Patent | Date |
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Light Source Apparatus And Image Projection Apparatus App 20220019136 - Nomoto; Makoto | 2022-01-20 |
Cooling Device, Semiconductor Manufacturing Apparatus, And Semiconductor Manufacturing Method App 20210404711 - Nomoto; Makoto | 2021-12-30 |
Light source apparatus and projector Grant 11,150,546 - Nomoto October 19, 2 | 2021-10-19 |
Cooling Apparatus, Light Source Apparatus, And Image Projection Apparatus App 20210318597 - Nomoto; Makoto | 2021-10-14 |
Light Source Apparatus And Projector App 20210018826 - Nomoto; Makoto | 2021-01-21 |
Cooling Device, Semiconductor Manufacturing Apparatus, And Semiconductor Manufacturing Method App 20200318230 - Nomoto; Makoto | 2020-10-08 |
Illumination apparatus and image display apparatus using the illumination apparatus Grant 10,191,359 - Nomoto Ja | 2019-01-29 |
Drive Unit, Lithography Apparatus, Cooling Method, And Article Manufacturing Method App 20180364593 - Nomoto; Makoto | 2018-12-20 |
Image projection apparatus Grant 10,108,075 - Nomoto October 23, 2 | 2018-10-23 |
Image Projection Apparatus App 20180267393 - Nomoto; Makoto | 2018-09-20 |
Image Display Apparatus And Image Display System Using The Same App 20180224728 - Otani; Akihiro ;   et al. | 2018-08-09 |
Illumination Apparatus And Image Display Apparatus Using The Illumination Apparatus App 20180149953 - Nomoto; Makoto | 2018-05-31 |
Image display apparatus Grant 9,664,987 - Nomoto May 30, 2 | 2017-05-30 |
Image Display Apparatus App 20160142688 - Nomoto; Makoto | 2016-05-19 |
Exposure apparatus having an element to be cooled Grant 8,373,844 - Nomoto February 12, 2 | 2013-02-12 |
Exposure apparatus and device manufacturing method Grant 7,978,305 - Nomoto July 12, 2 | 2011-07-12 |
Exposure Apparatus Having An Element To Be Cooled App 20100073649 - Nomoto; Makoto | 2010-03-25 |
Exposure apparatus and device manufacturing method Grant 7,679,716 - Nomoto March 16, 2 | 2010-03-16 |
Exposure Apparatus And Device Manufacturing Method App 20090002650 - Nomoto; Makoto | 2009-01-01 |
Exposure apparatus Grant 7,352,437 - Nomoto April 1, 2 | 2008-04-01 |
Exposure apparatus and device manufacturing method Grant 7,317,505 - Aichi , et al. January 8, 2 | 2008-01-08 |
Exposure apparatus, and device manufacturing method Grant 7,283,199 - Aichi , et al. October 16, 2 | 2007-10-16 |
Exposure Apparatus And Device Manufacturing Method App 20070089853 - Nomoto; Makoto | 2007-04-26 |
Temperature adjusting system and exposure apparatus incorporating the same Grant 7,148,955 - Nomoto December 12, 2 | 2006-12-12 |
Exposure Apparatus App 20060176455 - NOMOTO; MAKOTO | 2006-08-10 |
Temperature adjusting system and expsoure apparatus incorporating the same App 20060061741 - Nomoto; Makoto | 2006-03-23 |
Exposure apparatus, and device manufacturing method App 20060061745 - Aichi; Shintaro ;   et al. | 2006-03-23 |
Temperature adjusting system and exposure apparatus incorporating the same Grant 6,987,554 - Nomoto January 17, 2 | 2006-01-17 |
Exposure apparatus and device manufacturing method App 20050110968 - Aichi, Shintaro ;   et al. | 2005-05-26 |
Temperature adjusting system and exposure apparatus incorporating the same App 20040182565 - Nomoto, Makoto | 2004-09-23 |