Nittala; Krishna

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nittala; Krishna.The latest application filed is for "controlling concentration profiles for deposited films using machine learning".

Company Profile

6.5.15

Nittala; Krishna - Sunnyvale CA
Nittala; Krishna - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Film formation via pulsed RF plasma Grant 11,443,919 - Nittala , et al. September 13, 2	2022-09-13
Controlling Concentration Profiles For Deposited Films Using Machine Learning App 20220285232 - Baryshnikov; Anton V. ; et al.	2022-09-08
Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition Grant 11,421,324 - Hsu , et al. August 23, 2	2022-08-23
Methods, Systems, And Apparatus For Processing Substrates Using One Or More Amorphous Carbon Hardmask Layers App 20220262643 - NITTALA; Krishna ; et al.	2022-08-18
Hardmasks And Processes For Forming Hardmasks By Plasma Enhanced Chemical Vapor Deposition App 20220119953 - HSU; Jui-Yuan ; et al.	2022-04-21
Boron Concentration Tunability In Boron-silicon Films App 20220108892 - Yang; Yi ; et al.	2022-04-07
Method Of Using Dual Frequency Rf Power In A Process Chamber App 20220102141 - SINGH; Anup Kumar ; et al.	2022-03-31
Doping Semiconductor Films App 20220093390 - Aydin; Aykut ; et al.	2022-03-24
Integration Processes Utilizing Boron-doped Silicon Materials App 20220020599 - Koshizawa; Takehito ; et al.	2022-01-20
Hydrogen Management In Plasma Deposited Films App 20220020583 - Cheng; Rui ; et al.	2022-01-20
Polysilicon liners Grant 11,170,990 - Nittala , et al. November 9, 2	2021-11-09
Methods To Reduce Material Surface Roughness App 20210140045 - Yang; Yi ; et al.	2021-05-13
Amorphous Silicon-based Films Resistant To Crystallization App 20210130174 - Aydin; Aykut ; et al.	2021-05-06
Polysilicon Liners App 20200266052 - NITTALA; Krishna ; et al.	2020-08-20
Film Formation Via Pulsed Rf Plasma App 20200258720 - A1	2020-08-13
Enhanced Lift Pin Design To Eliminate Local Thickness Non-uniformity In Teos Oxide Films App 20200058538 - GHOSH; Kalyanjit ; et al.	2020-02-20
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films Grant 10,490,436 - Ghosh , et al. Nov	2019-11-26
Enhanced Lift Pin Design To Eliminate Local Thickness Non-uniformity In Teos Oxide Films App 20170125280 - GHOSH; Kalyanjit ; et al.	2017-05-04
Low-K oxide deposition by hydrolysis and condensation Grant 9,245,739 - Ndiege , et al. January 26, 2	2016-01-26
Low-k Oxide Deposition By Hydrolysis And Condensation App 20150004806 - Ndiege; Nicholas Muga ; et al.	2015-01-01

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