Patent | Date |
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Method For Operating Filtration Apparatus And Filtration Apparatus App 20180369723 - MIKI; Hiroko ;   et al. | 2018-12-27 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 10,078,059 - Ishibashi , et al. September 18, 2 | 2018-09-18 |
Silicon carbide substrate, silicon carbide semiconductor device, and methods for manufacturing silicon carbide substrate and silicon carbide semiconductor device Grant 9,691,608 - Tanaka , et al. June 27, 2 | 2017-06-27 |
Nitride Crystal, Nitride Crystal Substrate, Epilayer-containing Nitride Crystal Substrate, Semiconductor Device And Method Of Manufacturing The Same App 20170115239 - ISHIBASHI; Keiji ;   et al. | 2017-04-27 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 9,570,540 - Ishibashi , et al. February 14, 2 | 2017-02-14 |
Silicon Carbide Substrate, Silicon Carbide Semiconductor Device, And Methods For Manufacturing Silicon Carbide Substrate And Silicon Carbide Semiconductor Device App 20160086798 - Tanaka; So ;   et al. | 2016-03-24 |
Group III nitride crystal substrate Grant 9,035,429 - Nishiura , et al. May 19, 2 | 2015-05-19 |
Compound semiconductor substrate Grant 9,000,567 - Miyahara , et al. April 7, 2 | 2015-04-07 |
Nitride Crystal, Nitride Crystal Substrate, Epilayer-containing Nitride Crystal Substrate, Semiconductor Device And Method Of Manufacturing The Same App 20140349112 - ISHIBASHI; Keiji ;   et al. | 2014-11-27 |
Polishing agent, compound semiconductor manufacturing method, and semiconductor device manufacturing method Grant 8,841,215 - Ishibashi , et al. September 23, 2 | 2014-09-23 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 8,828,140 - Ishibashi , et al. September 9, 2 | 2014-09-09 |
Method Of Surface Treatment Of Group Iii Nitride Crystal Film, Group Iii Nitride Crystal Substrate, Group Iii Nitride Crystal Substrate With Epitaxial Layer, And Semiconductor Device App 20140124826 - Ishibashi; Keiji ;   et al. | 2014-05-08 |
Nitride Crystal, Nitride Crystal Substrate, Epilayer-containing Nitride Crystal Substrate, Semiconductor Device And Method Of Manufacturing The Same App 20130292802 - ISHIBASHI; Keiji ;   et al. | 2013-11-07 |
Method Of Processing A Surface Of Group Iii Nitride Crystal And Group Iii Nitride Crystal Substrate App 20130075867 - NISHIURA; Takayuki ;   et al. | 2013-03-28 |
Method of packaging compound semiconductor substrates Grant 8,381,493 - Nishiura , et al. February 26, 2 | 2013-02-26 |
Method of processing a surface of group III nitride crystal and group III nitride crystal substrate Grant 8,338,299 - Nishiura , et al. December 25, 2 | 2012-12-25 |
Compound Semiconductor Substrate App 20120292747 - MIYAHARA; Kenichi ;   et al. | 2012-11-22 |
Polishing Agent, Compound Semiconductor Manufacturing Method, and Semiconductor Device Manufacturing Method App 20120164833 - Ishibashi; Keiji ;   et al. | 2012-06-28 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 8,192,543 - Ishibashi , et al. June 5, 2 | 2012-06-05 |
Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member and gallium nitride compound semiconductor membrane Grant 8,177,911 - Hachigo , et al. May 15, 2 | 2012-05-15 |
Damage Evaluation Method Of Compound Semiconductor Member, Production Method Of Compound Semiconductor Member, Gallium Nitride Compound Semiconductor Member, And Gallium Nitride Compound Semiconductor Membrane App 20120100643 - Hachigo; Akihiro ;   et al. | 2012-04-26 |
Method of polishing compound semiconductor substrate, compound semiconductor substrate, method of manufacturing compound semiconductor epitaxial substrate, and compound semiconductor epitaxial substrate Grant 8,133,815 - Mezaki , et al. March 13, 2 | 2012-03-13 |
Production method of compound semiconductor member Grant 8,115,927 - Hachigo , et al. February 14, 2 | 2012-02-14 |
GaAs semiconductor substrate for group III-V compound semiconductor device Grant 8,044,493 - Nishiura October 25, 2 | 2011-10-25 |
III-V compound semiconductor substrate manufacturing method Grant 7,960,284 - Hachigo , et al. June 14, 2 | 2011-06-14 |
Nitride-based Compound Semiconductor Device, Compound Semiconductor Device, And Method Of Producing The Devices App 20110018105 - Hachigo; Akihiro ;   et al. | 2011-01-27 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 7,854,804 - Ishibashi , et al. December 21, 2 | 2010-12-21 |
Surface treatment method for nitride crystal, nitride crystal substrate, nitride crystal substrate with epitaxial layer and semiconductor device, and method of manufacturing nitride crystal substrate with epitaxial layer and semiconductor device Grant 7,851,381 - Ishibashi , et al. December 14, 2 | 2010-12-14 |
Method Of Processing A Surface Of Group Iii Nitride Crystal And Group Iii Nitride Crystal Substrate App 20100248478 - NISHIURA; Takayuki ;   et al. | 2010-09-30 |
Method Of Surface Treatment Of Group Iii Nitride Crystal Film, Group Iii Nitride Crystal Substrate, Group Iii Nitride Crystal Substrate With Epitaxial Layer, And Semiconductor Device App 20100227532 - Ishibashi; Keiji ;   et al. | 2010-09-09 |
Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semiconductor crystal Grant 7,737,043 - Nishiura , et al. June 15, 2 | 2010-06-15 |
Nitride Crystal, Nitride Crystal Substrate, Epilayer-containing Nitride Crystal Substrate, Semiconductor Device And Method Of Manufacturing The Same App 20100123168 - ISHIBASHI; Keiji ;   et al. | 2010-05-20 |
Nitride semiconductor substrate, and method for working nitride semiconductor substrate Grant 7,713,844 - Nishiura , et al. May 11, 2 | 2010-05-11 |
Damage Evaluation Method Of Compound Semiconductor Member, Production Method Of Compound Semiconductor Member, Gallium Nitride Compound Semiconductor Member, And Gallium Nitride Compound Semiconductor Membrane App 20100068834 - Hachigo; Akihiro ;   et al. | 2010-03-18 |
Nitride-based Compound Semiconductor, Method Of Cleaning A Compound Semiconductor, Method Of Producing The Same, And Substrate App 20090291567 - HACHIGO; AKIHIRO ;   et al. | 2009-11-26 |
GaAs semiconductor substrate and fabrication method thereof Grant 7,619,301 - Nishiura , et al. November 17, 2 | 2009-11-17 |
Method of Packaging Compound Semiconductor Substrates App 20090249747 - Nishiura; Takayuki ;   et al. | 2009-10-08 |
Nitride-based compound semiconductor, method of cleaning a compound semiconductor, method of producing the same, and substrate Grant 7,569,493 - Hachigo , et al. August 4, 2 | 2009-08-04 |
Polishing Slurry, Method Of Treating Surface Of Gaxin1-xasyp1-y Crystal And Gaxin1-xasyp1-y Crystal Substrate App 20090159845 - ISHIBASHI; Keiji ;   et al. | 2009-06-25 |
GaAs SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME, AND GROUP III-V COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME App 20090140390 - NISHIURA; Takayuki | 2009-06-04 |
Polishing slurry, method of treating surface of Ga.sub.xIn.sub.1-xAs.sub.yP.sub.1-y crystal and Ga.sub.xIn.sub.1-xAs.sub.yP.sub.1-y crystal substrate Grant 7,507,668 - Ishibashi , et al. March 24, 2 | 2009-03-24 |
GaAs semiconductor substrate and fabrication method thereof App 20080296738 - Nishiura; Takayuki ;   et al. | 2008-12-04 |
Method of Polishing Compound Semiconductor Substrate, Compound Semiconductor Substrate, Method of Manufacturing Compound Semiconductor Epitaxial Substrate, and Compound Semiconductor Epitaxial Substrate App 20080299350 - Mezaki; Yoshio ;   et al. | 2008-12-04 |
Method of Cleaning Gaas Substrate, Method of Producing Gaas Substrate, Method of Fabricating Epitaxial Susbstrate, and Gaas Wafer App 20080292877 - Horie; Yusuke ;   et al. | 2008-11-27 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same App 20080272392 - Ishibashi; Keiji ;   et al. | 2008-11-06 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same App 20080271667 - Ishibashi; Keiji ;   et al. | 2008-11-06 |
Method of surface treating substrates and method of manufacturing III-V compound semiconductors Grant 7,432,186 - Nishiura , et al. October 7, 2 | 2008-10-07 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same Grant 7,416,604 - Ishibashi , et al. August 26, 2 | 2008-08-26 |
III-V Compound Semiconductor Substrate Manufacturing Method App 20080176400 - Hachigo; Akihiro ;   et al. | 2008-07-24 |
Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member and gallium nitride compound semiconductor membrane App 20080044338 - Hachigo; Akihiro ;   et al. | 2008-02-21 |
Surface treatment method for nitride crystal, nitride crystal substrate, nitride crystal substrate with epitaxial layer and semiconductor device, and method of manufacturing nitride crystal substrate with epitaxial layer and semiconductor device App 20070281484 - Ishibashi; Keiji ;   et al. | 2007-12-06 |
Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semiconductor crystal App 20070269989 - Nishiura; Takayuki ;   et al. | 2007-11-22 |
Method of processing a surface of group III nitride crystal and group III nitride crystal substrate App 20070254401 - Nishiura; Takayuki ;   et al. | 2007-11-01 |
Surface treatment method of compound semiconductor substrate, fabrication method of compound semiconductor, compound semiconductor substrate, and semiconductor wafer App 20070207630 - Nishiura; Takayuki ;   et al. | 2007-09-06 |
Nitride semiconductor substrate, and method for working nitride semiconductor substrate App 20070080366 - Nishiura; Takayuki ;   et al. | 2007-04-12 |
Polishing slurry, method of treating surface of GaxIn1-xASyP1-y crystal and GaxIn1-xASyP1-y crystal substrate App 20070075041 - Ishibashi; Keiji ;   et al. | 2007-04-05 |
Container, a packaging body, manufacturing method of a container, manufacturing method of a packaging body, and a compound semiconductor substrate App 20070023321 - Gotou; Noboru ;   et al. | 2007-02-01 |
Method of Surface Treating Substrates and Method of Manufacturing III-V Compound Semiconductors App 20070014915 - Nishiura; Takayuki ;   et al. | 2007-01-18 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same App 20060292728 - Ishibashi; Keiji ;   et al. | 2006-12-28 |
Method of working nitride semiconductor crystal App 20060292832 - Ishibashi; Keiji ;   et al. | 2006-12-28 |
Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member, and gallium nitride compound semiconductor membrane App 20060281201 - Hachigo; Akihiro ;   et al. | 2006-12-14 |
Compound semiconductor substrate, epitaxial substrate, processes for producing compound semiconductor substrate, and epitaxial substrate App 20060281328 - Nishiura; Takayuki ;   et al. | 2006-12-14 |
Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member, and gallium nitride compound semiconductor membrane App 20060272573 - Hachigo; Akihiro ;   et al. | 2006-12-07 |
Nitride-based compound semiconductor, method of cleaning a compound semiconductor, method of producing the same, and substrate App 20060264011 - Hachigo; Akihiro ;   et al. | 2006-11-23 |
Method of surface treatment of group III nitride crystal film, group III nitride crystal substrate, group III nitride crystal substrate with epitaxial layer, and semiconductor device App 20060236922 - Ishibashi; Keiji ;   et al. | 2006-10-26 |
Group III-V compound semiconductor wafers and manufacturing method thereof App 20010023022 - Nishiura, Takayuki ;   et al. | 2001-09-20 |