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Group Iv Element Containing Precursors And Deposition Of Group Iv Element Containing Films
App 20220205099 - KIM; Su-Hyun ; et al. | 2022-06-30 |
Area selective deposition of metal containing films
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Method Of Improving Step Coverage Using An Inhibitor Molecule For High Aspect Ratio Structures
App 20220119939 - NOH; Wontae ; et al. | 2022-04-21 |
Lanthanide precursors and deposition of lanthanide-containing films using the same
Grant 11,242,597 - Gatineau , et al. February 8, 2 | 2022-02-08 |
Group V Element-containing Film Forming Compositions And Vapor Deposition Of Group V Element-containing Film
App 20210189145 - NOH; Wontae ; et al. | 2021-06-24 |
Area selective deposition of metal containing films
App 20210189146 - NOH; Wontae ; et al. | 2021-06-24 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,895,012 - Gatineau , et al. January 19, 2 | 2021-01-19 |
Lanthanide Precursors And Deposition Of Lanthanide-containing Films Using The Same
App 20200149156 - GATINEAU; Satoko ; et al. | 2020-05-14 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20200149165 - NOH; Wontae ; et al. | 2020-05-14 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20200032397 - GATINEAU; Satoko ; et al. | 2020-01-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,465,289 - Gatineau , et al. No | 2019-11-05 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20190249305 - GATINEAU; Satoko ; et al. | 2019-08-15 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,364,259 - Kim , et al. | 2019-07-30 |
Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same
Grant 10,337,104 - Gatineau , et al. | 2019-07-02 |
Niobium-containing film forming compositions and vapor deposition of Niobium-containing films
Grant 10,174,423 - Lansalot-Matras , et al. J | 2019-01-08 |
Group 5 transition metal-containing compounds for vapor deposition of group 5 transition metal-containing films
Grant 10,106,887 - Lansalot-Matras , et al. October 23, 2 | 2018-10-23 |
Niobium-Nitride film forming compositions and vapor deposition of Niobium-Nitride films
Grant 10,023,462 - Lansalot-Matras , et al. July 17, 2 | 2018-07-17 |
Lanthanide Precursors And Deposition Of Lanthanide-containing Films Using The Same
App 20180187303 - GATINEAU; Satoko ; et al. | 2018-07-05 |
Niobium-containing Film Forming Compositions And Vapor Deposition Of Niobium-containing Films
App 20170298511 - LANSALOT-MATRAS; Clement ; et al. | 2017-10-19 |
Niobium-containing film forming compositions and vapor deposition of niobium-containing films
Grant 9,786,671 - Lansalot-Matras , et al. October 10, 2 | 2017-10-10 |
Tantalum-containing film forming compositions and vapor deposition of tantalum-containing films
Grant 9,748,249 - Lansalot-Matras , et al. August 29, 2 | 2017-08-29 |
Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films
Grant 9,711,347 - Pallem , et al. July 18, 2 | 2017-07-18 |
Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films
Grant 9,691,771 - Lansalot-Matras , et al. June 27, 2 | 2017-06-27 |
Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films
Grant 9,691,770 - Lansalot-Matras , et al. June 27, 2 | 2017-06-27 |
Niobium-nitride Film Forming Compositions And Vapor Deposition Of Niobium-nitride Films
App 20170152144 - Lansalot-Matras; Clement ; et al. | 2017-06-01 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107617 - GATINEAU; Satoko ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107618 - GATINEAU; Satoko ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107612 - NOH; Wontae ; et al. | 2017-04-20 |
Zirconium, Hafnium, Titanium Precursors And Deposition Of Group 4 Containing Films Using The Same
App 20170107623 - KIM; Daehyeon ; et al. | 2017-04-20 |
Group 5 cyclopentadienyl transition metal-containing precursors for deposition of group 5 transition metal-containing films
Grant 9,518,075 - Lansalot-Matras , et al. December 13, 2 | 2016-12-13 |
Niobium-containing Film Forming Compositions And Vapor Deposition Of Niobium-containing Films
App 20160307902 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Vanadium-containing Film Forming Compositions And Vapor Deposition Of Vanadium-containing Films
App 20160304542 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Vanadium-containing Film Forming Compositions And Vapor Deposition Of Vanadium-containing Films
App 20160307905 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Niobium-containing Film Forming Compositions And Vapor Deposition Of Niobium-containing Films
App 20160307904 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Tantalum-containing Film Forming Compositions And Vapor Deposition Of Tantalum-containing Films
App 20160307903 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Tantalum-containing Film Forming Compositions And Vapor Deposition Of Tantalum-containing Films
App 20160307708 - LANSALOT-MATRAS; Clement ; et al. | 2016-10-20 |
Preparation Of Lanthanide-containing Precursors And Deposition Of Lanthanide-containing Films
App 20160293409 - PALLEM; Venkateswara R. ; et al. | 2016-10-06 |
Group 5 Transition Metal-containing Compounds For Vapor Deposition Of Group 5 Transition Metal-containing Films
App 20160251756 - Lansalot-Matras; Clement ; et al. | 2016-09-01 |
Preparation of cerium-containing precursor and deposition of cerium-containing films
Grant 9,384,963 - Pallem , et al. July 5, 2 | 2016-07-05 |
Tantalum- Or Vanadium-containing Film Forming Compositions And Vapor Deposition Of Tantalum- Or Vanadium-containing Films
App 20160083405 - LANSALOT-MATRAS; Clement ; et al. | 2016-03-24 |
Preparation Of Cerium-containing Precursor And Deposition Of Cerium-containing Films
App 20140335702 - PALLEM; Venkateswara R. ; et al. | 2014-11-13 |
Preparation of cerium-containing precursors and deposition of cerium-containing films
Grant 8,809,849 - Pallem , et al. August 19, 2 | 2014-08-19 |
Preparation Of Cerium-containing Precursors And Deposition Of Cerium-containing Films
App 20140113456 - PALLEM; Venkateswara R. ; et al. | 2014-04-24 |
Group 5 Cyclopentadienyl Transition Metal-containing Precursors For Deposition Of Group 5 Transition Metal-cointaining Films
App 20140106071 - LANSALOT-MATRAS; Clement ; et al. | 2014-04-17 |
Preparation Of Cerium-containing Precursors And Deposition Of Cerium-containing Films
App 20120156373 - PALLEM; Venkateswara R. ; et al. | 2012-06-21 |
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