| Patent | Date |
|---|
Heater for semiconductor manufacturing apparatus
Grant 11,437,260 - Yamana , et al. September 6, 2 | 2022-09-06 |
Wafer mounting table and method of manufacturing the same
Grant 11,398,401 - Akatsuka , et al. July 26, 2 | 2022-07-26 |
Heater For Semiconductor Manufacturing Apparatus
App 20220005722 - YAMANA; Keita ; et al. | 2022-01-06 |
Ceramic Heater And Method Of Manufacturing The Same
App 20210378061 - NOBORI; Kazuhiro ; et al. | 2021-12-02 |
Ceramic Heater And Manufacturing Method For The Same
App 20210120633 - NOBORI; Kazuhiro ; et al. | 2021-04-22 |
Method Of Manufacturing Wafer Mounting Table
App 20200406499 - NOBORI; Kazuhiro ; et al. | 2020-12-31 |
Member For Semiconductor Manufacturing Apparatus, Method For Manufacturing The Same, And Mold
App 20200312693 - Nobori; Kazuhiro ; et al. | 2020-10-01 |
Semiconductor Manufacturing Device Member, Method For Manufacturing The Same, And Forming Die
App 20200258769 - A1 | 2020-08-13 |
Wafer Mounting Table And Method Of Manufacturing The Same
App 20200219755 - AKATSUKA; Yuji ; et al. | 2020-07-09 |
Heater For Semiconductor Manufacturing Apparatus
App 20200118858 - YAMANA; Keita ; et al. | 2020-04-16 |
Heater for semiconductor manufacturing apparatus
Grant 10,566,228 - Yamana , et al. Feb | 2020-02-18 |
Heater For Semiconductor Manufacturing Apparatus
App 20190244847 - YAMANA; Keita ; et al. | 2019-08-08 |
Joined body manufacturing method and joined body
Grant 10,332,771 - Minami , et al. | 2019-06-25 |
Ceramic heater, heater electrode, and method for manufacturing ceramic heater
Grant 10,199,245 - Nobori , et al. Fe | 2019-02-05 |
Joined body manufacturing method
Grant 10,150,709 - Minami , et al. Dec | 2018-12-11 |
Solar cell apparatus and method for manufacturing same
Grant 10,050,163 - Nobori August 14, 2 | 2018-08-14 |
Method for manufacturing alumina sintered body and alumina sintered body
Grant 9,630,380 - Nobori , et al. April 25, 2 | 2017-04-25 |
Ceramic heater and method for producing the same
Grant 9,533,920 - Nobori , et al. January 3, 2 | 2017-01-03 |
Joined Body Manufacturing Method
App 20160368829 - MINAMI; Tomoyuki ; et al. | 2016-12-22 |
Joined Body Manufacturing Method And Joined Body
App 20160358801 - MINAMI; Tomoyuki ; et al. | 2016-12-08 |
Method For Manufacturing Alumina Sintered Body And Alumina Sintered Body
App 20160280604 - NOBORI; Kazuhiro ; et al. | 2016-09-29 |
Method for producing electrostatic chuck and electrostatic chuck
Grant 9,394,206 - Nobori , et al. July 19, 2 | 2016-07-19 |
Solar cell and method for manufacturing same
Grant 9,306,095 - Nobori April 5, 2 | 2016-04-05 |
Solar Cell Apparatus And Method For Manufacturing Same
App 20150295109 - Nobori; Kazuhiro | 2015-10-15 |
Display device
Grant 9,042,108 - Nobori May 26, 2 | 2015-05-26 |
Solar Cell And Method For Manufacturing Same
App 20150083192 - Nobori; Kazuhiro | 2015-03-26 |
Solar Cell And Method For Manufacturing Same
App 20140338726 - Nobori; Kazuhiro | 2014-11-20 |
Ceramic Heater And Method For Producing The Same
App 20140284320 - NOBORI; Kazuhiro ; et al. | 2014-09-25 |
Multi-junction Compound Solar Cell, Mutli-junction Compound Solar Battery, And Method For Manufacturing Same
App 20130306141 - Nobori; Kazuhiro | 2013-11-21 |
Ceramic Heater, Heater Electrode, And Method For Manufacturing Ceramic Heater
App 20130256297 - NOBORI; Kazuhiro ; et al. | 2013-10-03 |
Ceramic heater and method for producing same
Grant 8,481,892 - Nakamura , et al. July 9, 2 | 2013-07-09 |
Display Device
App 20130141881 - Nobori; Kazuhiro | 2013-06-06 |
Method of manufacturing mounting structure and mounting structure
Grant 8,436,253 - Higuchi , et al. May 7, 2 | 2013-05-07 |
Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool
Grant 8,426,965 - Iwase , et al. April 23, 2 | 2013-04-23 |
Semiconductor Device Mounted Structure And Its Manufacturing Method, Semiconductor Device Mounting Method, And Pressing Tool
App 20120298310 - IWASE; Teppei ; et al. | 2012-11-29 |
Method For Producing Electrostatic Chuck And Electrostatic Chuck
App 20120248716 - NOBORI; Kazuhiro ; et al. | 2012-10-04 |
Semiconductor device mounted structure and its manufacturing method, semiconductor device mounting method, and pressing tool
Grant 8,264,079 - Iwase , et al. September 11, 2 | 2012-09-11 |
Electrostatic chuck with heater and manufacturing method thereof
Grant 8,136,820 - Morioka , et al. March 20, 2 | 2012-03-20 |
Semiconductor device mounted structure with an underfill sealing-bonding resin with voids
Grant 8,106,521 - Iwase , et al. January 31, 2 | 2012-01-31 |
Semiconductor device
Grant 8,050,049 - Iwase , et al. November 1, 2 | 2011-11-01 |
Semiconductor chip and semiconductor device
Grant 7,994,638 - Tomura , et al. August 9, 2 | 2011-08-09 |
Electrostatic chuck and method for manufacturing the same
Grant 7,948,735 - Nobori , et al. May 24, 2 | 2011-05-24 |
Method Of Manufacturing Mounting Structure And Mounting Structure
App 20110061913 - Higuchi; Takayuki ; et al. | 2011-03-17 |
Semiconductor Device Mounted Structure And Semiconductor Device Mounting Method
App 20110001233 - Iwase; Teppei ; et al. | 2011-01-06 |
Electrostatic chuck with heater
Grant 7,848,075 - Nobori , et al. December 7, 2 | 2010-12-07 |
Semiconductor Device
App 20100265683 - IWASE; Teppei ; et al. | 2010-10-21 |
Ceramic Heater And Method For Producing Same
App 20100243635 - NAKAMURA; Keiichi ; et al. | 2010-09-30 |
Semiconductor Device Mounted Structure And Its Manufacturing Method, Semiconductor Device Mounting Method, And Pressing Tool
App 20100181667 - Iwase; Teppei ; et al. | 2010-07-22 |
Volume resistivity measurement apparatus for dielectric layer of electrostatic chuck and measurement method using the apparatus
Grant 7,710,130 - Yokota , et al. May 4, 2 | 2010-05-04 |
Electrostatic chuck with heater and manufacturing method thereof
Grant 7,701,693 - Hattori , et al. April 20, 2 | 2010-04-20 |
Semiconductor Chip And Semiconductor Device
App 20100032832 - Tomura; Yoshihiro ; et al. | 2010-02-11 |
Electrostatic Chuck And Method For Manufacturing The Same
App 20090243235 - NOBORI; Kazuhiro ; et al. | 2009-10-01 |
Multilevel semiconductor module and method for fabricating the same
Grant 7,586,183 - Kawabata , et al. September 8, 2 | 2009-09-08 |
Ceramic member and manufacturing method for the same
Grant 7,582,367 - Aihara , et al. September 1, 2 | 2009-09-01 |
Alumina member and manufacturing method thereof
Grant 7,564,008 - Mori , et al. July 21, 2 | 2009-07-21 |
Manufacturing method for sintered body with buried metallic member
Grant 7,547,407 - Matsuda , et al. June 16, 2 | 2009-06-16 |
Sustaining circuit with bi-directional device
Grant 7,521,786 - Kitabatake , et al. April 21, 2 | 2009-04-21 |
Alumina sintered body
Grant 7,446,993 - Hattori , et al. November 4, 2 | 2008-11-04 |
Electrostatic Chuck With Heater
App 20080266745 - Nobori; Kazuhiro ; et al. | 2008-10-30 |
Sintered Silicon Nitride And Method For Producing The Same
App 20080220963 - Takahashi; Takahiro ; et al. | 2008-09-11 |
Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
Grant 7,416,793 - Matsuda , et al. August 26, 2 | 2008-08-26 |
Electrostatic Chuck And Method Of Manufacturing The Same
App 20080186647 - KAWAJIRI; Tetsuya ; et al. | 2008-08-07 |
Electrostatic Chuck With Heater And Manufacturing Method Thereof
App 20080174930 - Hattori; Akiyoshi ; et al. | 2008-07-24 |
Volume Resistivity Measurement Apparatus For Dielectric Layer Of Electrostatic Chuck And Measurement Method Using The Apparatus
App 20080143353 - YOKOTA; Minoru ; et al. | 2008-06-19 |
Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method
Grant 7,387,977 - Mori , et al. June 17, 2 | 2008-06-17 |
Multi-level semiconductor module and method for fabricating the same
Grant 7,365,416 - Kawabata , et al. April 29, 2 | 2008-04-29 |
Electrostatic Chuck With Heater And Manufacturing Method Thereof
App 20080049374 - Morioka; Ikuhisa ; et al. | 2008-02-28 |
Method of manufacturing electrical resistance heating element
Grant 7,275,309 - Matsuda , et al. October 2, 2 | 2007-10-02 |
Alumina Sintered Body
App 20070223167 - Hattori; Akiyoshi ; et al. | 2007-09-27 |
Electrostatic Chuck And Manufacturing Method Thereof
App 20070223174 - MORI; Yutaka ; et al. | 2007-09-27 |
Electronic circuit device having circuit board electrically connected to semiconductor element via metallic plate
Grant 7,208,833 - Nobori , et al. April 24, 2 | 2007-04-24 |
Ceramic heaters, a method for producing the same and articles having metal members
Grant 7,126,090 - Yamaguchi , et al. October 24, 2 | 2006-10-24 |
Multilevel semiconductor module and method for fabricating the same
App 20060231939 - Kawabata; Takeshi ; et al. | 2006-10-19 |
Electrostatic chuck and method of manufacturing electrostatic chuck
App 20060213900 - Matsuda; Hiroto ; et al. | 2006-09-28 |
Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method
App 20060205585 - Mori; Yutaka ; et al. | 2006-09-14 |
Alumina member and manufacturing method thereof
App 20060169688 - Mori; Yutaka ; et al. | 2006-08-03 |
Multi-level semiconductor module and method for fabricating the same
App 20060131740 - Kawabata; Takeshi ; et al. | 2006-06-22 |
Semiconductor device and sustaining circuit
App 20060071246 - Kitabatake; Makoto ; et al. | 2006-04-06 |
Ceramic member and manufacturing method for the same
App 20060073349 - Aihara; Yasufumi ; et al. | 2006-04-06 |
Stacked semiconductor transistors
Grant 6,995,473 - Kitabatake , et al. February 7, 2 | 2006-02-07 |
Manufacturing method for sintered body with buried metallic member
App 20060012087 - Matsuda; Hiroto ; et al. | 2006-01-19 |
Ceramic heaters
Grant 6,958,462 - Unno , et al. October 25, 2 | 2005-10-25 |
Electronic circuit device including metallic member having installation members
Grant 6,943,443 - Nobori , et al. September 13, 2 | 2005-09-13 |
Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
App 20050152089 - Matsuda, Hiroto ; et al. | 2005-07-14 |
Electronic circuit device
App 20050148237 - Nobori, Kazuhiro ; et al. | 2005-07-07 |
Method of manufacturing electrical resistance heating element
App 20050056976 - Matsuda, Hiroto ; et al. | 2005-03-17 |
Semiconductor package
Grant 6,864,574 - Nobori , et al. March 8, 2 | 2005-03-08 |
Semiconductor device and sustaining circuit
App 20040124474 - Kitabatake, Makoto ; et al. | 2004-07-01 |
Ceramic heaters, a method for producing the same and articles having metal members
App 20030183615 - Yamaguchi, Shinji ; et al. | 2003-10-02 |
Ceramic heaters
App 20030173349 - Unno, Yutaka ; et al. | 2003-09-18 |
Semiconductor package and method of manufacturing semiconductor package
Grant 6,603,154 - Sakai , et al. August 5, 2 | 2003-08-05 |
Electronic circuit device and method for manufacturing the same
App 20030106924 - Nobori, Kazuhiro ; et al. | 2003-06-12 |
Semiconductor package and method of manufacturing semiconductor package
App 20020019078 - Sakai, Yoshinori ; et al. | 2002-02-14 |
Circuit board having electrodes and pre-deposit solder receiver
Grant 5,917,156 - Nobori , et al. June 29, 1 | 1999-06-29 |
Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles
Grant 5,616,024 - Nobori , et al. April 1, 1 | 1997-04-01 |
Ceramic articles
Grant 5,573,690 - Nobori , et al. November 12, 1 | 1996-11-12 |
Heating units for use in semiconductor-producing apparatuses and production thereof
Grant 5,490,228 - Soma , et al. February 6, 1 | 1996-02-06 |
Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
Grant 5,306,895 - Ushikoshi , et al. April 26, 1 | 1994-04-26 |
Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means
Grant 5,280,156 - Niori , et al. January 18, 1 | 1994-01-18 |
Method for bonding lead of IC component with electrode
Grant 5,240,170 - Nishida , et al. August 31, 1 | 1993-08-31 |
Wafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heaters
Grant 5,231,690 - Soma , et al. July 27, 1 | 1993-07-27 |
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