Patent | Date |
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Film forming composition and film forming method using the same Grant 11,161,982 - Ozaki , et al. November 2, 2 | 2021-11-02 |
Film forming composition Grant 11,059,995 - Noya , et al. July 13, 2 | 2021-07-13 |
Film Forming Composition And Film Forming Method Using The Same App 20210115253 - OZAKI; Yuki ;   et al. | 2021-04-22 |
Film Forming Composition App 20200377761 - NOYA; Go ;   et al. | 2020-12-03 |
Composition for forming underlayer and method for forming underlayer therewith Grant 10,451,971 - Suzuki , et al. Oc | 2019-10-22 |
Void forming composition, semiconductor device provided with voids formed using composition, and method for manufacturing semiconductor device using composition Grant 10,435,555 - Nakasugi , et al. O | 2019-10-08 |
A Polymer, Composition, Forming Sacrificial Layer And Method For Semiconductor Device Therewith App 20190048129 - NAKASUGI; Shigemasa ;   et al. | 2019-02-14 |
Composition For Forming Underlayer And Method For Forming Underlayer Therewith App 20180039178 - SUZUKI; Masato ;   et al. | 2018-02-08 |
Sacrificial Film Composition, Method For Preparing Same, Semiconductor Device Having Voids Formed Using Said Composition, And Method For Manufacturing Semiconductor Device Using Said Composition App 20170218227 - NAKASUGI; Shigemasa ;   et al. | 2017-08-03 |
Void Forming Composition, Semiconductor Device Provided With Voids Formed Using Composition, And Method For Manufacturing Semiconductor Device Using Composition App 20170210896 - NAKASUGI; Shigemasa ;   et al. | 2017-07-27 |
Rinsing liquid for lithography and pattern forming method using same Grant 9,494,867 - Matsuura , et al. November 15, 2 | 2016-11-15 |
Composition for forming fine resist pattern and pattern formation method using same Grant 9,360,756 - Yamamoto , et al. June 7, 2 | 2016-06-07 |
Rinsing Liquid For Lithography And Pattern Forming Method Using Same App 20160109805 - MATSUURA; Yuriko ;   et al. | 2016-04-21 |
Composition for forming tungsten oxide film and method for producing tungsten oxide film using same Grant 9,152,052 - Noya October 6, 2 | 2015-10-06 |
Composition For Forming Fine Resist Pattern And Pattern Formation Method Using Same App 20150253669 - Yamamoto; Kazuma ;   et al. | 2015-09-10 |
Composition For Forming Tungsten Oxide Film And Method For Producing Tungsten Oxide Film Using Same App 20140356792 - Noya; Go | 2014-12-04 |
Composition for formation of top antireflective film, and pattern formation method using the composition Grant 8,568,955 - Akiyama , et al. October 29, 2 | 2013-10-29 |
Superfine-patterned mask, method for production thereof, and method employing the same for forming superfine-pattern Grant 8,501,394 - Takano , et al. August 6, 2 | 2013-08-06 |
Method for formation of miniaturized pattern and resist substrate treatment solution for use in the method Grant 8,101,333 - Noya , et al. January 24, 2 | 2012-01-24 |
Processing liquid for resist substrate and method of processing resist substrate using the same Grant 7,998,664 - Noya , et al. August 16, 2 | 2011-08-16 |
Superfine-patterned Mask, Method For Production Thereof, And Method Employing The Same For Forming Superfine-pattern App 20100308015 - Takano; Yusuke ;   et al. | 2010-12-09 |
Composition For Formation Of Top Antireflective Film, And Pattern Formation Method Using The Composition App 20100286318 - Akiyama; Yasushi ;   et al. | 2010-11-11 |
Composition For Formation Of Top Anti-reflective Film, And Pattern Formation Method Using The Composition App 20100279235 - Noya; Go ;   et al. | 2010-11-04 |
Processing Liquid for Resist Substrate and Method of Processing Resist Substrate Using the Same App 20100233634 - Noya; Go ;   et al. | 2010-09-16 |
Composition For Upper Surface Antireflection Film, And Method For Pattern Formation Using The Same App 20100062363 - Noya; Go ;   et al. | 2010-03-11 |
Solution for treatment of resist substrate after development processing and method for treatment of resist substrate using the same App 20100028817 - Noya; Go ;   et al. | 2010-02-04 |
Method for formation of miniaturized pattern and resist substrate treatment solution for use in the method App 20100021700 - Noya; Go ;   et al. | 2010-01-28 |
Method of forming microfined resist pattern App 20100003468 - Noya; Go ;   et al. | 2010-01-07 |