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Silicon carbide semiconductor device and method for manufacturing same Grant 9,209,262 - Tanaka , et al. December 8, 2 | 2015-12-08 |
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Semiconductor device having a first silicon carbide semiconductor layer and a second silicon carbide semiconductor layer Grant 9,029,874 - Horikawa , et al. May 12, 2 | 2015-05-12 |
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Semiconductor Device App 20140231828 - Horikawa; Nobuyuki ;   et al. | 2014-08-21 |
Semiconductor element and method of manufacturing thereof Grant 8,772,788 - Ikegami , et al. July 8, 2 | 2014-07-08 |
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Silicon carbide semiconductor element Grant 8,748,901 - Takahashi , et al. June 10, 2 | 2014-06-10 |
Silicon Carbide Semiconductor Element App 20140151719 - TAKAHASHI; Kunimasa ;   et al. | 2014-06-05 |
Semiconductor Element And Method Of Manufacturing Thereof App 20140110723 - Ikegami; Ryo ;   et al. | 2014-04-24 |
Silicon carbide semiconductor element Grant 8,686,439 - Takahashi , et al. April 1, 2 | 2014-04-01 |
Silicon carbide semiconductor device having a contact region that includes a first region and a second region, and process for production thereof Grant 8,653,535 - Kudou , et al. February 18, 2 | 2014-02-18 |
Semiconductor Element, Semiconductor Device, And Semiconductor Element Manufacturing Method App 20130328065 - Niwayama; Masahiko ;   et al. | 2013-12-12 |
Silicon Carbide Semiconductor Element And Method For Producing The Same App 20130140586 - Takahashi; Kunimasa ;   et al. | 2013-06-06 |
Semiconductor Device And Process For Production Thereof App 20130082285 - Kudou; Chiaki ;   et al. | 2013-04-04 |
Semiconductor Device And Process For Production Thereof App 20120205670 - Kudou; Chiaki ;   et al. | 2012-08-16 |
Method for producing semiconductor element Grant 8,222,107 - Tanaka , et al. July 17, 2 | 2012-07-17 |
Semiconductor manufacturing apparatus Grant 8,058,631 - Niwayama , et al. November 15, 2 | 2011-11-15 |
Method For Producing Semiconductor Element App 20110207275 - Tanaka; Koutarou ;   et al. | 2011-08-25 |
Semiconductor device and method for fabricating the same Grant 7,851,871 - Harada , et al. December 14, 2 | 2010-12-14 |
Semiconductor device with substrate having increased resistance due to lattice defect and method for fabricating the same Grant 7,759,711 - Sawada , et al. July 20, 2 | 2010-07-20 |
Semiconductor Manufacturing Apparatus App 20100093113 - Niwayama; Masahiko ;   et al. | 2010-04-15 |
Semiconductor device manufacturing method and ion implanter used therein Grant 7,638,782 - Yoneda , et al. December 29, 2 | 2009-12-29 |
Semiconductor Device And Method For Fabricating The Same App 20090206366 - Sawada; Kazuyuki ;   et al. | 2009-08-20 |
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Semiconductor manufacturing apparatus App 20080166822 - Niwayama; Masahiko ;   et al. | 2008-07-10 |
Method and apparatus for fabricating semiconductor device Grant 7,291,535 - Niwayama , et al. November 6, 2 | 2007-11-06 |
Semiconductor device manufacturing method and ion implanter used therein App 20060163498 - Yoneda; Kenji ;   et al. | 2006-07-27 |
Electronic device manufacturing apparatus App 20050266649 - Niwayama, Masahiko ;   et al. | 2005-12-01 |
Method and apparatus for fabricating semiconductor device App 20050130382 - Niwayama, Masahiko ;   et al. | 2005-06-16 |
Method for fabricating semiconductor device Grant 6,875,623 - Niwayama , et al. April 5, 2 | 2005-04-05 |
Method for fabricating semiconductor device App 20040023472 - Niwayama, Masahiko ;   et al. | 2004-02-05 |
Apparatus and method for introducing impurity Grant 6,633,047 - Niwayama , et al. October 14, 2 | 2003-10-14 |
Method for introducing impurity into a semiconductor substrate without negative charge buildup phenomenon Grant 6,451,674 - Niwayama , et al. September 17, 2 | 2002-09-17 |
Solid-state image pick-up device and method for manufacturing the same Grant 6,046,069 - Ishikawa , et al. April 4, 2 | 2000-04-04 |
Solid-state imaging device and method of manufacturing the same Grant 6,025,210 - Matsuda , et al. February 15, 2 | 2000-02-15 |