Nojiri; Kazuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nojiri; Kazuo.The latest application filed is for "atomic layer etching of gan and other iii-v materials".

Company Profile

0.26.17

Nojiri; Kazuo - Tokyo JP
Nojiri; Kazuo - Higashimurayama JP
Nojiri, Kazuo - Oume JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Atomic layer etching of GaN and other III-V materials Grant 10,056,264 - Yang , et al. August 21, 2	2018-08-21
ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS App 20160358782 - Yang; Wenbing ; et al.	2016-12-08
Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device Grant 7,737,023 - Uno , et al. June 15, 2	2010-06-15
Method Of Manufacture Of Semiconductor Integrated Circuit Device And Semiconductor Integrated Circuit Device App 20090011592 - Uno; Shouichi ; et al.	2009-01-08
Method of manufacture of semiconductor integrated circuit Grant 7,419,902 - Uno , et al. September 2, 2	2008-09-02
Methods for cleaning a substrate Grant 7,288,156 - Isago , et al. October 30, 2	2007-10-30
Method and apparatus for processing samples App 20070037292 - Kojima; Masayuki ; et al.	2007-02-15
Method and apparatus for processing samples Grant 7,132,293 - Torii , et al. November 7, 2	2006-11-07
Methods for cleaning a substrate App 20060112974 - Isago; Yoichi ; et al.	2006-06-01
Apparatus for cleaning a substrate Grant 7,004,181 - Isago , et al. February 28, 2	2006-02-28
Method and apparatus for processing samples Grant 6,989,228 - Kojima , et al. January 24, 2	2006-01-24
Method of manufacture of semiconductor integrated circuit App 20050186801 - Uno, Shouochi ; et al.	2005-08-25
Method and apparatus for processing samples App 20040219687 - Torii, Yoshimi ; et al.	2004-11-04
Semiconductor device and method of manufacturing the same Grant 6,774,020 - Fukada , et al. August 10, 2	2004-08-10
Ion current density measuring method and instrument, and semiconductor device manufacturing method App 20040092044 - Mise, Nobuyuki ; et al.	2004-05-13
Ion current density measuring method and instrument, and semiconductor device manufacturing method Grant 6,656,752 - Mise , et al. December 2, 2	2003-12-02
Apparatus for processing samples Grant 6,656,846 - Kojima , et al. December 2, 2	2003-12-02
Water supply apparatus and method thereof App 20030217762 - Kobayashi, Naoaki ; et al.	2003-11-27
Manufacturing method of semiconductor integrated circuit device Grant 6,607,988 - Yunogami , et al. August 19, 2	2003-08-19
Semiconductor device and method of manufacturing the same App 20030139031 - Fukada, Shinichi ; et al.	2003-07-24
Semiconductor device and method of manufacturing the same Grant 6,555,464 - Fukada , et al. April 29, 2	2003-04-29
Apparatus for processing samples Grant 6,537,415 - Kojima , et al. March 25, 2	2003-03-25
Water supplying apparatus and water supplying method App 20030041881 - Isago, Yoichi ; et al.	2003-03-06
Method of manufacturing a semiconductor integrated circuit Grant 6,451,665 - Yunogami , et al. September 17, 2	2002-09-17
Semiconductor device and method of manufacturing the same App 20020127848 - Fukada, Shinichi ; et al.	2002-09-12
Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio Grant 6,432,835 - Yunogami , et al. August 13, 2	2002-08-13
Method of manufacturing a semiconductor device App 20020076921 - Fukada, Shinichi ; et al.	2002-06-20
Apparatus for processing samples App 20020043340 - Kojima, Masayuki ; et al.	2002-04-18
Apparatus for processing samples App 20020043339 - Kojima, Masayuki ; et al.	2002-04-18
Apparatus for processing samples App 20020023720 - Kojima, Masayuki ; et al.	2002-02-28
Method and apparatus for processing samples App 20020013063 - Kojima, Masayuki ; et al.	2002-01-31
Method of manufacturing a semiconductor device Grant 6,340,632 - Fukada , et al. January 22, 2	2002-01-22
Manufacturing method of semiconductor integrated circuit device App 20010006245 - Yunogami, Takashi ; et al.	2001-07-05
Method of treating surface of sample Grant 6,191,045 - Yoshigai , et al. February 20, 2	2001-02-20
Plasma treatment method and manufacturing method of semiconductor device Grant 6,186,153 - Kitsunai , et al. February 13, 2	2001-02-13
Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same Grant 5,917,211 - Murata , et al. June 29, 1	1999-06-29
Method and apparatus for processing samples Grant 5,868,854 - Kojima , et al. February 9, 1	1999-02-09
Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same Grant 5,734,188 - Murata , et al. March 31, 1	1998-03-31
Process for fabricating a semiconductor integrated circuit device having the multi-layered fin structure Grant 5,661,061 - Usuami , et al. August 26, 1	1997-08-26
Plasma generator with mode restricting means Grant 5,646,489 - Kakehi , et al. July 8, 1	1997-07-08
Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves Grant 5,433,789 - Kakehi , et al. July 18, 1	1995-07-18
Sample processing method and apparatus Grant 5,200,017 - Kawasaki , et al. April 6, 1	1993-04-06
Method of removing residual corrosive compounds by plasma etching followed by washing Grant 5,007,981 - Kawasaki , et al. April 16, 1	1991-04-16

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