Niu; Xinhui

Patent Applications and Registrations

Patent applications and USPTO patent grants for Niu; Xinhui.The latest application filed is for "optical metrology of single features".

Company Profile

0.42.42

Niu; Xinhui - Los Altos CA
Niu; Xinhui - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer Grant 7,630,873 - Bischoff , et al. December 8, 2	2009-12-08
Generation of a library of periodic grating diffraction signals Grant 7,593,119 - Niu , et al. September 22, 2	2009-09-22
Optical metrology of single features Grant 7,586,623 - Bischoff , et al. September 8, 2	2009-09-08
Generation and use of integrated circuit profile-based simulation information Grant 7,580,823 - Jakatdar , et al. August 25, 2	2009-08-25
Model and parameter selection for optical metrology Grant 7,505,153 - Vuong , et al. March 17, 2	2009-03-17
Generic interface for an optical metrology system Grant 7,450,232 - Li , et al. November 11, 2	2008-11-11
Optical Metrology Of Single Features App 20080259357 - BISCHOFF; Joerg ; et al.	2008-10-23
Generation Of A Library Of Periodic Grating Diffraction Signals App 20080249754 - Niu; Xinhui ; et al.	2008-10-09
Generating simulated diffraction signals for two-dimensional structures Grant 7,427,521 - Bischoff , et al. September 23, 2	2008-09-23
Azimuthal scanning of a structure formed on a semiconductor wafer Grant 7,414,733 - Bischoff , et al. August 19, 2	2008-08-19
Model And Parameter Selection For Optical Metrology App 20080151269 - Vuong; Vi ; et al.	2008-06-26
Optical metrology of single features Grant 7,379,192 - Bischoff , et al. May 27, 2	2008-05-27
Generic Interface For An Optical Metrology System App 20080037017 - Li; Shifang ; et al.	2008-02-14
Model and parameter selection for optical metrology Grant 7,330,279 - Vuong , et al. February 12, 2	2008-02-12
Azimuthal scanning of a structure formed on a semiconductor wafer App 20070236705 - Bischoff; Joerg ; et al.	2007-10-11
Generation of a library of periodic grating diffraction signals Grant 7,277,189 - Niu , et al. October 2, 2	2007-10-02
Generic interface for an optical metrology system Grant 7,271,902 - Li , et al. September 18, 2	2007-09-18
Azimuthal scanning of a structure formed on a semiconductor wafer Grant 7,224,471 - Bischoff , et al. May 29, 2	2007-05-29
Generation and use of integrated circuit profile-based simulation information App 20070118349 - Jakatdar; Nickhil ; et al.	2007-05-24
Generation and use of integrated circuit profile-based simulation information Grant 7,136,796 - Jakatdar , et al. November 14, 2	2006-11-14
Generic interface for an optical metrology system App 20060244966 - Li; Shifang ; et al.	2006-11-02
Optical metrology of single features App 20060187468 - Bischoff; Joerg ; et al.	2006-08-24
Model optimization for structures with additional materials Grant 7,072,049 - Niu , et al. July 4, 2	2006-07-04
Generic interface for an optical metrology system Grant 7,064,829 - Li , et al. June 20, 2	2006-06-20
Balancing planarization of layers and the effect of underlying structure on the metrology signal Grant 7,041,515 - Jakatdar , et al. May 9, 2	2006-05-09
Optical metrology of single features Grant 7,030,999 - Bischoff , et al. April 18, 2	2006-04-18
Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings Grant 7,031,894 - Niu , et al. April 18, 2	2006-04-18
Shape roughness measurement in optical metrology App 20050275850 - Bischoff, Joerg ; et al.	2005-12-15
Generation of a library of periodic grating diffraction signals App 20050256687 - Niu, Xinhui ; et al.	2005-11-17
Method and system of dynamic learning through a regression-based library generation process Grant 6,961,679 - Niu , et al. November 1, 2	2005-11-01
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses Grant 6,952,271 - Niu , et al. October 4, 2	2005-10-04
Overlay measurements using zero-order cross polarization measurements Grant 6,947,141 - Bischoff , et al. September 20, 2	2005-09-20
Generation of a library of periodic grating diffraction signals Grant 6,943,900 - Niu , et al. September 13, 2	2005-09-13
Method and system for dynamic learning through a regression-based library generation process Grant 6,928,395 - Niu , et al. August 9, 2	2005-08-09
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses Grant 6,891,626 - Niu , et al. May 10, 2	2005-05-10
Azimuthal scanning of a structure formed on a semiconductor wafer App 20050088665 - Bischoff, Joerg ; et al.	2005-04-28
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses App 20050068545 - Niu, Xinhui ; et al.	2005-03-31
Grating test patterns and methods for overlay metrology Grant 6,855,464 - Niu , et al. February 15, 2	2005-02-15
Overlay measurements using zero-order cross polarization measurements App 20050030536 - Bischoff, Joerg ; et al.	2005-02-10
Optical profilometry of additional-material deviations in a periodic grating Grant 6,839,145 - Niu , et al. January 4, 2	2005-01-04
System and method for efficient simulation of reflectometry response from two-dimensional grating structures Grant 6,833,914 - Bao , et al. December 21, 2	2004-12-21
Method and system of dynamic learning through a regression-based library generation process App 20040225477 - Niu, Xinhui ; et al.	2004-11-11
Method and system of dynamic learning through a regression-based library generation process App 20040220760 - Niu, Xinhui ; et al.	2004-11-04
Optical metrology of single features App 20040212812 - Bischoff, Joerg ; et al.	2004-10-28
Overlay measurements using zero-order cross polarization measurements Grant 6,804,005 - Bischoff , et al. October 12, 2	2004-10-12
Generic interface for an optical metrology system App 20040184035 - Li, Shifang ; et al.	2004-09-23
Method and system of dynamic learning through a regression-based library generation process Grant 6,785,638 - Niu , et al. August 31, 2	2004-08-31
Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer App 20040167754 - Bischoff, Joerg ; et al.	2004-08-26
Optical metrology of single features Grant 6,775,015 - Bischoff , et al. August 10, 2	2004-08-10
Model optimization for structures with additional materials App 20040150838 - Niu, Xinhui ; et al.	2004-08-05
Overlay measurements using periodic gratings Grant 6,772,084 - Bischoff , et al. August 3, 2	2004-08-03
Balancing planarization of layers and the effect of underlying structure on the metrology signal App 20040147048 - Jakatdar, Nickhil ; et al.	2004-07-29
Grating test patterns and methods for overlay metrology App 20040137341 - Niu, Xinhui ; et al.	2004-07-15
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes Grant 6,750,961 - Niu , et al. June 15, 2	2004-06-15
Balancing planarization of layers and the effect of underlying structure on the metrology signal Grant 6,743,646 - Jakatdar , et al. June 1, 2	2004-06-01
Generating simulated diffraction signals for two-dimensional structures App 20040078173 - Bischoff, Joerg ; et al.	2004-04-22
Grating test patterns and methods for overlay metrology Grant 6,699,624 - Niu , et al. March 2, 2	2004-03-02
Profiler business model Grant 6,694,275 - Jakadar , et al. February 17, 2	2004-02-17
Model and parameter selection for optical metrology App 20040017574 - Vuong, Vi ; et al.	2004-01-29
Optical metrology of single features App 20030232454 - Bischoff, Joerg ; et al.	2003-12-18
Overlay measurements using periodic gratings App 20030212525 - Bischoff, Joerg ; et al.	2003-11-13
Combined optical profilometry and projection microscopy of integrated circuit structures Grant 6,645,824 - Yang , et al. November 11, 2	2003-11-11
Overlay measurements using zero-order cross polarization measurements App 20030206298 - Bischoff, Joerg ; et al.	2003-11-06
Optical profilometry of additional-material deviations in a periodic grating App 20030204325 - Niu, Xinhui ; et al.	2003-10-30
Combined Optical Profilometry And Projection Microscopy Of Integrated Circuit Structures App 20030203590 - Yang, Wenge ; et al.	2003-10-30
Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings App 20030200063 - Niu, Xinhui ; et al.	2003-10-23
System and method for grating profile classification Grant 6,636,843 - Doddi , et al. October 21, 2	2003-10-21
Balancing planarization of layers and the effect of underlying structure on the metrology signal App 20030194820 - Jakatdar, Nickhil ; et al.	2003-10-16
Generation and use of integrated circuit profile-based simulation information App 20030163295 - Jakatdar, Nickhil ; et al.	2003-08-28
Optical profilometry of additional-material deviations in a periodic grating Grant 6,608,690 - Niu , et al. August 19, 2	2003-08-19
Measurement of metal electroplating and seed layer thickness and profile Grant 6,608,686 - Lane , et al. August 19, 2	2003-08-19
Measurement Of Metal Electroplating And Seed Layer Thickness And Profile App 20030151751 - Lane, Lawrence ; et al.	2003-08-14
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes App 20030133104 - Niu, Xinhui ; et al.	2003-07-17
Optical Profilometry Of Additional-material Deviations In A Periodic Grating App 20030103218 - Niu, Xinhui ; et al.	2003-06-05
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes Grant 6,538,731 - Niu , et al. March 25, 2	2003-03-25
Method and system of dynamic learning through a regression-based library generation process App 20030028358 - Niu, Xinhui ; et al.	2003-02-06
System and method for grating profile classification App 20020188580 - Doddi, Srinivas ; et al.	2002-12-12
Grating test patterns and methods for overlay metrology App 20020135875 - Niu, Xinhui ; et al.	2002-09-26
Method And Apparatus For The Determination Of Mask Rules Using Scatterometry App 20020131055 - Niu, Xinhui ; et al.	2002-09-19
System and method for characterizing macro-grating test patterns in advanced lithography and etch processes App 20020131040 - Niu, Xinhui ; et al.	2002-09-19
Method and apparatus for the determination of mask rules using scatterometry Grant 6,433,878 - Niu , et al. August 13, 2	2002-08-13
Generation of a library of periodic grating diffraction signals App 20020035455 - Niu, Xinhui ; et al.	2002-03-21
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses App 20020033954 - Niu, Xinhui ; et al.	2002-03-21
Caching of intra-layer calculations for rapid rigorous coupled-wave analyses App 20010051856 - Niu, Xinhui ; et al.	2001-12-13

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