Patent | Date |
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Resist composition and resist pattern forming method Grant 8,399,173 - Fujita , et al. March 19, 2 | 2013-03-19 |
Resist Composition And Resist Pattern Forming Method App 20090258313 - Fujita; Shoichi ;   et al. | 2009-10-15 |
Resist developer and resist pattern formation method using same Grant 7,407,739 - Nitta August 5, 2 | 2008-08-05 |
Positive resist composition and method of forming resist pattern Grant 7,402,372 - Hagihara , et al. July 22, 2 | 2008-07-22 |
Chemically amplified positive photo resist composition and method for forming resist pattern Grant 7,358,028 - Maruyama , et al. April 15, 2 | 2008-04-15 |
Chemical amplified positive photo resist composition and method for forming resist pattern Grant 7,329,478 - Nakagawa , et al. February 12, 2 | 2008-02-12 |
Positive resist composition and compound used therein Grant 7,232,643 - Nitta June 19, 2 | 2007-06-19 |
Positive-working photoresist composition and photosensitive material using same App 20070122744 - Maemori; Satoshi ;   et al. | 2007-05-31 |
Chemical Amplification Type Positive Photoresist Composition And Resist Pattern Forming Method App 20070117045 - Maruyama; Kenji ;   et al. | 2007-05-24 |
Positive resist composition and method of forming resist pattern using same Grant 7,192,687 - Nitta , et al. March 20, 2 | 2007-03-20 |
Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device Grant 7,150,956 - Nitta , et al. December 19, 2 | 2006-12-19 |
Method for decreasing surface defects of patterned resist layer Grant 7,094,924 - Nitta , et al. August 22, 2 | 2006-08-22 |
Resist developer and resist pattern formation method using same App 20060029885 - Nitta; Kazuyuki | 2006-02-09 |
Chemical amplified positive photo resist composition and method for forming resist pattern App 20060003260 - Nakagawa; Yusuke ;   et al. | 2006-01-05 |
Positive resist composition and compound used therein App 20050266340 - Nitta, Kazuyuki | 2005-12-01 |
Chemically amplified positive photo resist composition and method for forming resist pattern App 20050244740 - Maruyama, Kenji ;   et al. | 2005-11-03 |
Chemical-amplification positive-working photoresist composition App 20050170276 - Nitta, Kazuyuki ;   et al. | 2005-08-04 |
Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device Grant 6,921,621 - Nitta , et al. July 26, 2 | 2005-07-26 |
Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device App 20050112498 - Nitta, Kazuyuki ;   et al. | 2005-05-26 |
Positive resist composition and method of forming resist pattern using same App 20050079445 - Nitta, Kazuyuki ;   et al. | 2005-04-14 |
Positive resist composition and method of forming resist pattern App 20050042540 - Okubo, Waki ;   et al. | 2005-02-24 |
Positive resist composition and method of forming resist pattern App 20050042541 - Hagihara, Mitsuo ;   et al. | 2005-02-24 |
Method for forming fine resist pattern App 20050037291 - Nitta, Kazuyuki ;   et al. | 2005-02-17 |
Method for the preparation of a semiconductor device Grant 6,818,380 - Maemori , et al. November 16, 2 | 2004-11-16 |
Positive-working photoresist composition and resist patterning method using same Grant 6,787,290 - Nitta , et al. September 7, 2 | 2004-09-07 |
Method for the preparation of a semiconductor device Grant 6,777,158 - Maemori , et al. August 17, 2 | 2004-08-17 |
Positive-working photoresist composition App 20040072103 - Sato, Kazufumi ;   et al. | 2004-04-15 |
Method for the preparation of a semiconductor device App 20040067615 - Maemori, Satoshi ;   et al. | 2004-04-08 |
Positive-working photoresist composition Grant 6,677,103 - Sato , et al. January 13, 2 | 2004-01-13 |
Resist developer and resist pattern formation method using same App 20030203316 - Nitta, Kazuyuki | 2003-10-30 |
Photosensitive laminate, process for forming resist pattern using same and positive resist composition Grant 6,638,684 - Okubo , et al. October 28, 2 | 2003-10-28 |
Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device App 20030190550 - Nitta, Kazuyuki ;   et al. | 2003-10-09 |
Positive resist composition Grant RE38,254 - Sato , et al. September 16, 2 | 2003-09-16 |
Method for decreasing surface defects of patterned resist layer Grant 6,605,417 - Nitta , et al. August 12, 2 | 2003-08-12 |
Method for decreasing surface defects of patterned resist layer App 20030138736 - Nitta, Kazuyuki ;   et al. | 2003-07-24 |
Positive-working photoresist composition Grant 6,444,394 - Sato , et al. September 3, 2 | 2002-09-03 |
Positive-working photoresist composition App 20020110750 - Sato, Kazufumi ;   et al. | 2002-08-15 |
Method for forming a hole-patterned photoresist layer App 20020106580 - Nitta, Kazuyuki ;   et al. | 2002-08-08 |
Positive-working photoresist composition and photosensitive material using same App 20020058202 - Maemori, Satoshi ;   et al. | 2002-05-16 |
Positive-working photoresist composition and resist patterning method using same App 20020045130 - Nitta, Kazuyuki ;   et al. | 2002-04-18 |
Method for the preparation of a semiconductor device App 20020045133 - Maemori, Satoshi ;   et al. | 2002-04-18 |
Photosensitive laminate, process for forming resist pattern using same and positive resist compostion App 20020045123 - Okubo, Waki ;   et al. | 2002-04-18 |
Method for decreasing surface defects of patterned resist layer App 20010014431 - Nitta, Kazuyuki ;   et al. | 2001-08-16 |
Chemical-sensitization photoresist composition Grant 5,945,517 - Nitta , et al. August 31, 1 | 1999-08-31 |
Chemical-sensitization positive-working photoresist composition Grant 5,856,058 - Sato , et al. January 5, 1 | 1999-01-05 |
Positive-working photoresist composition and multilayered resist material using the same Grant 5,817,444 - Sato , et al. October 6, 1 | 1998-10-06 |
Positive-working photoresist composition Grant 5,770,343 - Sato , et al. June 23, 1 | 1998-06-23 |
Positive photoresist compositions and multilayer resist materials using the same Grant 5,728,504 - Hosoda , et al. March 17, 1 | 1998-03-17 |