loadpatents
Patent applications and USPTO patent grants for Norioka; Setsuo.The latest application filed is for "inspection device using scanning electron microscope".
Patent | Date |
---|---|
Testing apparatus using scanning electron microscope Grant 6,953,939 - Abe , et al. October 11, 2 | 2005-10-11 |
Method of inspecting accuracy in stitching pattern elements Grant 6,904,164 - Norioka , et al. June 7, 2 | 2005-06-07 |
System and method for electron beam irradiation Grant 6,831,278 - Yamamoto , et al. December 14, 2 | 2004-12-14 |
Inspection device using scanning electron microscope App 20040144928 - Abe, Tetsuo ;   et al. | 2004-07-29 |
Electron beam irradiation apparatus and electron beam irradiating method Grant 6,737,660 - Miura , et al. May 18, 2 | 2004-05-18 |
System and method for electron beam irradiation Grant 6,734,437 - Norioka , et al. May 11, 2 | 2004-05-11 |
System and method for electron beam irradiation App 20030178582 - Norioka, Setsuo ;   et al. | 2003-09-25 |
Electron beam irradiation apparatus and electron beam irradiating method App 20030178581 - Miura, Yoshihisa ;   et al. | 2003-09-25 |
System and method for electron beam irradiation App 20030116718 - Yamamoto, Masanobu ;   et al. | 2003-06-26 |
Method of inspecting accuracy in stitching pattern elements App 20010053243 - Norioka, Setsuo ;   et al. | 2001-12-20 |
Electron beam instrument Grant 5,185,530 - Norioka , et al. February 9, 1 | 1993-02-09 |
Scanning electron microscope Grant 4,990,778 - Norioka February 5, 1 | 1991-02-05 |
Electron beam scanning device Grant 4,547,669 - Nakagawa , et al. October 15, 1 | 1985-10-15 |
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