NOVAK; W. Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for NOVAK; W. Thomas.The latest application filed is for "liquid jet and recovery system for immersion lithography".

Company Profile

2.78.86

NOVAK; W. Thomas - Redwood City CA
Novak; W. Thomas - Hillsborough CA US
NOVAK; W. Thomas - Foster City CA
Novak; W. Thomas - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Liquid Jet And Recovery System For Immersion Lithography App 20190129311 - NOVAK; W. Thomas ; et al.	2019-05-02
Liquid jet and recovery system for immersion lithography Grant 10,185,222 - Novak , et al. Ja	2019-01-22
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20180164703 - NOVAK; W. Thomas ; et al.	2018-06-14
Environmental system including a transport region for an immersion lithography apparatus Grant 9,910,370 - Novak , et al. March 6, 2	2018-03-06
Liquid Jet And Recovery System For Immersion Lithography App 20180024442 - NOVAK; W. Thomas ; et al.	2018-01-25
Liquid jet and recovery system for immersion lithography Grant 9,785,057 - Novak , et al. October 10, 2	2017-10-10
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20170219940 - NOVAK; W. Thomas ; et al.	2017-08-03
Environmental system including a transport region for an immersion lithography apparatus Grant 9,632,427 - Novak , et al. April 25, 2	2017-04-25
Boresight error monitor for laser radar integrated optical assembly Grant 9,587,977 - Smith , et al. March 7, 2	2017-03-07
Liquid Jet And Recovery System For Immersion Lithography App 20160209762 - NOVAK; W. Thomas ; et al.	2016-07-21
Liquid jet and recovery system for immersion lithography Grant 9,304,409 - Novak , et al. April 5, 2	2016-04-05
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20160085160 - NOVAK; W. Thomas ; et al.	2016-03-24
Environmental system including a transport region for an immersion lithography apparatus Grant 9,244,363 - Novak , et al. January 26, 2	2016-01-26
Optical arrangement of autofocus elements for use with immersion lithography Grant 9,086,636 - Novak July 21, 2	2015-07-21
Run-off Path To Collect Liquid For An Immersion Lithography Apparatus App 20150177628 - NOVAK; W. Thomas	2015-06-25
Image segmentation from focus varied images using graph cuts Grant 9,025,043 - Hong , et al. May 5, 2	2015-05-05
Optical Arrangement Of Autofocus Elements For Use With Immersion Lithography App 20150109595 - NOVAK; W. Thomas	2015-04-23
Immersion lithography apparatus with hydrophilic region encircling hydrophobic region which encircles substrate support Grant 9,007,561 - Novak April 14, 2	2015-04-14
Stage Braking System For A Motor App 20150098074 - Rosa; Matthew ; et al.	2015-04-09
Optical arrangement of autofocus elements for use with immersion lithography Grant 8,953,250 - Novak February 10, 2	2015-02-10
Measurement assembly including a metrology system and a pointer that directs the metrology system Grant 8,937,725 - Novak January 20, 2	2015-01-20
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20140354967 - NOVAK; W. Thomas ; et al.	2014-12-04
Optical Arrangement Of Autofocus Elements For Use With Immersion Lithography App 20140320833 - NOVAK; W. Thomas	2014-10-30
Liquid Jet And Recovery System For Immersion Lithography App 20140253888 - NOVAK; W. Thomas ; et al.	2014-09-11
Environmental system including a transport region for an immersion lithography apparatus Grant 8,830,443 - Novak , et al. September 9, 2	2014-09-09
Optical arrangement of autofocus elements for use with immersion lithography Grant 8,810,915 - Novak August 19, 2	2014-08-19
Boresight Error Monitor For Laser Radar Integrated Optical Assembly App 20140063491 - Smith; Daniel G. ; et al.	2014-03-06
Optical Arrangement Of Autofocus Elements For Use With Immersion Lithography App 20140055762 - NOVAK; W. Thomas	2014-02-27
Measurement Assembly Including A Metrology System And A Pointer That Directs The Metrology System App 20130335749 - NOVAK; W. Thomas	2013-12-19
Optical arrangement of autofocus elements for use with immersion lithography Grant 8,599,488 - Novak December 3, 2	2013-12-03
Large scale metrology apparatus and method Grant 8,582,119 - Novak , et al. November 12, 2	2013-11-12
Beam Steering For Laser Radar And Other Uses App 20130241761 - Cooper; Alexander ; et al.	2013-09-19
Cleanup method for optics in immersion lithography supplying cleaning liquid onto a surface of object below optical element, liquid supply port and liquid recovery port Grant 8,493,545 - Kawai , et al. July 23, 2	2013-07-23
Target For Large Scale Metrology System App 20130141735 - Sogard; Michael ; et al.	2013-06-06
Lyophobic Run-Off Path to Collect Liquid for an Immersion Lithography Apparatus App 20120268726 - NOVAK; W. Thomas	2012-10-25
Lyophobic run-off path to collect liquid for an immersion lithography apparatus Grant 8,243,253 - Novak August 14, 2	2012-08-14
Optical Arrangement Of Autofocus Elements For Use With Immersion Lithography App 20120075609 - NOVAK; W. Thomas	2012-03-29
Large Scale Metrology Apparatus And Method App 20120050752 - NOVAK; W. THOMAS ; et al.	2012-03-01
Large Scale Metrology Apparatus And Method App 20120050726 - Novak; W. Thomas ; et al.	2012-03-01
Liquid jet and recovery system for immersion lithography App 20120019792 - Novak; W. Thomas ; et al.	2012-01-26
Optical arrangement of autofocus elements for use with immersion lithography Grant 8,094,379 - Novak January 10, 2	2012-01-10
Cleanup method for optics in immersion lithography using sonic device Grant 8,085,381 - Kawai , et al. December 27, 2	2011-12-27
Liquid jet and recovery system for immersion lithography Grant 8,059,258 - Novak , et al. November 15, 2	2011-11-15
Environmental system including a transport region for an immersion lithography apparatus App 20110235007 - Novak; W. Thomas ; et al.	2011-09-29
Optical arrangement of autofocus elements for use with immersion lithography Grant 8,018,657 - Novak September 13, 2	2011-09-13
Environmental system including a transport region for an immersion lithography apparatus Grant 7,969,552 - Novak , et al. June 28, 2	2011-06-28
Environmental system including a transport region for an immersion lithography apparatus Grant 7,965,376 - Novak , et al. June 21, 2	2011-06-21
Liquid jet and recovery system for immersion lithography Grant 7,932,989 - Novak , et al. April 26, 2	2011-04-26
Environmental system including a transport region for an immersion lithography apparatus Grant 7,929,111 - Novak , et al. April 19, 2	2011-04-19
Environmental system including a transport region for an immersion lithography apparatus Grant 7,929,110 - Novak , et al. April 19, 2	2011-04-19
Image apparatus with image noise compensation Grant 7,889,207 - Hong , et al. February 15, 2	2011-02-15
Liquid jet and recovery system for immersion lithography App 20110031416 - Novak; W. Thomas ; et al.	2011-02-10
Stage assembly with lightweight fine stage and low transmissibility Grant 7,869,000 - Arai , et al. January 11, 2	2011-01-11
Fluid pressure compensation for immersion litography lens App 20100149513 - Watson; Douglas C. ; et al.	2010-06-17
Depth layer extraction and image synthesis from focus varied multiple images Grant 7,720,371 - Hong , et al. May 18, 2	2010-05-18
Wafer positioner with planar motor and mag-lev fine stage Grant RE41,232 - Hazelton , et al. April 20, 2	2010-04-20
Optical Imaging System and Method for Imaging Up to Four Reticles to a Single Imaging Location App 20100091257 - Williamson; David M. ; et al.	2010-04-15
Fluid pressure compensation for immersion lithography lens Grant 7,688,421 - Watson , et al. March 30, 2	2010-03-30
Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations App 20100053588 - Binnard; Michael B. ; et al.	2010-03-04
Optical arrangement of autofocus elements for use with immersion lithography App 20090317751 - Novak; W. Thomas	2009-12-24
Apparatus And Method For Exposing Adjacent Sites On A Substrate App 20090310115 - Novak; W. Thomas ; et al.	2009-12-17
Imaging optical system configured with through the lens optics for producing control information Grant 7,612,892 - Smith , et al. November 3, 2	2009-11-03
Optical arrangement of autofocus elements for use with immersion lithography App 20090262322 - Novak; W. Thomas	2009-10-22
Fluorescence Detection Using Lyman-alpha Line Illumination App 20090236543 - Ooki; Hiroshi ; et al.	2009-09-24
Adaptive-optics actuator arrays and methods for using such arrays Grant 7,572,019 - Novak August 11, 2	2009-08-11
Cleanup method for optics in immersion lithography App 20090195762 - Hazelton; Andrew J. ; et al.	2009-08-06
Optical arrangement of autofocus elements for use with immersion lithography Grant 7,570,431 - Novak August 4, 2	2009-08-04
Cleanup method for optics in immersion lithography App 20090174872 - Hazelton; Andrew J. ; et al.	2009-07-09
Cleanup method for optics in immersion lithography App 20090161084 - Hazelton; Andrew J. ; et al.	2009-06-25
Cleanup method for optics in immersion lithography Grant 7,522,259 - Hazelton , et al. April 21, 2	2009-04-21
Liquid jet and recovery system for immersion lithography App 20090051888 - Novak; W. Thomas ; et al.	2009-02-26
Apparatus And Method For Transferring Features To An Edge Of A Wafer App 20090047608 - Novak; W. Thomas ; et al.	2009-02-19
Fluid Pressure Compensation for Immersion Lithography Lens App 20080316445 - Watson; Douglas C. ; et al.	2008-12-25
Lithography apparatus and method utilizing pendulum interferometer system Grant 7,466,396 - Binnard , et al. December 16, 2	2008-12-16
Liquid jet and recovery system for immersion lithography Grant 7,443,482 - Novak , et al. October 28, 2	2008-10-28
Run-off path to collect liquid for an immersion lithography apparatus App 20080239261 - Novak; W. Thomas	2008-10-02
Optical arrangement of autofocus elements for use with immersion lithography Grant 7,414,794 - Novak August 19, 2	2008-08-19
Image apparatus with image noise compensation App 20080192064 - Hong; Li ; et al.	2008-08-14
Depth layer extraction and image synthesis from focus varied multiple images App 20080175576 - Hong; Li ; et al.	2008-07-24
Run-off path to collect liquid for an immersion lithography apparatus Grant 7,397,532 - Novak July 8, 2	2008-07-08
Cleanup method for optics in immersion lithography App 20080100813 - Hazelton; Andrew J. ; et al.	2008-05-01
Exposure apparatus that includes a phase change circulation system for movers App 20080073563 - Novak; W. Thomas ; et al.	2008-03-27
Environmental system including a transport region for an immersion lithography apparatus Grant 7,345,742 - Novak , et al. March 18, 2	2008-03-18
Moving mechanism with high bandwidth response and low force transmissibility Grant 7,333,179 - Yuan , et al. February 19, 2	2008-02-19
Environmental system including a transport region for an immersion lithography apparatus App 20080030704 - Novak; W. Thomas ; et al.	2008-02-07
Liquid jet and recovery system for immersion lithography App 20080030698 - Novak; W. Thomas ; et al.	2008-02-07
Kinematic Chucks For Reticles And Other Planar Bodies App 20070268476 - Phillips; Alton H. ; et al.	2007-11-22
Environmental system including a transport region for an immersion lithography apparatus App 20070258062 - Novak; W. Thomas ; et al.	2007-11-08
Environmental system including a transport region for an immersion lithography apparatus App 20070252962 - Novak; W. Thomas ; et al.	2007-11-01
Environmental system including a transport region for an immersion lithography apparatus App 20070252961 - Novak; W. Thomas ; et al.	2007-11-01
Cleanup method for optics in immersion lithography App 20070247601 - Hazelton; Andrew J. ; et al.	2007-10-25
Environmental system including a transport region for an immersion lithography apparatus Grant 7,251,017 - Novak , et al. July 31, 2	2007-07-31
Cleanup method for optics in immersion lithography App 20070171390 - Hazelton; Andrew J. ; et al.	2007-07-26
Environmental system including a transport region for an immersion lithography apparatus App 20070139631 - Novak; W. Thomas ; et al.	2007-06-21
Lithography apparatus and method utilizing pendulum interferometer system App 20070139635 - Binnard; Michael B. ; et al.	2007-06-21
Cleanup method for optics in immersion lithography App 20070132975 - Hazelton; Andrew J. ; et al.	2007-06-14
Imaging optical system configured with through the lens optics for producing control information App 20070080281 - Smith; Daniel G. ; et al.	2007-04-12
Optical arrangement of autofocus elements for use with immersion lithography App 20070076303 - Novak; W. Thomas	2007-04-05
Fine force actuator assembly for chemical mechanical polishing apparatuses Grant 7,172,493 - Novak , et al. February 6, 2	2007-02-06
Adaptive-optics actuator arrays and methods for using such arrays Grant 7,125,128 - Novak October 24, 2	2006-10-24
Adaptive-optics actuator arrays and methods for using such arrays App 20060193065 - Novak; W. Thomas	2006-08-31
Lithographic projection method and apparatus Grant 7,072,024 - Novak July 4, 2	2006-07-04
Stage assembly with lightweight fine stage and low transmissibility App 20060104753 - Arai; Yoichi ; et al.	2006-05-18
Moving mechanism with high bandwidth response and low force transmissibility App 20060033903 - Yuan; Bausan ; et al.	2006-02-16
Fine force actuator assembly for chemical mechanical polishing apparatuses App 20060035564 - Novak; W. Thomas ; et al.	2006-02-16
Liquid jet and recovery system for immersion lithography App 20060023183 - Novak; W. Thomas ; et al.	2006-02-02
Run-off path to collect liquid for an immersion lithography apparatus App 20060023181 - Novak; W. Thomas	2006-02-02
Cleanup method for optics in immersion lithography App 20060023185 - Hazelton; Andrew J. ; et al.	2006-02-02
Environmental system including a transport region for an immersion lithography apparatus App 20060023182 - Novak; W. Thomas ; et al.	2006-02-02
Optical arrangement of autofocus elements for use with immersion lithography App 20060017900 - Novak; W. Thomas	2006-01-26
Interferometer system for measuring a height of wafer stage Grant 6,980,279 - Novak December 27, 2	2005-12-27
Stage counter mass system Grant 6,963,821 - Binnard , et al. November 8, 2	2005-11-08
Fine force control of actuators for chemical mechanical polishing apparatuses App 20050197045 - Novak, W. Thomas ; et al.	2005-09-08
Adaptive-optics actuator arrays and methods for using such arrays App 20050162762 - Novak, W. Thomas	2005-07-28
Interferometer system for measuring a height of wafer stage App 20050162630 - Novak, W. Thomas	2005-07-28
Lithographic projection method and apparatus App 20050157280 - Novak, W. Thomas	2005-07-21
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system Grant 6,880,942 - Hazelton , et al. April 19, 2	2005-04-19
Inspection tool for testing and adjusting a projection unit of a lithography system Grant H2,114 - Novak , et al. February 1, 2	2005-02-01
Simplified reticle stage removal system for an electron beam system Grant 6,815,695 - Novak , et al. November 9, 2	2004-11-09
Positioning stage with stationary actuators Grant 6,781,138 - Novak , et al. August 24, 2	2004-08-24
Stage counter mass system App 20040158427 - Binnard, Michael ; et al.	2004-08-12
Vacuum compatible air bearing stage Grant 6,765,650 - Novak July 20, 2	2004-07-20
Positioning stage with stationary and movable magnet tracks Grant 6,753,534 - Novak , et al. June 22, 2	2004-06-22
Method of making a static pressure air bearing Grant 6,735,867 - Tsuda , et al. May 18, 2	2004-05-18
Low distortion kinematic reticle support Grant 6,717,159 - Novak April 6, 2	2004-04-06
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system App 20040036940 - Hazelton, Andrew J. ; et al.	2004-02-26
Interferometer system for a semiconductor exposure system Grant 6,674,512 - Novak , et al. January 6, 2	2004-01-06
Positioning stage with stationary and movable magnet tracks App 20030230729 - Novak, W. Thomas ; et al.	2003-12-18
Chuck for mounting reticle to a reticle stage Grant 6,653,639 - Novak November 25, 2	2003-11-25
Wafer stage with magnetic bearings App 20030173833 - Hazelton, Andrew J. ; et al.	2003-09-18
Simplified reticle stage removal system for an electron beam system App 20030141461 - Novak, W. Thomas ; et al.	2003-07-31
Reticle stage with reaction force cancellation Grant 6,597,435 - Poon , et al. July 22, 2	2003-07-22
Reticle stage with reaction force cancellation App 20030067592 - Tim Poon, Alex K. ; et al.	2003-04-10
Interferometer system for a semiconductor exposure system App 20030063267 - Novak, W. Thomas ; et al.	2003-04-03
Kinematic mounted reference mirror with provision for stable mounting of alignment optics Grant 6,525,802 - Novak February 25, 2	2003-02-25
Vacuum compatible air bearing stage App 20030030778 - Novak, W. Thomas	2003-02-13
Static pressure air bearing Grant 6,499,880 - Tsuda , et al. December 31, 2	2002-12-31
Method and apparatus for determining and calibrating image plane tilt and substrate plane tilt in photolithography App 20020197548 - Novak, W. Thomas	2002-12-26
Positioning stage with stationary actuators App 20020179850 - Novak, W. Thomas ; et al.	2002-12-05
Static pressure air bearing App 20020181808 - Tsuda, Takuma ; et al.	2002-12-05
Wafer positioner with planar motor and mag-lev fine stage Grant 6,437,463 - Hazelton , et al. August 20, 2	2002-08-20
Wafer stage assembly App 20020109823 - Binnard, Michael ; et al.	2002-08-15
Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations App 20020088685 - Novak, W. Thomas	2002-07-11
Positioning stage with stationary and movable magnet tracks App 20020074516 - Novak, W. Thomas ; et al.	2002-06-20
Low distortion kinematic reticle support App 20020043163 - Novak, W. Thomas	2002-04-18
Static pressure air bearing App 20020034345 - Tsuda, Takuma ; et al.	2002-03-21
Cantilever reticle stage for electron beam projection lithography system App 20020021427 - Watson, Douglas C. ; et al.	2002-02-21
Cooling structure for a linear motor Grant 6,278,203 - Novak , et al. August 21, 2	2001-08-21
Kinematic lens mounting with distributed support and radial flexure Grant 6,239,924 - Watson , et al. May 29, 2	2001-05-29
Precision motion stage with single guide beam and follower stage Grant 5,996,437 - Novak , et al. December 7, 1	1999-12-07
Electro-magnetic motor cooling system Grant 5,998,889 - Novak December 7, 1	1999-12-07
Precision motion stage with single guide beam and follower stage Grant 5,623,853 - Novak , et al. April 29, 1	1997-04-29
Coarse and fine motion positioning mechanism Grant 4,723,086 - Leibovich , et al. February 2, 1	1988-02-02
Multiple wavelength linear zone plate alignment apparatus and method Grant 4,704,033 - Fay , et al. November 3, 1	1987-11-03
Lithography system Grant 4,516,253 - Novak May 7, 1	1985-05-07
Lithography system Grant 4,514,858 - Novak April 30, 1	1985-04-30
Projection aligner with bending mirror Grant 4,376,580 - Novak , et al. March 15, 1	1983-03-15