Patent | Date |
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Polishing agent and method for polishing substrate using the polishing agent Grant 10,040,971 - Hoshi , et al. August 7, 2 | 2018-08-07 |
Polishing Slurry For Cmp And Polishing Method App 20170267895 - Shinoda; Takashi ;   et al. | 2017-09-21 |
Photosensitive resin composition, method for producing patterned cured film, semiconductor element and electronic device Grant 9,633,848 - Aoki , et al. April 25, 2 | 2017-04-25 |
Photosensitive resin composition, method for manufacturing patterned cured film, and electronic component Grant 9,395,626 - Tanimoto , et al. July 19, 2 | 2016-07-19 |
Polishing Agent And Method For Polishing Substrate Using The Polishing Agent App 20150361303 - HOSHI; Yousuke ;   et al. | 2015-12-17 |
Photosensitive Resin Composition, Method For Producing Patterned Cured Film, Semiconductor Element And Electronic Device App 20150325431 - AOKI; Yu ;   et al. | 2015-11-12 |
Polishing Slurry For Cmp And Polishing Method App 20150315419 - Shinoda; Takashi ;   et al. | 2015-11-05 |
Polishing agent and method for polishing substrate using the polishing agent Grant 9,165,777 - Hoshi , et al. October 20, 2 | 2015-10-20 |
Polishing solution for CMP and polishing method using the polishing solution Grant 9,022,834 - Satou , et al. May 5, 2 | 2015-05-05 |
Polishing slurry for metal films and polishing method Grant 8,901,002 - Tanaka , et al. December 2, 2 | 2014-12-02 |
Photosensitive Resin Composition, Method For Manufacturing Patterned Cured Film, And Electronic Component App 20140322635 - Tanimoto; Akitoshi ;   et al. | 2014-10-30 |
Positive photosensitive resin composition, method of creating resist pattern, and electronic component Grant 8,836,089 - Tanimoto , et al. September 16, 2 | 2014-09-16 |
Metal polishing slurry and polishing method Grant 8,821,750 - Amanokura , et al. September 2, 2 | 2014-09-02 |
Polishing Slurry For Metal Films And Polishing Method App 20140065826 - Tanaka; Takaaki ;   et al. | 2014-03-06 |
Polishing Slurry For Cmp And Polishing Method App 20140065825 - Shinoda; Takashi ;   et al. | 2014-03-06 |
Polishing agent and method for polishing substrate using the polishing agent Grant 8,617,275 - Hoshi , et al. December 31, 2 | 2013-12-31 |
Polishing slurry for metal films and polishing method Grant 8,609,541 - Tanaka , et al. December 17, 2 | 2013-12-17 |
Polishing solution for CMP and polishing method using the polishing solution Grant 8,592,317 - Satou , et al. November 26, 2 | 2013-11-26 |
Polishing Agent And Method For Polishing Substrate Using The Polishing Agent App 20130252426 - HOSHI; Yousuke ;   et al. | 2013-09-26 |
Positive Photosensitive Resin Composition, Method Of Creating Resist Pattern, And Electronic Component App 20130168859 - Tanimoto; Akitoshi ;   et al. | 2013-07-04 |
Polishing Solution For Cmp And Polishing Method Using The Polishing Solution App 20110275285 - Satou; Eiichi ;   et al. | 2011-11-10 |
Polishing Solution For Cmp And Polishing Method Using The Polishing Solution App 20110275217 - Satou; Eiichi ;   et al. | 2011-11-10 |
Polishing Agent And Method For Polishing Substrate Using The Polshing Agent App 20110039475 - Hoshi; Yousuke ;   et al. | 2011-02-17 |
Polishing Slurry For Metal Films And Polishing Method App 20110009033 - Tanaka; Takaaki ;   et al. | 2011-01-13 |
Metal Polishing Slurry And Polishing Method App 20100120250 - Amanokura; Jin ;   et al. | 2010-05-13 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts Grant 7,687,590 - Sakurai , et al. March 30, 2 | 2010-03-30 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts Grant 7,682,701 - Sakurai , et al. March 23, 2 | 2010-03-23 |
Polishing Slurry For Cmp App 20090283715 - Nobe; Shigeru ;   et al. | 2009-11-19 |
CMP Polishing Liquid and Polishing Method App 20090094901 - Shinoda; Takashi ;   et al. | 2009-04-16 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts Grant 7,358,300 - Sakurai , et al. April 15, 2 | 2008-04-15 |
Polishing slurry for CMP and polishing method App 20070117394 - Shinoda; Takashi ;   et al. | 2007-05-24 |
Composition, methods for forming low-permittivity film using the composition, low-permittivity film, and electronic part having the low-permittivity film App 20060199021 - Narita; Takenori ;   et al. | 2006-09-07 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts App 20060052566 - Sakurai; Haruaki ;   et al. | 2006-03-09 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts App 20050255326 - Sakurai, Haruaki ;   et al. | 2005-11-17 |
Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts App 20050119394 - Sakurai, Haruaki ;   et al. | 2005-06-02 |
Composition, methods for forming low-permittivity film using the composition, low-permittivity film, and electronic part having the low-permittivity film App 20040253462 - Narita, Takenori ;   et al. | 2004-12-16 |