loadpatents
Patent applications and USPTO patent grants for Niu; Dong.The latest application filed is for "wafer placement correction in indexed multi-station processing chambers".
Patent | Date |
---|---|
Wafer Placement Correction In Indexed Multi-station Processing Chambers App 20220172967 - Topping; Stephen ;   et al. | 2022-06-02 |
Pecvd Apparatus For In-situ Deposition Of Film Stacks App 20190376186 - Haverkamp; Jason Dirk ;   et al. | 2019-12-12 |
Method, System, Server and User Terminal for Displaying User Comment Data App 20190079995 - Jin; Shiting ;   et al. | 2019-03-14 |
PECVD apparatus for in-situ deposition of film stacks Grant 10,214,816 - Haverkamp , et al. Feb | 2019-02-26 |
Post-deposition soft annealing Grant 9,165,788 - Fox , et al. October 20, 2 | 2015-10-20 |
In-situ deposition of film stacks Grant 9,028,924 - Haverkamp , et al. May 12, 2 | 2015-05-12 |
In-situ Deposition Of Film Stacks App 20150013607 - Haverkamp; Jason Dirk ;   et al. | 2015-01-15 |
Tensile Stressed Doped Amorphous Silicon App 20140357064 - Fox; Keith ;   et al. | 2014-12-04 |
Tensile stressed doped amorphous silicon Grant 8,895,415 - Fox , et al. November 25, 2 | 2014-11-25 |
In-situ deposition of film stacks Grant 8,741,394 - Haverkamp , et al. June 3, 2 | 2014-06-03 |
Smooth silicon-containing films Grant 8,709,551 - Fox , et al. April 29, 2 | 2014-04-29 |
Post-deposition Soft Annealing App 20130267081 - Fox; Keith ;   et al. | 2013-10-10 |
In-situ Deposition Of Film Stacks App 20130171834 - Haverkamp; Jason ;   et al. | 2013-07-04 |
Silicon Nitride Films For Semiconductor Device Applications App 20130157466 - Fox; Keith ;   et al. | 2013-06-20 |
In-Situ Deposition of Film Stacks App 20110236594 - Haverkamp; Jason ;   et al. | 2011-09-29 |
Smooth Silicon-Containing Films App 20110236600 - Fox; Keith ;   et al. | 2011-09-29 |
Methods for producing low-k carbon doped oxide films with low residual stress Grant 7,781,351 - Wu , et al. August 24, 2 | 2010-08-24 |
Methods for producing low-k CDO films with low residual stress Grant 7,390,537 - Wu , et al. June 24, 2 | 2008-06-24 |
Methods for improving the cracking resistance of low-k dielectric materials Grant 7,381,662 - Niu , et al. June 3, 2 | 2008-06-03 |
Methods for improving integration performance of low stress CDO films Grant 7,326,444 - Wu , et al. February 5, 2 | 2008-02-05 |
Methods for improving the cracking resistance of low-k dielectric materials Grant 7,094,713 - Niu , et al. August 22, 2 | 2006-08-22 |
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