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Laser annealing apparatus, laser annealing method, and mask Grant 11,004,682 - Matsushima , et al. May 11, 2 | 2021-05-11 |
Laser annealing method Grant 10,937,651 - Tanaka , et al. March 2, 2 | 2021-03-02 |
Laser irradiation apparatus, thin film transistor, and method of manufacturing thin film transistor Grant 10,896,817 - Mizumura , et al. January 19, 2 | 2021-01-19 |
Laser Annealing Device, Laser Annealing Method, And Active Matrix Substrate Production Method App 20200402823 - NODERA; NOBUTAKE ;   et al. | 2020-12-24 |
Thin film transistor, display device and method for manufacturing thin film transistor Grant 10,770,483 - Sugawara , et al. Sep | 2020-09-08 |
Positive type photosensitive siloxane composition, active matrix substrate, display apparatus, and method of manufacturing active matrix substrate Grant 10,620,538 - Nodera , et al. | 2020-04-14 |
Laser Annealing Apparatus, Laser Annealing Method, And Mask App 20200098557 - MATSUSHIMA; YOSHIAKI ;   et al. | 2020-03-26 |
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Laser Annealing Method App 20200043729 - Tanaka; Masakazu ;   et al. | 2020-02-06 |
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Thin Film Transistor, Display Device And Method For Manufacturing Thin Film Transistor App 20200006396 - SUGAWARA; YUTA ;   et al. | 2020-01-02 |
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Thin Film Transistor, Display Device And Method For Producing Thin Film Transistor App 20200006395 - SUGAWARA; YUTA ;   et al. | 2020-01-02 |
Method for manufacturing thin film transistor and display panel Grant 10,453,876 - Nodera , et al. Oc | 2019-10-22 |
Laser Irradiation Apparatus, Thin Film Transistor, And Method Of Manufacturing Thin Film Transistor App 20190267235 - Mizumura; Michinobu ;   et al. | 2019-08-29 |
Display apparatus and method of manufacturing display apparatus Grant 10,310,347 - Ishida , et al. | 2019-06-04 |
Thin Film Transistor, Display Device, And Thin Film Transistor Manufacturing Method App 20190140102 - MATSUSHIMA; YOSHIAKI ;   et al. | 2019-05-09 |
Thin film transistor and method of manufacturing thin film transistor Grant 10,263,121 - Matsushima , et al. | 2019-04-16 |
Method of manufacturing thin film transistor and thin film transistor Grant 10,256,350 - Utsugi , et al. | 2019-04-09 |
Thin film transistor and display panel Grant 10,243,003 - Nodera , et al. | 2019-03-26 |
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Thin Film Transistor And Method Of Manufacturing Thin Film Transistor App 20180212065 - Matsushima; Yoshiaki ;   et al. | 2018-07-26 |
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Display Apparatus And Method Of Manufacturing Display Apparatus App 20180196294 - Ishida; Shigeru ;   et al. | 2018-07-12 |
Thin film transistor and display panel Grant 10,008,606 - Ishida , et al. June 26, 2 | 2018-06-26 |
Method for Manufacturing Thin Film Transistor and Display Panel App 20180122839 - Nodera; Nobutake ;   et al. | 2018-05-03 |
This Film Transistor and Display Panel App 20180097120 - Ishida; Shigeru ;   et al. | 2018-04-05 |
Positive Type Photosensitive Siloxane Composition, Active Matrix Substrate, Display Apparatus, and Method of Manufacturing Active Matrix Substrate App 20180017869 - Nodera; Nobutake ;   et al. | 2018-01-18 |
Liquid crystal panel and method of forming groove in insulating film Grant 9,733,505 - Nodera , et al. August 15, 2 | 2017-08-15 |
Method for Manufacturing Thin Film Transistor, Thin Film Transistor and Display Panel App 20170162709 - Nodera; Nobutake ;   et al. | 2017-06-08 |
Thin Film Transistor and Display Panel App 20170154901 - Nodera; Nobutake ;   et al. | 2017-06-01 |
Active Matrix Substrate, Display Apparatus and Manufacturing Method for Active Matrix Substrate App 20160276374 - NODERA; Nobutake ;   et al. | 2016-09-22 |
Liquid Crystal Panel and Method of Forming Groove in Insulating Film App 20160109747 - Nodera; Nobutake ;   et al. | 2016-04-21 |
Film formation apparatus and method for using same Grant 8,697,578 - Nodera , et al. April 15, 2 | 2014-04-15 |
Film formation method in vertical batch CVD apparatus Grant 8,257,789 - Matsunaga , et al. September 4, 2 | 2012-09-04 |
Film formation method and apparatus for semiconductor process Grant 8,178,448 - Nodera , et al. May 15, 2 | 2012-05-15 |
Film formation method and apparatus for semiconductor process Grant 8,119,544 - Hasebe , et al. February 21, 2 | 2012-02-21 |
Film formation method and apparatus for semiconductor process Grant 8,080,290 - Hasebe , et al. December 20, 2 | 2011-12-20 |
Film formation apparatus and method for using same Grant 8,080,477 - Nodera , et al. December 20, 2 | 2011-12-20 |
Film formation apparatus and method for using the same Grant 7,993,705 - Nodera , et al. August 9, 2 | 2011-08-09 |
Film Formation Method And Apparatus For Semiconductor Process App 20100304574 - NODERA; Nobutake ;   et al. | 2010-12-02 |
Film Formation Method In Vertical Batch Cvd Apparatus App 20100136260 - Matsunaga; Masanobu ;   et al. | 2010-06-03 |
Film formation apparatus and method of using the same Grant 7,604,010 - Hasebe , et al. October 20, 2 | 2009-10-20 |
Film formation method and apparatus for semiconductor process App 20090191722 - Hasebe; Kazuhide ;   et al. | 2009-07-30 |
Film formation method and apparatus for semiconductor process App 20090181550 - Hasebe; Kazuhide ;   et al. | 2009-07-16 |
Film formation apparatus and method for using same App 20090124083 - Nodera; Nobutake ;   et al. | 2009-05-14 |
Vertical plasma processing apparatus and method for using same App 20090124087 - Nodera; Nobutake ;   et al. | 2009-05-14 |
Film formation apparatus for semiconductor process App 20090114156 - Nodera; Nobutake ;   et al. | 2009-05-07 |
Film formation apparatus and method for using same App 20090117743 - Nodera; Nobutake ;   et al. | 2009-05-07 |
Film formation method and apparatus for semiconductor process App 20080311760 - Nodera; Nobutake ;   et al. | 2008-12-18 |
Film formation apparatus and method for using the same App 20080003362 - Nodera; Nobutake ;   et al. | 2008-01-03 |
Film formation apparatus and method of using the same App 20060042544 - Hasebe; Kazuhide ;   et al. | 2006-03-02 |