Patent applications and USPTO patent grants for NOVA LTD.The latest application filed is for "tem-based metrology method and system".
Patent | Date |
---|---|
Tem-based Metrology Method And System App 20220310356 - MACHAVARIANI; VLADIMIR ;   et al. | 2022-09-29 |
Metrology method and system Grant 11,450,541 - Machavariani , et al. September 20, 2 | 2022-09-20 |
Accurate Raman spectroscopy Grant 11,415,519 - Hollander , et al. August 16, 2 | 2022-08-16 |
Semiconductor Device Manufacture With In-line Hotspot Detection App 20220208620 - SHIFRIN; MICHAEL ;   et al. | 2022-06-30 |
Time-domain optical metrology and inspection of semiconductor devices Grant 11,366,398 - Barak , et al. June 21, 2 | 2022-06-21 |
Monitoring system and method for verifying measurements in pattened structures App 20220163320 - Brill; Boaz ;   et al. | 2022-05-26 |
Apparatus and method for electrical test prediction Grant 11,335,612 - Turovets May 17, 2 | 2022-05-17 |
Hybrid Metrology Method And System App 20220120690 - BARAK; GILAD ;   et al. | 2022-04-21 |
TEM-based metrology method and system Grant 11,309,162 - Machavariani , et al. April 19, 2 | 2022-04-19 |
Process control of semiconductor fabrication based on spectra quality metrics Grant 11,300,948 - Kagalwala , et al. April 12, 2 | 2022-04-12 |
Raman spectroscopy based measurement system Grant 11,293,871 - Oren April 5, 2 | 2022-04-05 |
Test Structure Design For Metrology Measurements In Patterned Samples App 20220099596 - BARAK; GILAD ;   et al. | 2022-03-31 |
Raman spectroscopy based measurements in patterned structures Grant 11,275,027 - Barak , et al. March 15, 2 | 2022-03-15 |
Method And System For Non-destructive Metrology Of Thin Layers App 20220074878 - Lee; Wei ;   et al. | 2022-03-10 |
Layer Detection For High Aspect Ratio Etch Control App 20220044975 - Loewenthal; Gil ;   et al. | 2022-02-10 |
X-ray Based Measurements In Patterned Structure App 20220042934 - Barak; Gilad | 2022-02-10 |
Metrology And Process Control For Semiconductor Manufacturing App 20220036218 - ROTHSTEIN; EITAN ;   et al. | 2022-02-03 |
Hybrid metrology method and system Grant 11,150,190 - Barak , et al. October 19, 2 | 2021-10-19 |
Test structure design for metrology measurements in patterned samples Grant 11,143,601 - Barak , et al. October 12, 2 | 2021-10-12 |
Layer detection for high aspect ratio etch control Grant 11,107,738 - Loewenthal , et al. August 31, 2 | 2021-08-31 |
SEC | 0000834692 | NOVA LTD |
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