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Patent applications and USPTO patent grants for Nitschke; Christiane.The latest application filed is for "etching composition and use thereof with feedback control of hf in beol clean".
Patent | Date |
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Etching composition and use thereof with feedback control of HF in BEOL clean App 20060118522 - Ramachandran; Ravikumar ;   et al. | 2006-06-08 |
Etching composition and use thereof with feedback control of HF in BEOL clean App 20030209514 - Ramachandran, Ravikumar ;   et al. | 2003-11-13 |
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