufacturing Transfer Mask
App 20160041464 - HASHIMOTO; Masahiro ; et al. | 2016-02-11 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 9,256,122 - Kominato , et al. February 9, 2 | 2016-02-09 |
Mask Blank, Phase-shift Mask, And Method For Manufacturing The Same
App 20150338731 - NOZAWA; Osamu ; et al. | 2015-11-26 |
Mask blank, transfer mask and method of manufacturing transfer mask
Grant 9,195,133 - Hashimoto , et al. November 24, 2 | 2015-11-24 |
Method Of Manufacturing Mask Blank And Method Of Manufacturing Transfer Mask
App 20150331311 - KOMINATO; Atsushi ; et al. | 2015-11-19 |
Mask Blank, Transfer Mask, Method Of Manufacturing Mask Blank, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device
App 20150293441 - Shishido; Hiroaki ; et al. | 2015-10-15 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Reflective Mask
App 20150261083 - SAKAI; Kazuya ; et al. | 2015-09-17 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20150227039 - KOMINATO; Atsushi ; et al. | 2015-08-13 |
Reflective mask blank, reflective mask and method of manufacturing reflective mask
Grant 9,075,315 - Sakai , et al. July 7, 2 | 2015-07-07 |
Mask blank and transfer mask
Grant 9,075,319 - Hashimoto , et al. July 7, 2 | 2015-07-07 |
Phase Shift Mask Blank, Method Of Manufacturing The Same, And Phase Shift Mask
App 20150168823 - NOZAWA; Osamu ; et al. | 2015-06-18 |
Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device
Grant 9,029,048 - Sakai , et al. May 12, 2 | 2015-05-12 |
Mask blank, transfer mask, and method of manufacturing a transfer mask
Grant 9,017,902 - Nozawa , et al. April 28, 2 | 2015-04-28 |
Phase shift mask blank, method of manufacturing the same, and phase shift mask
Grant 8,999,609 - Nozawa , et al. April 7, 2 | 2015-04-07 |
Mask blank and method of manufacturing an imprinting mold
Grant 8,883,022 - Nozawa , et al. November 11, 2 | 2014-11-11 |
Mask Black, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20140322634 - KOMINATO; Atsushi ; et al. | 2014-10-30 |
Mask blank, transfer mask and process for manufacturing semiconductor devices
Grant 8,846,274 - Shishido , et al. September 30, 2 | 2014-09-30 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 8,822,103 - Kominato , et al. September 2, 2 | 2014-09-02 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20140205937 - Sakaya; Noriyuki ; et al. | 2014-07-24 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 8,715,892 - Sakaya , et al. May 6, 2 | 2014-05-06 |
Mask blank, transfer mask, and film denseness evaluation method
Grant 8,709,681 - Nozawa , et al. April 29, 2 | 2014-04-29 |
Mask Blank, Transfer Mask And Method Of Manufacturing Transfer Mask
App 20140087292 - HASHIMOTO; Masahiro ; et al. | 2014-03-27 |
Mask blank and transfer mask
Grant 8,637,213 - Hashimoto , et al. January 28, 2 | 2014-01-28 |
Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank
Grant 8,614,035 - Nozawa , et al. December 24, 2 | 2013-12-24 |
Method Of Manufacturing A Transfer Mask And Method Of Manufacturing A Semiconductor Device
App 20130316271 - NOZAWA; Osamu ; et al. | 2013-11-28 |
Optically Semitransmissive Film, Photomask Blank And Photomask, And Method For Designing Optically Semitransmissive Film
App 20130309602 - SHIOTA; Yuki ; et al. | 2013-11-21 |
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
Grant 8,580,466 - Shiota , et al. November 12, 2 | 2013-11-12 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20130280646 - KOMINATO; Atsushi ; et al. | 2013-10-24 |
Mask blank, transfer mask, methods of manufacturing the same and method of manufacturing a semiconductor device
Grant 8,524,421 - Nozawa , et al. September 3, 2 | 2013-09-03 |
Photomask blank, photomask, and photomask manufacturing method
Grant 8,518,609 - Nozawa August 27, 2 | 2013-08-27 |
Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 8,501,372 - Kominato , et al. August 6, 2 | 2013-08-06 |
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
Grant 8,486,588 - Shiota , et al. July 16, 2 | 2013-07-16 |
Mask blank, transfer mask, and methods of manufacturing the same
Grant 8,435,704 - Nozawa , et al. May 7, 2 | 2013-05-07 |
Mask Blank And Method Of Manufacturing An Imprinting Mold
App 20130105441 - Nozawa; Osamu ; et al. | 2013-05-02 |
Mask Blank, Transfer Mask, Method Of Manufacturing Transfer Mask And Method Of Manufacturing Semiconductor Device
App 20130078553 - SAKAI; Kazuya ; et al. | 2013-03-28 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Reflective Mask
App 20130078554 - SAKAI; Kazuya ; et al. | 2013-03-28 |
Phase Shift Mask Blank, Method Of Manufacturing The Same, And Phase Shift Mask
App 20130071777 - Nozawa; Osamu ; et al. | 2013-03-21 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20130065165 - SAKAYA; Noriyuki ; et al. | 2013-03-14 |
Mask Blank, Transfer Mask And Process For Manufacturing Semiconductor Devices
App 20130059236 - SHISHIDO; Hiroaki ; et al. | 2013-03-07 |
Mask blank, transfer mask, and methods of manufacturing the same
Grant 8,354,205 - Nozawa January 15, 2 | 2013-01-15 |
Optically Semitransmissive Film, Photomask Blank And Photomask, And Method For Designing Optically Semitransmissive Film
App 20130011772 - SHIOTA; Yuki ; et al. | 2013-01-10 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 8,293,435 - Nozawa October 23, 2 | 2012-10-23 |
Photomask blank, photomask, and photomask manufacturing method
Grant 8,283,092 - Nozawa October 9, 2 | 2012-10-09 |
Phase Shift Mask Blank, Phase Shift Mask, And Method For Manufacturing Phase Shift Mask Blank
App 20120251929 - NOZAWA; Osamu ; et al. | 2012-10-04 |
Mask blank and method of manufacturing a transfer mask
Grant 8,268,515 - Nozawa September 18, 2 | 2012-09-18 |
Photomask Blank, Photomask, And Photomask Manufacturing Method
App 20120219889 - NOZAWA; Osamu | 2012-08-30 |
Mask Blank And Transfer Mask
App 20120189946 - Hashimoto; Masahiro ; et al. | 2012-07-26 |
Automatic Analyzer
App 20120177536 - Sakai; Chiki ; et al. | 2012-07-12 |
Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank
Grant 8,216,747 - Nozawa , et al. July 10, 2 | 2012-07-10 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20120115075 - KOMINATO; Atsushi ; et al. | 2012-05-10 |
Mask Blank, Transfer Mask, And Method Of Manufacturing A Transfer Mask
App 20120100470 - Nozawa; Osamu ; et al. | 2012-04-26 |
Mask Blank And Transfer Mask
App 20120100466 - Hashimoto; Masahiro ; et al. | 2012-04-26 |
Mask Blank, Transfer Mask, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20120082924 - Kominato; Atsushi ; et al. | 2012-04-05 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 8,137,867 - Nozawa March 20, 2 | 2012-03-20 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 8,137,868 - Nozawa March 20, 2 | 2012-03-20 |
Mask Blank, Transfer Mask, And Film Density Evaluation Method
App 20120034434 - Nozawa; Osamu ; et al. | 2012-02-09 |
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
Grant 8,110,323 - Shiota , et al. February 7, 2 | 2012-02-07 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20110250529 - NOZAWA; Osamu | 2011-10-13 |
Mask Blank, Transfer Mask, Methods Of Manufacturing The Same And Method Of Manufacturing A Semiconductor Device
App 20110244375 - NOZAWA; Osamu ; et al. | 2011-10-06 |
Mask Blank, Transfer Mask, And Methods Of Manufacturing The Same
App 20110244373 - NOZAWA; Osamu ; et al. | 2011-10-06 |
Manufacturing method and apparatus of phase shift mask blank
Grant 8,012,314 - Nozawa , et al. September 6, 2 | 2011-09-06 |
Optically Semitransmissive Film, Photomask Blank And Photomask, And Method For Designing Optically Semitransmissive Film
App 20110207032 - SHIOTA; Yuki ; et al. | 2011-08-25 |
Photomask blank, photomask, and methods of manufacturing the same
Grant 7,989,122 - Nozawa August 2, 2 | 2011-08-02 |
Phase Shift Mask Blank, Phase Shift Mask, And Method For Manufacturing Phase Shift Mask Blank
App 20110171567 - NOZAWA; Osamu ; et al. | 2011-07-14 |
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
Grant 7,955,762 - Shiota , et al. June 7, 2 | 2011-06-07 |
Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank
Grant 7,935,461 - Nozawa , et al. May 3, 2 | 2011-05-03 |
Mask Blank, Transfer Mask, And Methods Of Manufacturing The Same
App 20110053057 - NOZAWA; Osamu | 2011-03-03 |
Halftone type phase shift mask blank and phase shift mask thereof
Grant 7,862,963 - Shiota , et al. January 4, 2 | 2011-01-04 |
Mask blank, method of manufacturing an exposure mask, and method of manufacturing an imprint template
Grant 7,838,180 - Nozawa , et al. November 23, 2 | 2010-11-23 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20100173233 - NOZAWA; Osamu | 2010-07-08 |
Optically Semitransmissive Film, Photomask Blank And Photomask, And Method For Designing Optically Semitransmissive Film
App 20100159368 - SHIOTA; Yuki ; et al. | 2010-06-24 |
Phase Shift Mask Blank, Phase Shift Mask, And Method For Manufacturing Phase Shift Mask Blank
App 20100092874 - NOZAWA; Osamu ; et al. | 2010-04-15 |
Mask Blank And Method Of Manufacturing A Transfer Mask
App 20100081066 - NOZAWA; OSAMU | 2010-04-01 |
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof
App 20100040961 - Shiota; Yuuki ; et al. | 2010-02-18 |
Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film
Grant 7,651,823 - Shiota , et al. January 26, 2 | 2010-01-26 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
Grant 7,632,612 - Shiota , et al. December 15, 2 | 2009-12-15 |
Analyzer
App 20090269242 - Nozawa; Osamu | 2009-10-29 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20090246645 - NOZAWA; Osamu | 2009-10-01 |
Halftone type phase shift mask blank and phase shift mask thereof
Grant 7,592,106 - Shiota , et al. September 22, 2 | 2009-09-22 |
Photomask Blank, Photomask, And Photomask Manufacturing Method
App 20090226826 - NOZAWA; Osamu | 2009-09-10 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same
App 20090214961 - Nozawa; Osamu | 2009-08-27 |
Mask Blank, Method Of Manufacturing An Exposure Mask, And Method Of Manufacturing An Imprint Template
App 20080206655 - Nozawa; Osamu ; et al. | 2008-08-28 |
Manufacturing method and apparatus of phase shift mask blank
Grant 7,402,228 - Nozawa , et al. July 22, 2 | 2008-07-22 |
Optically Semitransmissive Film, Photomask Blank and Photomask, and Method for Designing Optically Semitransmissive Film
App 20070269723 - Shiota; Yuki ; et al. | 2007-11-22 |
Manufacturing method and apparatus of phase shift mask blank
Grant 7,282,121 - Nozawa , et al. October 16, 2 | 2007-10-16 |
Manufacturing Method and Apparatus of Phase Shift Mask Blank
App 20070187228 - Nozawa; Osamu ; et al. | 2007-08-16 |
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof
App 20070092808 - Shiota; Yuuki ; et al. | 2007-04-26 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
App 20070082278 - Shiota; Yuuki ; et al. | 2007-04-12 |
Phase shift mask blank, photo mask blank, and manufacturing apparatus and method of blanks
App 20070034499 - Nozawa; Osamu ; et al. | 2007-02-15 |
Halftone type phase shift mask blank and phase shift mask thereof
Grant 7,169,513 - Shiota , et al. January 30, 2 | 2007-01-30 |
Sputtering target, method of manufacturing a multilayer reflective film coated substrate, method of manufacturing a reflective mask blank, and method of manufacturing a reflective mask
App 20060237303 - Hosoya; Morio ; et al. | 2006-10-26 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
Grant 7,115,341 - Shiota , et al. October 3, 2 | 2006-10-03 |
Halftone phase-shift mask blank and halftone phase-shift mask
Grant 7,060,394 - Shiota , et al. June 13, 2 | 2006-06-13 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask
Grant 7,011,910 - Shiota , et al. March 14, 2 | 2006-03-14 |
Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask
Grant 6,844,119 - Nozawa , et al. January 18, 2 | 2005-01-18 |
Manufacturing method and apparatus of phase shift mask blank
App 20040191651 - Nozawa, Osamu ; et al. | 2004-09-30 |
Manufacturing method and apparatus of phase shift mask blank
Grant 6,783,634 - Nozawa , et al. August 31, 2 | 2004-08-31 |
Manufacturing method and apparatus of phase shift mask blank
App 20040157138 - Nozawa, Osamu ; et al. | 2004-08-12 |
Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks
Grant 6,762,000 - Nozawa , et al. July 13, 2 | 2004-07-13 |
Lithography mask blank and method of manufacturing the same
Grant 6,746,806 - Nozawa June 8, 2 | 2004-06-08 |
Halftone phase shift mask and mask blank
Grant 6,743,553 - Shiota , et al. June 1, 2 | 2004-06-01 |
Photo mask blank and method of manufacturing the same
Grant 6,740,208 - Kureishi , et al. May 25, 2 | 2004-05-25 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask
App 20040086788 - Shiota, Yuki ; et al. | 2004-05-06 |
Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask
Grant 6,723,477 - Nozawa , et al. April 20, 2 | 2004-04-20 |
Phase shift mask blank, photo mask blank, and manufacturing apparatus and method of blanks
App 20040058254 - Nozawa, Osamu ; et al. | 2004-03-25 |
Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask
App 20040023125 - Nozawa, Osamu ; et al. | 2004-02-05 |
Phase shift mask blank, phase shift mask, and method for manufacturing the same
Grant 6,677,087 - Nozawa , et al. January 13, 2 | 2004-01-13 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same
App 20030180631 - Shiota, Yuuki ; et al. | 2003-09-25 |
Halftone type phase shift mask blank and phase shift mask thereof
App 20030180630 - Shiota, Yuuki ; et al. | 2003-09-25 |
Halftone phase-shift mask blank and halftone phase-shift mask
App 20030064297 - Shiota, Yuki ; et al. | 2003-04-03 |
Halftone phase shift mask and mask blank
App 20020122991 - Shiota, Yuki ; et al. | 2002-09-05 |
Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks
App 20020110741 - Nozawa, Osamu ; et al. | 2002-08-15 |
Lithography mask blank and method of manufacturing the same
App 20020098422 - Nozawa, Osamu | 2002-07-25 |
Manufacturing method and apparatus of phase shift mask blank
App 20020086220 - Nozawa, Osamu ; et al. | 2002-07-04 |
Photo mask blank and method of manufacturing the same
App 20020068228 - Kureishi, Mitsuhiro ; et al. | 2002-06-06 |
Phase shift mask blank, phase shift mask, and method for manufacturing the same
App 20020061452 - Nozawa, Osamu ; et al. | 2002-05-23 |
Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask
App 20020058186 - Nozawa, Osamu ; et al. | 2002-05-16 |
Phase shift mask and phase shift mask blank
Grant 6,335,124 - Mitsui , et al. January 1, 2 | 2002-01-01 |
Magnetic recording medium having an improved magnetic characteristic
Grant 6,287,429 - Moroishi , et al. September 11, 2 | 2001-09-11 |
Phase shift mask and phase shift mask blank
Grant 6,087,047 - Mitsui , et al. July 11, 2 | 2000-07-11 |
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