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Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier Grant 9,680,277 - Nowak , et al. June 13, 2 | 2017-06-13 |
Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light Grant 9,570,884 - Nowak , et al. February 14, 2 | 2017-02-14 |
Amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 9,407,052 - Wakabayashi , et al. August 2, 2 | 2016-08-02 |
Laser beam output control with optical shutter Grant 9,318,864 - Nowak , et al. April 19, 2 | 2016-04-19 |
Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 9,153,927 - Nowak , et al. October 6, 2 | 2015-10-06 |
Laser beam amplifier and laser apparatus using the same Grant 9,099,836 - Nowak , et al. August 4, 2 | 2015-08-04 |
Slab Amplifier, And Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus Including Slab Amplifier App 20150188277 - NOWAK; Krzysztof ;   et al. | 2015-07-02 |
Slab amplification device, laser apparatus, and extreme ultraviolet light generation system Grant 9,036,251 - Nowak , et al. May 19, 2 | 2015-05-19 |
Laser Apparatus App 20140348189 - NOWAK; Krzysztof ;   et al. | 2014-11-27 |
Laser Apparatus, Laser System, And Extreme Ultraviolet Light Generation Apparatus App 20140346375 - NOWAK; Krzysztof ;   et al. | 2014-11-27 |
Laser Apparatus And Extreme Ultraviolet Light Generation Apparatus App 20140346376 - NOWAK; Krzysztof ;   et al. | 2014-11-27 |
Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20140341248 - WAKABAYASHI; Osamu ;   et al. | 2014-11-20 |
Laser Apparatus App 20140300950 - NOWAK; Krzysztof ;   et al. | 2014-10-09 |
Laser apparatus and extreme ultraviolet light source apparatus Grant 8,804,778 - Wakabayashi , et al. August 12, 2 | 2014-08-12 |
Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system Grant 8,749,876 - Nowak , et al. June 10, 2 | 2014-06-10 |
Regenerative Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130315272 - NOWAK; Krzysztof ;   et al. | 2013-11-28 |
Laser beam amplifier and laser apparatus using the same Grant 8,559,099 - Nowak , et al. October 15, 2 | 2013-10-15 |
Laser Beam Amplifier And Laser Apparatus Using The Same App 20130250402 - NOWAK; Krzysztof ;   et al. | 2013-09-26 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device Grant 8,476,609 - Endo , et al. July 2, 2 | 2013-07-02 |
Laser Apparatus, Extreme Ultraviolet Light Generation System, Method For Controlling The Laser Apparatus, And Method For Generating The Extreme Ultraviolet Light App 20130148674 - Nowak; Krzysztof ;   et al. | 2013-06-13 |
Laser Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130092849 - Nowak; Krzysztof ;   et al. | 2013-04-18 |
Laser Apparatus And Extreme Ultraviolet Light Generation System Including The Laser Apparatus App 20130032735 - Nowak; Krzysztof ;   et al. | 2013-02-07 |
Slab Amplification Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130034116 - Nowak; Krzysztof ;   et al. | 2013-02-07 |
Regenerative Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20120229889 - Suganuma; Takashi ;   et al. | 2012-09-13 |
Extreme Ultraviolet Light Source Device, Laser Light Source Device For Extreme Ultraviolet Light Source Device, And Method For Controlling Saturable Absorber Used In Extreme Ultraviolet Light Source Device App 20120068091 - ENDO; Akira ;   et al. | 2012-03-22 |
Laser Device, Laser System, And Extreme Ultraviolet Light Generation Apparatus App 20120012762 - Nowak; Krzysztof ;   et al. | 2012-01-19 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device Grant 8,093,571 - Endo , et al. January 10, 2 | 2012-01-10 |
Slab type laser apparatus Grant 7,903,715 - Nowak , et al. March 8, 2 | 2011-03-08 |
Laser Apparatus And Extreme Ultraviolet Light Source Apparatus App 20100193710 - Wakabayashi; Osamu ;   et al. | 2010-08-05 |
Laser Beam Amplifier And Laser Apparatus Using The Same App 20100195196 - Nowak; Krzysztof ;   et al. | 2010-08-05 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device App 20100078580 - Endo; Akira ;   et al. | 2010-04-01 |
Slab Type Laser Apparatus App 20090316746 - NOWAK; Krzysztof ;   et al. | 2009-12-24 |