NOGUCHI; Minori

Patent Applications and Registrations

Patent applications and USPTO patent grants for NOGUCHI; Minori.The latest application filed is for "walking mode display method, walking mode display system and walking mode analyzer".

Company Profile

1.115.97

NOGUCHI; Minori - Tokyo JP
Noguchi; Minori - Mitsukaidou JP
Noguchi; Minori - Joso JP
Noguchi; Minori - Hitachinaka JP
Noguchi; Minori - Mitsukaido N/A JP
Noguchi; Minori - Yokohama N/A JP
NOGUCHI; Minori - Yokahama JP
NOGUCHI; Minori - Yokohama-shi JP
Noguchi; Minori - Mizukaidou JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Walking Mode Display Method, Walking Mode Display System And Walking Mode Analyzer App 20210244317 - FUKUI; Daisuke ; et al.	2021-08-12
Support System For Specified Inspection, Support Method For Specified Inspection, And Non-transitory Computer Readable Medium App 20200278303 - TADA; Nobuyoshi ; et al.	2020-09-03
Surface inspection apparatus and method thereof Grant 9,551,670 - Ishimaru , et al. January 24, 2	2017-01-24
Inspection equipment and inspection method Grant 9,261,475 - Makuuchi , et al. February 16, 2	2016-02-16
Inspection apparatus Grant 8,823,929 - Ito , et al. September 2, 2	2014-09-02
Defect inspection system Grant 8,804,109 - Aiko , et al. August 12, 2	2014-08-12
Surface Inspection Apparatus And Method Thereof App 20140218723 - ISHIMARU; Ichiro ; et al.	2014-08-07
Apparatus and method for inspecting defect in object surface Grant 8,760,643 - Uto , et al. June 24, 2	2014-06-24
Surface inspection apparatus and method thereof Grant 8,729,514 - Ishimaru , et al. May 20, 2	2014-05-20
Inspection Apparatus App 20140002810 - ITO; Masaaki ; et al.	2014-01-02
Apparatus And Method For Inspecting Defect In Object Surface App 20130269126 - UTO; Sachio ; et al.	2013-10-17
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,559,000 - Hamamatsu , et al. October 15, 2	2013-10-15
Inspection Apparatus And Inspection System App 20130250297 - Ito; Masaaki ; et al.	2013-09-26
Inspection apparatus Grant 8,542,354 - Ito , et al. September 24, 2	2013-09-24
Defects inspecting apparatus and defects inspecting method Grant 8,508,727 - Uto , et al. August 13, 2	2013-08-13
Inspection Equipment and Inspection Method App 20130187667 - Makuuchi; Masami ; et al.	2013-07-25
Defect Inspection System App 20130182100 - AIKO; Kenji ; et al.	2013-07-18
Apparatus and method for inspecting defect on object surface Grant 8,482,728 - Uto , et al. July 9, 2	2013-07-09
Pattern defect inspection apparatus and method Grant 8,467,048 - Nishiyama , et al. June 18, 2	2013-06-18
Inspection Apparatus And Inspection Method App 20130148113 - Oku; Mizuki ; et al.	2013-06-13
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20120312104 - HAMAMATSU; Akira ; et al.	2012-12-13
Inspection Device And Inspection Method App 20120313650 - Kawaguchi; Hiroshi ; et al.	2012-12-13
Defect inspection system Grant 8,319,960 - Aiko , et al. November 27, 2	2012-11-27
Pattern Defect Inspection Apparatus And Method App 20120268734 - NISHIYAMA; Hidetoshi ; et al.	2012-10-25
Defects Inspecting Apparatus And Defects Inspecting Method App 20120262709 - Uto; Sachio ; et al.	2012-10-18
Method of apparatus for detecting particles on a specimen Grant 8,289,507 - Hamamatsu , et al. October 16, 2	2012-10-16
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,274,651 - Hamamatsu , et al. September 25, 2	2012-09-25
Inspection method and inspection apparatus Grant 8,269,959 - Hamamatsu , et al. September 18, 2	2012-09-18
System for monitoring foreign particles, process processing apparatus and method of electronic commerce Grant 8,254,662 - Nishiyama , et al. August 28, 2	2012-08-28
Pattern defect inspection apparatus and method Grant 8,233,145 - Nishiyama , et al. July 31, 2	2012-07-31
Defect inspection method and defect inspection apparatus Grant 8,228,496 - Chikamatsu , et al. July 24, 2	2012-07-24
Defects inspecting apparatus and defects inspecting method Grant 8,228,495 - Uto , et al. July 24, 2	2012-07-24
Inspection Method And Inspection Apparatus App 20120133929 - HAMAMATSU; Akira ; et al.	2012-05-31
Surface Inspection Apparatus And Method Thereof App 20120069329 - ISHIMARU; Ichiro ; et al.	2012-03-22
Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device App 20120062890 - Nishiyama; Hidetoshi ; et al.	2012-03-15
Defect inspecting method and apparatus Grant 8,134,701 - Chikamatsu , et al. March 13, 2	2012-03-13
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20120006131 - Hamamatsu; Akira ; et al.	2012-01-12
Inspection method and inspection apparatus Grant 8,094,295 - Hamamatsu , et al. January 10, 2	2012-01-10
System For Monitoring Foreign Particles, Process Processing Apparatus And Method Of Electronic Commerce App 20120002196 - Nishiyama; Hidetoshi ; et al.	2012-01-05
Defects Inspecting Apparatus And Defects Inspecting Method App 20110310382 - UTO; Sachio ; et al.	2011-12-22
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 8,072,597 - Nishiyama , et al. December 6, 2	2011-12-06
System for monitoring foreign particles, process processing apparatus and method of electronic commerce Grant 8,045,148 - Nishiyama , et al. October 25, 2	2011-10-25
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,040,503 - Hamamatsu , et al. October 18, 2	2011-10-18
Method Of Apparatus For Detecting Particles On A Specimen App 20110228258 - HAMAMATSU; Akira ; et al.	2011-09-22
Defects inspecting apparatus and defects inspecting method Grant 8,013,989 - Uto , et al. September 6, 2	2011-09-06
Surface inspection apparatus and method thereof Grant 7,952,085 - Ishimaru , et al. May 31, 2	2011-05-31
Method of apparatus for detecting particles on a specimen Grant 7,952,700 - Hamamatsu , et al. May 31, 2	2011-05-31
Defect inspection apparatus and defect inspection method Grant 7,953,567 - Shimura , et al. May 31, 2	2011-05-31
Method of detecting defects on an object Grant 7,940,383 - Noguchi , et al. May 10, 2	2011-05-10
Method for inspecting defect and apparatus for inspecting defect Grant 7,903,244 - Hamamatsu , et al. March 8, 2	2011-03-08
Method Of Apparatus For Detecting Particles On A Specimen App 20110032515 - HAMAMATSU; Akira ; et al.	2011-02-10
Defect inspection method and defect inspection apparatus Grant 7,847,927 - Chikamatsu , et al. December 7, 2	2010-12-07
Defect Inspection System App 20100271473 - AIKO; Kenji ; et al.	2010-10-28
Defect Inspection Method and Defect Inspection Apparatus App 20100271627 - CHIKAMATSU; Shuichi ; et al.	2010-10-28
Method of apparatus for detecting particles on a specimen Grant 7,817,261 - Hamamatsu , et al. October 19, 2	2010-10-19
Defects Inspecting Apparatus And Defects Inspecting Method App 20100259751 - UTO; Sachio ; et al.	2010-10-14
Pattern Defect Inspection Apparatus And Method App 20100225903 - NISHIYAMA; Hidetoshi ; et al.	2010-09-09
Defect Inspecting Apparatus App 20100214561 - CHIKAMATSU; Shuichi ; et al.	2010-08-26
Defects inspecting apparatus and defects inspecting method Grant 7,768,634 - Uto , et al. August 3, 2	2010-08-03
Pattern defect inspection apparatus and method Grant 7,746,453 - Nishiyama , et al. June 29, 2	2010-06-29
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20100140474 - HAMAMATSU; Akira ; et al.	2010-06-10
Defect inspecting apparatus Grant 7,733,475 - Chikamatsu , et al. June 8, 2	2010-06-08
Defect inspection system Grant 7,733,474 - Aiko , et al. June 8, 2	2010-06-08
Defect Inspection Apparatus and Defect Inspection Method App 20100106443 - Shimura; Kei ; et al.	2010-04-29
Method And Apparatus For Detecting Defects App 20100103409 - OHSHIMA; Yoshimasa ; et al.	2010-04-29
Apparatus And Method For Testing Defects App 20100088042 - NOGUCHI; Minori ; et al.	2010-04-08
Apparatus and method for testing defects Grant 7,692,779 - Noguchi , et al. April 6, 2	2010-04-06
Defect inspection apparatus and defect inspection method Grant 7,672,799 - Shimura , et al. March 2, 2	2010-03-02
Inspection Method And Inspection Apparatus App 20100002227 - HAMAMATSU; Akira ; et al.	2010-01-07
Method and apparatus for detecting defects Grant 7,643,139 - Ohshima , et al. January 5, 2	2010-01-05
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,643,138 - Hamamatsu , et al. January 5, 2	2010-01-05
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20090323054 - HAMAMATSU; Akira ; et al.	2009-12-31
Apparatus and method for testing defects Grant 7,639,350 - Noguchi , et al. December 29, 2	2009-12-29
Exposure apparatus and method Grant 7,604,925 - Noguchi , et al. October 20, 2	2009-10-20
Exposure apparatus and method Grant 7,598,020 - Noguchi , et al. October 6, 2	2009-10-06
Inspection method and inspection apparatus Grant 7,586,593 - Hamamatsu , et al. September 8, 2	2009-09-08
Method for inspecting defect and apparatus for inspecting defect Grant 7,586,594 - Hamamatsu , et al. September 8, 2	2009-09-08
Defect Inspecting Apparatus App 20090207405 - CHIKAMATSU; Shuichi ; et al.	2009-08-20
Inspection Apparatus App 20090202138 - Ito; Masaaki ; et al.	2009-08-13
System For Monitoring Foreign Particles, Process Processing Apparatus And Method Of Electronic Commerce App 20090177413 - Nishiyama; Hidetoshi ; et al.	2009-07-09
Defect inspecting apparatus Grant 7,535,561 - Chikamatsu , et al. May 19, 2	2009-05-19
Surface Inspection Apparatus And Method Thereof App 20090103078 - ISHIMARU; Ichiro ; et al.	2009-04-23
Apparatus And Method For Inspecting Defect In Object Surface App 20090103079 - UTO; Sachio ; et al.	2009-04-23
Apparatus and method for inspecting defects Grant 7,511,806 - Hamamatsu , et al. March 31, 2	2009-03-31
System for monitoring foreign particles, process processing apparatus and method of electronic commerce Grant 7,499,157 - Nishiyama , et al. March 3, 2	2009-03-03
Defects Inspecting Apparatus And Defects Inspecting Method App 20090033924 - Uto; Sachio ; et al.	2009-02-05
Inspecting Device And Inspecting Method App 20080297786 - Fukushima; Hideki ; et al.	2008-12-04
Defect inspection system App 20080291436 - Aiko; Kenji ; et al.	2008-11-27
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20080291437 - Hamamatsu; Akira ; et al.	2008-11-27
Apparatus and method for testing defects Grant 7,443,496 - Noguchi , et al. October 28, 2	2008-10-28
Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device App 20080246964 - NISHIYAMA; Hidetoshi ; et al.	2008-10-09
Defect Inspection Method and Defect Inspection Apparatus App 20080204736 - Chikamatsu; Shuichi ; et al.	2008-08-28
Method Of Apparatus For Detecting Particles On A Specimen App 20080204724 - Hamamatsu; Akira ; et al.	2008-08-28
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,417,723 - Hamamatsu , et al. August 26, 2	2008-08-26
Surface inspection apparatus and method thereof Grant 7,417,244 - Ishimaru , et al. August 26, 2	2008-08-26
Defect detector and defect detecting method Grant 7,417,721 - Uto , et al. August 26, 2	2008-08-26
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,411,207 - Nishiyama , et al. August 12, 2	2008-08-12
Apparatus And Method For Inspecting Defects App 20080117415 - Hamamatsu; Akira ; et al.	2008-05-22
Method of apparatus for detecting particles on a specimen Grant 7,369,223 - Hamamatsu , et al. May 6, 2	2008-05-06
Defect Inspection Apparatus and Defect Inspection Method App 20080059094 - SHIMURA; Kei ; et al.	2008-03-06
Semiconductor device inspection method Grant 7,332,359 - Hamamatsu , et al. February 19, 2	2008-02-19
Inspection method and inspection apparatus Grant 7,315,363 - Hamamatsu , et al. January 1, 2	2008-01-01
Apparatus and method for inspecting defects Grant 7,315,366 - Hamamatsu , et al. January 1, 2	2008-01-01
Method And Its Apparatus For Inspecting Particles Or Defects Of A Semiconductor Device App 20070265797 - Nishiyama; Hidetoshi ; et al.	2007-11-15
Method and apparatus for inspecting particles or defects of a semiconductor device App 20070257214 - Nishiyama; Hidetoshi ; et al.	2007-11-08
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20070247616 - HAMAMATSU; AKIRA ; et al.	2007-10-25
Exposure apparatus and method Grant 7,277,155 - Noguchi , et al. October 2, 2	2007-10-02
Defect inspecting apparatus App 20070216896 - Chikamatsu; Shuichi ; et al.	2007-09-20
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 7,271,908 - Noguchi , et al. September 18, 2	2007-09-18
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,262,425 - Nishiyama , et al. August 28, 2	2007-08-28
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,256,412 - Nishiyama , et al. August 14, 2	2007-08-14
Method for inspecting defect and apparatus for inspecting defect Grant 7,248,352 - Hamamatsu , et al. July 24, 2	2007-07-24
System for monitoring foreign particles, process processing apparatus and method of electronic commerce App 20070165212 - Nishiyama; Hidetoshi ; et al.	2007-07-19
Surface inspection apparatus and method thereof Grant 7,242,016 - Ishimaru , et al. July 10, 2	2007-07-10
Apparatus and method for inspecting defects App 20070153264 - Hamamatsu; Akira ; et al.	2007-07-05
Apparatus And Method For Testing Defects App 20070146697 - Noguchi; Minori ; et al.	2007-06-28
Apparatus And Method For Testing Defects App 20070146696 - Noguchi; Minori ; et al.	2007-06-28
Method and system for inspecting electronic circuit pattern Grant 7,231,079 - Okuda , et al. June 12, 2	2007-06-12
Surface inspection apparatus and method thereof App 20070121108 - Ishimaru; Ichiro ; et al.	2007-05-31
Inspection method and inspection apparatus App 20070070339 - Hamamatsu; Akira ; et al.	2007-03-29
System for monitoring foreign particles, process processing apparatus and method of electronic commerce Grant 7,196,785 - Nishiyama , et al. March 27, 2	2007-03-27
Apparatus and method for inspecting defects Grant 7,187,438 - Hamamatsu , et al. March 6, 2	2007-03-06
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 7,177,020 - Morioka , et al. February 13, 2	2007-02-13
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20070001132 - Nishiyama; Hidetoshi ; et al.	2007-01-04
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,115,892 - Nishiyama , et al. October 3, 2	2006-10-03
Method of inspecting a semiconductor device and an apparatus thereof App 20060215153 - Hamamatsu; Akira ; et al.	2006-09-28
Apparatus and method for testing defects Grant 7,098,055 - Noguchi , et al. August 29, 2	2006-08-29
Defect detector and defect detecting method App 20060124874 - Uto; Sachio ; et al.	2006-06-15
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,061,602 - Hamamatsu , et al. June 13, 2	2006-06-13
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20060091332 - Nishiyama; Hidetoshi ; et al.	2006-05-04
Apparatus and method for testing defects Grant 7,037,735 - Noguchi , et al. May 2, 2	2006-05-02
Method and apparatus for detecting defects App 20060068512 - Ohshima; Yoshimasa ; et al.	2006-03-30
Exposure apparatus and method Grant 7,012,671 - Noguchi , et al. March 14, 2	2006-03-14
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,998,630 - Nishiyama , et al. February 14, 2	2006-02-14
Apparatus and method for testing defects App 20060030059 - Noguchi; Minori ; et al.	2006-02-09
Apparatus and method for testing defects App 20060030060 - Noguchi; Minori ; et al.	2006-02-09
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20050264798 - Nishiyama, Hidetoshi ; et al.	2005-12-01
Method and apparatus for detecting defects App 20050264797 - Nakano, Hiroyuki ; et al.	2005-12-01
Method of apparatus for detecting particles on a specimen App 20050213086 - Hamamatsu, Akira ; et al.	2005-09-29
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20050206898 - Noguchi, Minori ; et al.	2005-09-22
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20050206887 - Morioka, Hiroshi ; et al.	2005-09-22
Exposure apparatus and method App 20050196713 - Noguchi, Minori ; et al.	2005-09-08
Method of inspecting a semiconductor device and an apparatus thereof App 20050196033 - Hamamatsu, Akira ; et al.	2005-09-08
Exposure apparatus and method App 20050196705 - Noguchi, Minori ; et al.	2005-09-08
Exposure apparatus and method App 20050191583 - Noguchi, Minori ; et al.	2005-09-01
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,936,835 - Nishiyama , et al. August 30, 2	2005-08-30
Surface inspection apparatus and method thereof App 20050185172 - Ishimaru, Ichiro ; et al.	2005-08-25
Method and apparatus for reviewing defects App 20050122508 - Uto, Sachio ; et al.	2005-06-09
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Grant 6,897,956 - Noguchi , et al. May 24, 2	2005-05-24
Surface inspection apparatus and method thereof Grant 6,894,302 - Ishimaru , et al. May 17, 2	2005-05-17
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 6,894,773 - Morioka , et al. May 17, 2	2005-05-17
Method of inspecting a semiconductor device and an apparatus thereof Grant 6,888,959 - Hamamatsu , et al. May 3, 2	2005-05-03
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20050024633 - Nishiyama, Hidetoshi ; et al.	2005-02-03
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,841,403 - Tanaka , et al. January 11, 2	2005-01-11
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,806,970 - Hirose , et al. October 19, 2	2004-10-19
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,797,975 - Nishiyama , et al. September 28, 2	2004-09-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,797,526 - Tanaka , et al. September 28, 2	2004-09-28
Method for inspecting defect and apparatus for inspecting defect App 20040160599 - Hamamatsu, Akira ; et al.	2004-08-19
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,753,972 - Hirose , et al. June 22, 2	2004-06-22
Inspection method and inspection apparatus App 20040105093 - Hamamatsu, Akira ; et al.	2004-06-03
Apparatus for detecting foreign particle and defect and the same method Grant 6,731,384 - Ohshima , et al. May 4, 2	2004-05-04
Thin film thickness measuring method and apparatus, and mehtod and apparatus for manufacturing a thin film device using the same App 20040070773 - Hirose, Takenori ; et al.	2004-04-15
System for monitoring foreign particles, process processing apparatus and method of electronic commerce App 20040021856 - Nishiyama, Hidetoshi ; et al.	2004-02-05
Image classification method, observation method, and apparatus thereof with different stage moving velocities Grant 6,657,221 - Nakagaki , et al. December 2, 2	2003-12-02
Apparatus and method for inspecting defects Grant 6,654,112 - Noguchi , et al. November 25, 2	2003-11-25
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system Grant 6,650,409 - Noguchi , et al. November 18, 2	2003-11-18
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device App 20030160960 - Noguchi, Minori ; et al.	2003-08-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030138978 - Tanaka, Maki ; et al.	2003-07-24
Apparatus and method of inspecting foreign particle or defect on a sample Grant 6,597,448 - Nishiyama , et al. July 22, 2	2003-07-22
Exposure apparatus and method App 20030073045 - Noguchi, Minori ; et al.	2003-04-17
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030054573 - Tanaka, Maki ; et al.	2003-03-20
Semiconductor device inspection method App 20030022401 - Hamamatsu, Akira ; et al.	2003-01-30
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20030001120 - Nishiyama, Hidetoshi ; et al.	2003-01-02
Exposure apparatus and method Grant 6,485,891 - Noguchi , et al. November 26, 2	2002-11-26
Image classification method, obervation method, and apparatus thereof App 20020171051 - Nakagaki, Ryo ; et al.	2002-11-21
Apparatus and method for inspecting defects App 20020154297 - Noguchi, Minori ; et al.	2002-10-24
.Apparatus and method for inspecting defects App 20020122174 - Hamamatsu, Akira ; et al.	2002-09-05
Method and system for inspecting electronic circuit pattern App 20020113234 - Okuda, Hirohito ; et al.	2002-08-22
Optical apparatus for defect and particle size inspection Grant 6,411,377 - Noguchi , et al. June 25, 2	2002-06-25
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20020047097 - Nishiyama, Hidetoshi ; et al.	2002-04-25
Apparatus for detecting foreign particle and defect and the same method App 20020041374 - Ohshima, Yoshimasa ; et al.	2002-04-11
Method of inspecting a semiconductor device and an apparatus thereof App 20010048761 - Hamamatsu, Akira ; et al.	2001-12-06
Surface inspection apparatus and method thereof App 20010030296 - Ishimaru, Ichiro ; et al.	2001-10-18
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20010021015 - Morioka, Hiroshi ; et al.	2001-09-13
Apparatus and methods for determining the three-dimensional shape of an object using active illumination and relative blurring in two-images due to defocus Grant 6,229,913 - Nayar , et al. May 8, 2	2001-05-08
Exposure apparatus and method Grant 6,016,187 - Noguchi , et al. January 18, 2	2000-01-18
Exposure apparatus and method Grant 5,767,949 - Noguchi , et al. June 16, 1	1998-06-16
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 5,463,459 - Morioka , et al. October 31, 1	1995-10-31
Foreign particle inspection apparatus Grant 5,410,400 - Shishido , et al. April 25, 1	1995-04-25
Method and apparatus for processing a minute portion of a specimen Grant 5,333,495 - Yamaguchi , et al. August 2, 1	1994-08-02
Exposure apparatus and method Grant 5,329,333 - Noguchi , et al. July 12, 1	1994-07-12
Illumination method, illumination apparatus and projection exposure apparatus Grant 5,302,999 - Oshida , et al. April 12, 1	1994-04-12
Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line Grant 5,274,434 - Morioka , et al. December 28, 1	1993-12-28
Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process Grant 5,233,191 - Noguchi , et al. August 3, 1	1993-08-03
Method and apparatus for processing a minute portion of a specimen Grant 5,214,282 - Yamaguchi , et al. May 25, 1	1993-05-25
Apparatus and method for measuring the depth of fine engraved patterns Grant RE33,424 - Noguchi , et al. November 6, 1	1990-11-06
Method and apparatus for detecting abnormal patterns Grant 4,952,058 - Noguchi , et al. August 28, 1	1990-08-28
Method of and apparatus for detecting foreign substance Grant 4,922,308 - Noguchi , et al. May 1, 1	1990-05-01
Measuring apparatus for etching pits Grant 4,840,487 - Noguchi , et al. June 20, 1	1989-06-20
Apparatus for measuring difference in shallow level Grant 4,744,660 - Noguchi , et al. May 17, 1	1988-05-17
Apparatus for measuring the depth of fine engraved patterns Grant 4,615,620 - Noguchi , et al. October 7, 1	1986-10-07
Dry-etching apparatus Grant 4,487,678 - Noguchi , et al. December 11, 1	1984-12-11