Patent | Date |
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Method for producing a structure on the surface of a substrate Grant 8,003,538 - Nolscher , et al. August 23, 2 | 2011-08-23 |
Methods of manufacturing semiconductor structures Grant 7,867,912 - Caspary , et al. January 11, 2 | 2011-01-11 |
Masks for lithographic imagings and methods for fabricating the same Grant 7,491,474 - Nolscher February 17, 2 | 2009-02-17 |
Method for exposing a semiconductor wafer by applying periodic movement to a component Grant 7,443,484 - Nolscher , et al. October 28, 2 | 2008-10-28 |
Method For Producing A Structure On The Surface Of A Substrate App 20080206681 - Nolscher; Christoph ;   et al. | 2008-08-28 |
Method for producing a structure on the surface of a substrate Grant 7,368,385 - Nolscher , et al. May 6, 2 | 2008-05-06 |
Phase shift mask Grant 7,361,434 - Nolscher April 22, 2 | 2008-04-22 |
Method for forming a structure element on a wafer by means of a mask and a trimming mask assigned hereto Grant 7,297,468 - Nolscher November 20, 2 | 2007-11-20 |
Exposing a semiconductor wafer using two different spectral wavelengths and adjusting for chromatic aberration Grant 7,286,207 - Nolscher , et al. October 23, 2 | 2007-10-23 |
Method for improving a simulation model of photolithographic projection Grant 7,207,030 - Kuchler , et al. April 17, 2 | 2007-04-17 |
Exposure system and method for operating an exposure system App 20070075276 - Nolscher; Christoph ;   et al. | 2007-04-05 |
Method for exposing a semiconductor wafer App 20060256314 - Nolscher; Christoph ;   et al. | 2006-11-16 |
Photolithographic imaging device and apparatus for generating an illumination distribution App 20060256313 - Renner; Kerstin ;   et al. | 2006-11-16 |
Method for exposing a semiconductor wafer App 20060244937 - Nolscher; Christoph ;   et al. | 2006-11-02 |
Lithography mask and methods for producing a lithography mask App 20060210887 - Henkel; Thomas ;   et al. | 2006-09-21 |
Method for optimizing the geometry of structural elements of a circuit design pattern and method for producing a photomask App 20060190850 - Kohle; Roderick ;   et al. | 2006-08-24 |
Photolithographic mask Grant 7,070,887 - Nolscher July 4, 2 | 2006-07-04 |
Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools Grant 7,011,936 - Nolscher , et al. March 14, 2 | 2006-03-14 |
Method of producing a structure on the surface of a substrate App 20060024621 - Nolscher; Christoph ;   et al. | 2006-02-02 |
Method for the photolithographic projection of a pattern onto a semiconductor wafer with an alternating phase mask App 20050287446 - Nolscher, Christoph | 2005-12-29 |
Masks for lithographic imagings and methods for fabricating the same App 20050238966 - Nolscher, Christoph | 2005-10-27 |
Method for transferring a layout of an integrated circuit level to a semiconductor substrate App 20050196689 - Nolscher, Christoph ;   et al. | 2005-09-08 |
Method for improving a simulation model of photolithographic projection App 20050114823 - Kuchler, Bernd ;   et al. | 2005-05-26 |
Phase shift mask App 20050084771 - Nolscher, Christoph | 2005-04-21 |
Method for forming a structure element on a wafer by means of a mask and a trimming mask assigned hereto App 20040137375 - Nolscher, Christoph | 2004-07-15 |
Method for determining and removing phase conflicts on alternating phase masks Grant 6,730,463 - Heissmeier , et al. May 4, 2 | 2004-05-04 |
Alternating phase mask Grant 6,680,151 - Heissmeier , et al. January 20, 2 | 2004-01-20 |
Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools App 20030143470 - Nolscher, Christoph ;   et al. | 2003-07-31 |
Photolithographic mask App 20030022074 - Nolscher, Christoph | 2003-01-30 |
Alternating phase mask App 20020192574 - Heissmeier, Michael ;   et al. | 2002-12-19 |
Method for determining and removing phase conflicts on alternating phase masks App 20020155362 - Heissmeier, Michael ;   et al. | 2002-10-24 |
Method for producing an alternating phase mask App 20020127480 - Mathuni, Josef ;   et al. | 2002-09-12 |
Method for operating a high-temperature fuel cell installation, and a high-temperature fuel cell installation Grant 6,162,556 - Vollmar , et al. December 19, 2 | 2000-12-19 |
Method and system for utilizing enthalpy contained in exhaust gases of low-temperature fuel cells Grant 6,162,554 - Nolscher , et al. December 19, 2 | 2000-12-19 |
PEM fuel cell Grant 6,010,798 - Hammerschmidt , et al. January 4, 2 | 2000-01-04 |
Process for operating a fuel cell installation and fuel cell installation for carrying out the process Grant 5,976,722 - Muller , et al. November 2, 1 | 1999-11-02 |