Patent | Date |
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Volatile dihydropyrazinly and dihydropyrazine metal complexes Grant 10,914,001 - Norman , et al. February 9, 2 | 2021-02-09 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes App 20190292659 - Norman; John Anthony Thomas ;   et al. | 2019-09-26 |
Volatile Dihydropyrazinly and Dihydropyrazine Metal Complexes App 20180327900 - Norman; John Anthony Thomas ;   et al. | 2018-11-15 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes Grant 9,994,954 - Norman , et al. June 12, 2 | 2018-06-12 |
Complexes of imidazole ligands Grant 9,018,387 - Norman , et al. April 28, 2 | 2015-04-28 |
Metal-enolate precursors for depositing metal-containing films Grant 8,962,875 - Norman , et al. February 24, 2 | 2015-02-24 |
Volatile dihydropyrazinly and dihydropyrazine metal complexes App 20150030782 - Ivanov; Sergei Vladimirovich ;   et al. | 2015-01-29 |
Volatile group 2 metal precursors Grant 8,859,785 - Norman October 14, 2 | 2014-10-14 |
Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors App 20140242795 - Norman; John Anthony Thomas ;   et al. | 2014-08-28 |
Volatile imidazoles and group 2 imidazole based metal precursors Grant 8,703,103 - Norman , et al. April 22, 2 | 2014-04-22 |
Complexes of imidazole ligands Grant 8,680,289 - Norman , et al. March 25, 2 | 2014-03-25 |
Liquid precursor for depositing group 4 metal containing films Grant 8,592,606 - Lei , et al. November 26, 2 | 2013-11-26 |
Group 2 Imidazolate Formulations for Direct Liquid Injection App 20130260025 - Norman; John Anthony Thomas ;   et al. | 2013-10-03 |
Liquid composition containing aminoether for deposition of metal-containing films Grant 8,507,704 - Ivanov , et al. August 13, 2 | 2013-08-13 |
Complexes Of Imidazole Ligands App 20130078391 - Norman; John Anthony Thomas ;   et al. | 2013-03-28 |
Metal-Enolate Precursors For Depositing Metal-Containing Films App 20130066082 - Norman; John Anthony Thomas ;   et al. | 2013-03-14 |
Metal-Enolate Precursors For Depositing Metal-Containing Films App 20130011579 - Norman; John Anthony Thomas ;   et al. | 2013-01-10 |
High coordination sphere group 2 metal .beta.-diketiminate precursors Grant 8,313,807 - Norman , et al. November 20, 2 | 2012-11-20 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants Grant 8,293,001 - Vrtis , et al. October 23, 2 | 2012-10-23 |
Process for selectively depositing copper thin films on substrates with copper and ruthenium areas via vapor deposition Grant 8,283,485 - Norman October 9, 2 | 2012-10-09 |
Copper precursors for thin film deposition Grant 8,263,795 - Norman , et al. September 11, 2 | 2012-09-11 |
Complexes Of Imidazole Ligands App 20120121806 - Norman; John Anthony Thomas ;   et al. | 2012-05-17 |
Low temperature thermal conductive inks Grant 8,143,431 - Norman , et al. March 27, 2 | 2012-03-27 |
Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors App 20120035351 - Norman; John Anthony Thomas ;   et al. | 2012-02-09 |
Liquid Composition Containing Aminoether For Deposition Of Metal-containing Films App 20110212629 - Ivanov; Sergei Vladimirovich ;   et al. | 2011-09-01 |
Methods for depositing metal films onto diffusion barrier layers by CVD or ALD processes Grant 7,985,449 - Garg , et al. July 26, 2 | 2011-07-26 |
Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films With Low Dielectric Constants App 20110143032 - Vrtis; Raymond Nicholas ;   et al. | 2011-06-16 |
Liquid Precursor for Depositing Group 4 Metal Containing Films App 20110135838 - Lei; Xinjian ;   et al. | 2011-06-09 |
Volatile Group 2 Metal Precursors App 20110120875 - Norman; John Anthony Thomas | 2011-05-26 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants Grant 7,943,195 - Vrtis , et al. May 17, 2 | 2011-05-17 |
Materials for adhesion enhancement of copper film on diffusion barriers Grant 7,919,409 - Cheng , et al. April 5, 2 | 2011-04-05 |
Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides Grant 7,754,906 - Norman , et al. July 13, 2 | 2010-07-13 |
High Coordination Sphere Group 2 Metal B-Diketiminate Precursors App 20100173075 - Norman; John Anthony Thomas ;   et al. | 2010-07-08 |
Volatile Group 2 Metal 1,3,5-Triazapentadienate Compounds App 20100130779 - Norman; John Anthony Thomas | 2010-05-27 |
Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films App 20100119726 - Lei; Xinjian ;   et al. | 2010-05-13 |
Materials for Adhesion Enhancement of Copper Film on Diffusion Barriers App 20100038785 - Cheng; Hansong ;   et al. | 2010-02-18 |
Copper Precursors for Thin Film Deposition App 20090114874 - Norman; John Anthony Thomas ;   et al. | 2009-05-07 |
Diffusion barrier layers and processes for depositing metal films thereupon by CVD or ALD processes Grant 7,524,533 - Garg , et al. April 28, 2 | 2009-04-28 |
Process for Forming Continuous Copper Thin Films Via Vapor Deposition App 20080318418 - Norman; John Anthony Thomas | 2008-12-25 |
Low Temperature Thermal Conductive Inks App 20080305268 - Norman; John Anthony Thomas ;   et al. | 2008-12-11 |
Porogens, Porogenated Precursors and Methods for Using the Same to Provide Porous Organosilica Glass Films with Low Dielectric Constants App 20080271640 - Vrtis; Raymond Nicholas ;   et al. | 2008-11-06 |
Metal Precursor Solutions For Chemical Vapor Deposition App 20080254218 - Lei; Xinjian ;   et al. | 2008-10-16 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants Grant 7,384,471 - Vrtis , et al. June 10, 2 | 2008-06-10 |
Methods For Depositing Metal Films On Diffusion Barrier Layers By CVD Processes App 20080075855 - Garg; Diwakar ;   et al. | 2008-03-27 |
Methods for depositing metal films on diffusion barrier layers by CVD or ALD processes Grant 7,311,946 - Garg , et al. December 25, 2 | 2007-12-25 |
Diffusion Barrier Layers and Methods Comprising for Depositing Metal Films by CVD or ALD Processes App 20070190779 - Garg; Diwakar ;   et al. | 2007-08-16 |
Volatile metal .beta.-ketoiminate and metal .beta.-diiminate complexes Grant 7,205,422 - Norman April 17, 2 | 2007-04-17 |
Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides App 20070082500 - Norman; John Anthony Thomas ;   et al. | 2007-04-12 |
Volatile metal beta-ketoiminate and metal beta-diiminate complexes App 20060145142 - Norman; John Anthony Thomas | 2006-07-06 |
Volatile metal .beta.-ketoiminate complexes Grant 7,034,169 - Norman April 25, 2 | 2006-04-25 |
Process for atomic layer deposition of metal films Grant 6,869,876 - Norman , et al. March 22, 2 | 2005-03-22 |
Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants Grant 6,846,515 - Vrtis , et al. January 25, 2 | 2005-01-25 |
Copper CVD precursors with enhanced adhesion properties Grant 6,838,573 - Farnia , et al. January 4, 2 | 2005-01-04 |
Diffusion barrier layers and methods comprising for depositing metal films by CVD or ALD processes App 20040234704 - Garg, Diwakar ;   et al. | 2004-11-25 |
Volatile precursors for deposition of metals and metal-containing films Grant 6,818,783 - Norman , et al. November 16, 2 | 2004-11-16 |
Diffusion barrier layers and methods comprising same for depositing metal films by CVD or ALD processes App 20040219369 - Garg, Diwakar ;   et al. | 2004-11-04 |
Precursors for metal containing films App 20040215030 - Norman, John Anthony Thomas | 2004-10-28 |
Process for atomic layer deposition of metal films App 20040087143 - Norman, John Anthony Thomas ;   et al. | 2004-05-06 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants App 20030232137 - Vrtis, Raymond Nicholas ;   et al. | 2003-12-18 |
Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants App 20030198742 - Vrtis, Raymond Nicholas ;   et al. | 2003-10-23 |
Volatile precursors for deposition of metals and metal-containing films App 20030135061 - Norman, John Anthony Thomas ;   et al. | 2003-07-17 |
Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films Grant 6,552,209 - Lei , et al. April 22, 2 | 2003-04-22 |
Process for metal metalloid oxides and nitrides with compositional gradients Grant 6,537,613 - Senzaki , et al. March 25, 2 | 2003-03-25 |
Liquid precursor mixtures for deposition of multicomponent metal containing materials Grant 6,503,561 - Senzaki , et al. January 7, 2 | 2003-01-07 |
Volatile precursors for deposition of metals and metal-containing films App 20020013487 - Norman, John Anthony Thomas ;   et al. | 2002-01-31 |
Synthesis of tantalum nitride Grant 6,319,567 - Senzaki , et al. November 20, 2 | 2001-11-20 |
Liquid precursor mixtures for deposition of multicomponent metal containing materials Grant 6,238,734 - Senzaki , et al. May 29, 2 | 2001-05-29 |