Patent | Date |
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Substrate processing method and substrate processing apparatus App 20060163205 - Niuya; Takayuki ;   et al. | 2006-07-27 |
Substrate processing method and substrate processing apparatus Grant 6,979,655 - Niuya , et al. December 27, 2 | 2005-12-27 |
Method for forming a memory integrated circuit with bitlines over gates and capacitors over bitlines Grant 6,946,701 - Niuya September 20, 2 | 2005-09-20 |
Cleaning agent and cleaning method Grant 6,875,288 - Gotoh , et al. April 5, 2 | 2005-04-05 |
Method of manufacturing semiconductor device and manufacturing apparatus Grant 6,838,370 - Niuya , et al. January 4, 2 | 2005-01-04 |
Selective oxidation for semiconductor device fabrication Grant 6,835,672 - Park , et al. December 28, 2 | 2004-12-28 |
Method for forming a memory integrated circuit App 20040021228 - Niuya, Takayuki | 2004-02-05 |
Method for forming a memory integrated circuit Grant 6,617,211 - Niuya September 9, 2 | 2003-09-09 |
Method of forming a plated layer to a predetermined thickness Grant 6,607,650 - Niuya , et al. August 19, 2 | 2003-08-19 |
Substrate processing method and substrate processing apparatus App 20030119318 - Niuya, Takayuki ;   et al. | 2003-06-26 |
Cleaning method using an oxidizing agent, chelating agent and fluorine compound Grant 6,514,352 - Gotoh , et al. February 4, 2 | 2003-02-04 |
Cleaning method App 20020066465 - Gotoh, Hideto ;   et al. | 2002-06-06 |
Cleaning agent and cleaning method App 20020064963 - Gotoh, Hideto ;   et al. | 2002-05-30 |
Simple stack cell capacitor formation App 20020001902 - Ukita, Shigenari ;   et al. | 2002-01-03 |
Silicon nitride dopant diffusion barrier in integrated circuits Grant 6,277,720 - Doshi , et al. August 21, 2 | 2001-08-21 |
Cleaning agent for use in producing semiconductor devices and process for producing semiconductor devices using the same Grant 6,265,309 - Gotoh , et al. July 24, 2 | 2001-07-24 |
Birdsbeak encroachment using combination of wet and dry etch for isolation nitride Grant 6,066,545 - Doshi , et al. May 23, 2 | 2000-05-23 |
Silicon nitride sidewall and top surface layer separating conductors Grant 5,914,279 - Yang , et al. June 22, 1 | 1999-06-22 |
Method of forming a trench-type semiconductor memory device Grant 5,804,478 - Nagata , et al. September 8, 1 | 1998-09-08 |
Semiconductor device Grant 5,675,533 - Niuya , et al. October 7, 1 | 1997-10-07 |
Method of manufacturing a semiconductor device Grant 5,470,778 - Nagata , et al. November 28, 1 | 1995-11-28 |
Method of fabricating random access memory device having sidewall insulating layer on the laminate structure Grant 5,470,777 - Nagata , et al. November 28, 1 | 1995-11-28 |